Abstract

The final step in the LIGA process for manufacturing metallic microstructures is the electroplating of the metal part. The electroplating process can be described by homogeneous dissociation reactions in the electrolyte bath and finite rate surface reactions on the electrode. In this paper we develop a finite volume method for computing electrodeposition in the LIGA process. We employ a time splitting algorithm for coupling the bulk and surface reactions. As an alternative, the species concentration field is solved over the whole domain using a direct method. The two methods are compared to establish the validity and efficiency of the time-splitting algorithm.

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