Abstract

The paper reports a new, transferred micromachined microwave switch on top of suspended transmission lines for high performance and Si-based CMOS compatibility. The micro assembly transfer technique is used to integrate functional complex structures of the mircomachined microwave switch and suspended coplanar waveguides. The electrostatically actuated torsional switch has been successfully driven in a low voltage of 17 volt. Furthermore, the resonance of its dynamic behavior is numerically calculated as 2.6 KHz. In summary, the new microwave switch with suspended Si-based coplanar waveguides presents low driving voltage, CMOS-process compatibility and potentially high transmission efficiency on a lossy Si-based substrate.

Volume Subject Area:
Micro-Electro-Mechanical Systems
Topics:
Complementary metal oxide semiconductors, Manufacturing, Microelectromechanical systems, Microwaves, Switches, Waveguides, Microassembling, Micromachining, Resonance, Transmission lines
This content is only available via PDF.
Copyright © 2001 by The American Society of Mechanical Engineers
You do not currently have access to this content.