Abstract
Present study investigates the roughness effect on laminar gas flow for microchannels ranging from 40 to 600 μm with various roughness heights (40–82 nm) by systematical experiments. The micro-channels are manufactured by micro-machining technology and KOH anisotropic etching is employed to achieve various roughness patterns. Experimental results shows that higher product levels of Reynolds number (Reh) and friction factor (f) are obtained for microchannels of larger size and smaller relative roughness and friction factor f approaches to laminar flow theory value f0 for very smooth channel but the ratio of (f/f0) decreases as the surface roughness increases.
Volume Subject Area:
Micro-Electro-Mechanical Systems
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Copyright © 2001 by The American Society of Mechanical Engineers
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