Abstract

This study intends to improve the performances of conventional electrostatic actuator regarding its amplitude and driving force. Two approaches including the oblique-comb actuator design and 2-DOF vibration system for amplitude amplification are proposed. The former has advantages in both generated force and allowable stroke, while the latter has the nature of larger output amplitude driven by smaller input stroke. Base on the advantages of both methods, the combination of these two designs can further improve the performance regarding output amplitude and driving voltage.

Volume Subject Area:
Micro-Electro-Mechanical Systems
Keywords:
electrostatic actuator, oblique-comb actuator, 2-DOF vibration system
Topics:
Actuators, Design, Electrostatic actuators, Microelectromechanical systems, Vibration equipment
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Copyright © 2001 by The American Society of Mechanical Engineers
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