Abstract
A new measurement technology for the mems field is proposed using optical measurement method. Furthermore, this measurement and computer simulation technologies are combined together in order to perform a measurement evaluation which has been never done before and which has been desired in mems fields. For example, the thermal deformation by a laser beam in the case of the dynamics measurement of a microstructure using an optical method influences a measurement field. That is, the optical measurement is already not a non-contact measurement in the mems fields. As shown here, there are such practical problems in the measurement of the mems field. Then, these problems have never been discussed before, because any measurernent method did not exist. These problems are going to be discussed in this paper. In order to avoid this problem as much as possible, a novel measurement technology is discussed and proposed in this paper. A new measurement system is constructed under this discussion. Furthermore, using this system, the physical phenomena in the mems field can be observed and discussed at the same time. That is, the shape of an object, the mechanical deformation of the object forced on the external forces, the stress in the object, and viscosity of air around the vibrating object are investigated.
