Transient Optimization of an Electrically-Damped Cantilever-Supported Microactuator and the Pull-In Analysis

Analytic modeling of the transient behavior of an electrically-damped cantilever-supported microactuator using the perturbation method and linear control theory is presented. Five control parameters are identified and the transient optimization of the dynamic system to reduce the overshoot and settling time is carried out. With the ITAE performance index minimized, the optimal control parameters are obtained and the resultant optimized transient behavior is shown. We apply the Routh-Hurwitz criterion to analyze the stability of the dynamic system and three inequality relations for a stable system are derived. The pull-in phenomenon for a short-cantilever actuator is investigated with this simple model.