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Proceedings Papers

Micro-Electro-Mechanical Systems (MEMS)

Micro-Manufacturing Processes in MEMS and Other Advanced Systems

Application of Microfabrication to Fluid Mechanics

Microfluidic Transport Techniques

Microfluidic Devices for Gases — I

Microfluidic Valves

Microfluidic Devices for Liquids

Microfluidic Devices for Gases — II

Microelectromechanical Systems

MEMS Devices and Applications

MEMS Tribology and Material Issues

MEM and Microfluidic Poster Session

MEMS Actuators and Actuation Mechanisms

MEM Sensors, Processes, and Tools

Computational Methods for Analysis, Design, and Simulation of MEMS

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