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Proceedings Papers

Proceedings Volume Cover
ASME 2005 International Mechanical Engineering Congress and Exposition
November 5–11, 2005
Orlando, Florida, USA
Conference Sponsors:
  • Microelectromechanical Systems Division
ISBN:
0-7918-4224-X
Microelectromechanical Systems

Microelectromechanical Systems

BioMEMS

Fabricating Plastic Microfluidic Devices With Photodefinable Microvalves for Protein Separations
Carl K. Fredrickson, Champak Das, Fernando T. Tavares, Ryan Ferguson, Zheng Xia, Z. Hugh Fan
IMECE 2005; 3-7https://doi.org/10.1115/IMECE2005-79229
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Topics: Microfluidics , Molding , Polymerization , Proteins , Separation (Technology)
Simulation of Bioparticle Movement in a Dielectrophoretic Microchannel
Mahesh Kamat, Hongseok Noh
IMECE 2005; 9-17https://doi.org/10.1115/IMECE2005-79964
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Topics: Microchannels , Simulation , Electrodes , Particulate matter , Domes (Structural elements) , Drag (Fluid dynamics) , Trajectories (Physics) , Design , Flow (Dynamics) , Fluids
Design and Characterization of a BioMEMS Device for In-Vitro Mechanical Stimulation of Single Adherent Cells
Hrishikesh V. Panchawagh, David Serrell, Dudley S. Finch, Tammy Oreskovic, Roop L. Mahajan
IMECE 2005; 19-25https://doi.org/10.1115/IMECE2005-79980
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Topics: Biomedical microelectromechanical systems , Design , Actuators , Corrosion , Electrolysis , Ion migration , Metals , Plating , Polishing equipment , Polysilicon
Immunomagnetic Separation in Microchannels: From MEMS to BioNEMS
Ashok Sinha, Ranjan Ganguly, Ishwar K. Puri
IMECE 2005; 27-31https://doi.org/10.1115/IMECE2005-81569
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Topics: Microchannels , Microelectromechanical systems , Separation (Technology) , Bacteria , Design , Testing , Water , Biological agents , Microparticles , Microscale devices
Single Cell Electrophysiological Analysis via Sub-Micrometer Openings
Sha Li, Liwei Lin
IMECE 2005; 33-36https://doi.org/10.1115/IMECE2005-81765
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Topics: Cancer , Electrolytes , Engineering prototypes , Machining
Application of a PDMS Microsieve for the Patterning of Flagellar Motors in a Microfluidic System
Ryan Pooran, Steve Tung, Jin Woo Kim
IMECE 2005; 37-41https://doi.org/10.1115/IMECE2005-81804
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Topics: Actuators , Microfluidics , Motors , Plasma desorption mass spectrometry
A Microfluidic Filter Chip for Highly Sensitive Chemiluminescence Detection of E. Coli O157:H7
Balaji Srinivasan, Madhukar Varshney, Steve Tung, Yanbin Li
IMECE 2005; 43-48https://doi.org/10.1115/IMECE2005-81881
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Topics: Chemiluminescence , Filters , Microfluidics
Packaging of In-Plane Thermal Microactuators for BioMEMS Applications
Hrishikesh V. Panchawagh, Faheem F. Faheem, Cari F. Herrmann, David B. Serrell, Dudley S. Finch, Roop L. Mahajan
IMECE 2005; 49-52https://doi.org/10.1115/IMECE2005-82528
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Topics: Biomedical microelectromechanical systems , Microactuators , Packaging , Actuators , Water , Clearances (Engineering) , Coatings , Flip-chip , Microelectromechanical systems , Particulate matter

Device Characterization and Metrology

A Metrological Traceability System for Microflowrate Measurement
C.-T. Yang, W.-T. Lin, F.-R. Yang, C.-C. Feng
IMECE 2005; 53-57https://doi.org/10.1115/IMECE2005-79443
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Topics: Control equipment , Design , Fluid dynamics , Fluidic devices , Measurement systems , Measurement uncertainty , Measurement units and standards , Microelectromechanical systems , Microfluidics , Pistons
3D Micro-Metrology Using a Nanofocus X-Ray Source
Arlyn Antolak, Daniel Morse, Georg Aigeldinger, Joseph Ceremuga
IMECE 2005; 59-63https://doi.org/10.1115/IMECE2005-79601
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Topics: Metrology , X-rays , Resolution (Optics) , Inspection , Microelectromechanical systems , Microfluidics , Rendering
Raman Thermometry of an Electro-Thermal Microactuator
Sean P. Kearney, Leslie M. Phinney, Michael S. Baker
IMECE 2005; 65-70https://doi.org/10.1115/IMECE2005-79615
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Topics: Microactuators , Temperature measurement , Actuators , Elastic scattering , Raman effect , Resolution (Optics) , Temperature , Temperature profiles , Uncertainty
Structural Dynamics of an RF MEMS Switch
Hartono Sumali, Jaron D. Kuppers, David A. Czaplewski, Jordan E. Massad, Christopher W. Dyck
IMECE 2005; 71-75https://doi.org/10.1115/IMECE2005-80956
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Topics: Microelectromechanical systems , Structural dynamics , Switches , Cantilevers , Deflection , Displacement , Dynamics (Mechanics) , Experimental methods , Finite element model , Lasers
Optical and Electrical Methods to Measure the Dynamic Behavior of a MEMS Gyroscope Sensor
Alfredo Cigada, Elisabetta Leo, Marcello Vanali
IMECE 2005; 77-85https://doi.org/10.1115/IMECE2005-81022
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Topics: Microelectromechanical systems , Sensors , Design , Laser Doppler vibrometers , Vibration measurement
Noise Studies in Implanted Piezoresistors
Andrew A. Davenport, Paul Lim, Beth Pruitt
IMECE 2005; 87-93https://doi.org/10.1115/IMECE2005-81590
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Topics: Noise (Sound) , Piezoresistors
Micro-Cantilever Based Metrology Tool for Flow Characterization of Liquid and Gaseous Micro/Nanojets
Jungchul Lee, Kianoush Naeli, Hanif Hunter, John Berg, Tanya Wright, Christophe Courcimault, Nisarga Naik, Mark Allen, Oliver Brand, Ari Glezer, William King
IMECE 2005; 95-100https://doi.org/10.1115/IMECE2005-81732
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Topics: Atomic force microscopy , Cantilevers , Flow (Dynamics) , Metrology , Microcantilevers , Microelectromechanical systems , Heat flux , Heating , Jets , Nozzles
Optical Characterization of a Bimorph Deformable Mirror
David A. Horsley, Hyunkyu Park, Chih-Wei Chuang, Sophie P. Laut, John S. Werner
IMECE 2005; 101-105https://doi.org/10.1115/IMECE2005-81836
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Topics: Mirrors , Disks , Fittings , Interferometers , Laser Doppler vibrometers , Mode shapes , Optics , Plate theory
A Novel Method for Determining Pressure Sensitivity of Underwater Shear-Stress Sensor Skins
Jason Clendenin, Yong Xu, Steve Tung
IMECE 2005; 107-116https://doi.org/10.1115/IMECE2005-82123
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Topics: Pressure , Sensors , Shear stress , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Gages , Stress , Computer simulation , Deflection , Metrology
Picoliter Fluidic Flow Characterization Using Ion-Selective Measurement
Alberto Cavallaro, Laxman Saggere
IMECE 2005; 117-122https://doi.org/10.1115/IMECE2005-82646
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Topics: Flow (Dynamics) , Microfluidics , Hydrogen , Sensors , Glass , Dimensions , Ions

Fabrication and Packaging

Development of Bulk-Titanium-Based MEMS RF Switch for Harsh Environment Applications
C. Ding, X. Huang, G. Gregori, E. R. Parker, M. P. Rao, D. R. Clarke, N. C. MacDonald
IMECE 2005; 123-126https://doi.org/10.1115/IMECE2005-79591
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Topics: Microelectromechanical systems , Switches , Titanium
Single-Step, Integrated Assembly and Encapsulation of Microfluidic Bubble Generator
Emil J. Geiger, Julian M. Lippmann, Jeremy A. Frank, Albert P. Pisano
IMECE 2005; 127-130https://doi.org/10.1115/IMECE2005-80105
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Topics: Borosilicate glasses , Bubble chambers , Bubbles , Contact resistance , Copper , Dimensions , Fluids , Gages , Generators , Injection molded plastics
Two-Station Embossing Process for Rapid Fabrication of Polymer Microstructures
Donggang Yao, Allen Y. Yi, Lei Li, Pratapkumar Nagarajan
IMECE 2005; 131-132https://doi.org/10.1115/IMECE2005-80482
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Topics: Embossing , Manufacturing , Polymers , Cycles , Glass , Heating , Mass production , Mechanical properties , Microfabrication , Molding
Development of Membrane Micro Embossing (MeME) Process for Self-Supporting Polymer Membrane Microchannel
Masashi Ikeuchi, Koji Ikuta
IMECE 2005; 133-136https://doi.org/10.1115/IMECE2005-80782
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Topics: Embossing , Membranes , Microchannels , Polymers , Glass transition , Heat , Microfabrication , Microscale devices , Sealing (Process) , Wall thickness
A Dual-EDM Reverse Damascene Process for RF Switches and Other Bulk Metal Devices
K. Udeshi, M. Richardson, J.-J. Hung, L. Que, G. M. Rebeiz, Y. B. Gianchandani
IMECE 2005; 137-141https://doi.org/10.1115/IMECE2005-80913
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Topics: Electrical discharge machining , Metals , Switches , Manufacturing , Grinding , Lithography , Machining , Stainless steel
A Novel Batch Production Technique of Metal Embedded Thin Film Microsensors for Applications in Manufacturing
Arindom Datta, Hongseok Choi, Xiaochun Li
IMECE 2005; 143-144https://doi.org/10.1115/IMECE2005-81211
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Topics: Manufacturing , Metals , Microsensors , Thin films , Semiconductor wafers , Sensors , Strain gages , Electroplating , Nickel , Etching
Preferential Orientation of Silicon Blocks During Fluidic Self-Assembly of Microelectronics
Adriana Brasoava, Radu Danescu, Visvanathan Srinivasan, David Wells
IMECE 2005; 145-150https://doi.org/10.1115/IMECE2005-81417
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Topics: Microelectronic devices , Self-assembly , Silicon , Electronic components , Printed circuit boards , Probability , Shapes , Water
Computational Simulation on Thermal Aspect of Micro-Fabrication Process for MEMS Device
Raymond K. Yee, Gabriel C. Chan
IMECE 2005; 151-156https://doi.org/10.1115/IMECE2005-81739
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Topics: Microelectromechanical systems , Microfabrication , Micromachining , Simulation , Stress
Contact Thermal Lithography
A. Schmidt, X. Chen, G. Chen
IMECE 2005; 157-159https://doi.org/10.1115/IMECE2005-81748
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Topics: Lithography , Polymers , Heat , Heating , Metals , Semiconductor wafers , Glass , Photolithography , Photomasks , Resolution (Optics)
Micro Investment Molding: Method for Creating Injection Molded Hollow Parts
Julian M. Lippmann, Emil J. Geiger, Albert P. Pisano
IMECE 2005; 161-167https://doi.org/10.1115/IMECE2005-81788
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Topics: Molding , Injection molding , Microneedles , Aluminum , Copolymers , Dimensions , Investment casting (Process) , Investment castings , Microscale devices , Needles
Fabrication of Micromachined Mold Masters for 3-D, High-Aspect-Ratio Cell Culturing Scaffolds
Yanzhu Zhao, Xiaosong Wu, Yong-Kyu Yoon, Jung-Hwan Park, Stephen J. Kennedy, Zvi Schwartz, Barbara D. Boyan, Mark G. Allen
IMECE 2005; 169-175https://doi.org/10.1115/IMECE2005-81991
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Topics: Manufacturing , Micromachining , Bone , Semiconductor wafers , Etching , Hydrogels , Molding , Plasma desorption mass spectrometry , Silicon
Interconnecting Microfluidic Package and Hybrid Interface for Chip-Based Sensor
Naveenkumar S. Palsandram, Peng Zhang, Michael Pepper, Moosung Lee, Hyoung J. Cho
IMECE 2005; 177-181https://doi.org/10.1115/IMECE2005-82031
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Topics: Microfluidics , Sensors
A Microelectronics-Compatible Process for Surface Micromachining of MEMS and MOEMS
Meetul Goyal, Robert C. Anderson, Jordan M. Berg, Richard O. Gale, Mark Holtz, Henryk Temkin
IMECE 2005; 183-188https://doi.org/10.1115/IMECE2005-82704
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Topics: Microelectromechanical systems , Microelectronic devices , Micromachining , Microoptoelectromechanical systems , Etching , Manufacturing , Silicon , Aluminum , Critical heat flux , Electrodes
Direct-Write Fabrication of Microchannel in Epoxy Matrix
Ebrahim Ghafar-Zadeh, Mohamad Sawan, Daniel Therriault
IMECE 2005; 189-190https://doi.org/10.1115/IMECE2005-82905
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Topics: Epoxy adhesives , Epoxy resins , Manufacturing , Microchannels , Complementary metal oxide semiconductors , Inks , Circuits , Glass , Heat , Nanocomposites

General

Surface Tension Actuators Droplets in Microchannels
Eric Baird, Kamran Mohseni
IMECE 2005; 191-197https://doi.org/10.1115/IMECE2005-79371
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Topics: Actuators , Drops , Microchannels , Surface tension , Dielectrophoresis , Fluids , Microfluidics
Vibrational Characteristics of Micro Beams
Oladipo Onipede, Jr., Ilya Avdeev, Amir Khalilollahi, Lisa Buziewicz
IMECE 2005; 199-200https://doi.org/10.1115/IMECE2005-79560
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Topics: Microbeams , Damping , Design , Dynamic models , Dynamic response , Filters , Microelectromechanical systems , Stiffness
Design and Optimization of Thermomechanical Actuator via Contour Shaping
Shih-Chi Chen, Martin L. Culpepper
IMECE 2005; 201-208https://doi.org/10.1115/IMECE2005-79780
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Topics: Actuators , Design , Optimization , Thermomechanics , Displacement , Engineering simulation , Equipment performance , Errors , Finite element analysis , Joules
Measurement of the Size Effect in the Micron-Sized Structures Using the AFM
Seong-Hyun Ko, Hun-Kee Lee, Jun-Soo Han, Hyun Chul Park
IMECE 2005; 209-212https://doi.org/10.1115/IMECE2005-80184
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Topics: Atomic force microscopy , Size effect , Mechanical properties , Aluminum , Bridges (Structures) , Cantilevers , Deformation , Mechanical testing , Microelectromechanical systems , Stiffness
Electrokinetic Focusing and Dispensing of Particles and Cells on Microfluidic Chips
Xiangchun Xuan, Edmond W. K. Young, Dongqing Li
IMECE 2005; 213-219https://doi.org/10.1115/IMECE2005-80223
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Topics: Electrokinetics , Microfluidics , Particulate matter , Erythrocytes , Microscopy , Separation (Technology)
A Nanoindentation-Based Microbridge Testing Method for Mechanical Characterization of Thin Films for MEMS Applications
Zhiqiang Cao, Tong-Yi Zhang, Xin Zhang
IMECE 2005; 221-228https://doi.org/10.1115/IMECE2005-80288
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Topics: Microelectromechanical systems , Nanoindentation , Testing , Thin films , Plasma-enhanced chemical vapor deposition , Stress , Young's modulus , Residual stresses , Deflection , Deformation
Direct Micro Mechanical Testing Method for MEMS Materials
Bo Li, Quanfang Chen
IMECE 2005; 229-232https://doi.org/10.1115/IMECE2005-80289
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Topics: Mechanical testing , Microelectromechanical systems , Fracture toughness , Nickel , Ultraviolet radiation , Mechanical properties , Boundary-value problems , Brittleness , Deformation , Design
A Hybrid Rapid Microfluidic Mixer Utilizing Electrokinetic Relay and Asymmetric Flow Geometries for Lab-on-a-Chip Applications
Yiou Wang, Jiang Zhe, Prashanta Dutta, Gary J. Cheng
IMECE 2005; 233-239https://doi.org/10.1115/IMECE2005-80423
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Topics: Electrokinetics , Flow (Dynamics) , Microfluidics
Ring Microgyroscope Modeling and Performance Evaluation
Mehdi Esmaeili, Mohammad Durali, Nader Jalili
IMECE 2005; 241-247https://doi.org/10.1115/IMECE2005-80635
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Topics: Microgyroscopes , Modeling , Performance evaluation
3D Droplet Transportation by EWOD Actuations on Flexible Polymer Films
Hanping Yang, Shih-Kang Fan, Chan-Pau Lin, Chien Tai Wu, Wensyang Hsu
IMECE 2005; 249-252https://doi.org/10.1115/IMECE2005-80744
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Topics: Drops , Polymer films , Transportation systems , Glass , Microfluidics
Numerical and Experimental Analysis of a Nonlinear Vibrating MEMS
Francesco Braghin, Elisabetta Leo, Ferruccio Resta
IMECE 2005; 253-261https://doi.org/10.1115/IMECE2005-81014
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Topics: Experimental analysis , Microelectromechanical systems , Resonance , Deformation , Design , Dynamic response , Hardening , Lumped parameter models , Vibration
An Empirical Study of Boss/Seat Materials and Geometries for Ultra Low-Leakage MEMS Micro-Valves
Bernard A. Lynch, Brian G. Jamieson, Patrick A. Roman, Charles M. Zakrzwski
IMECE 2005; 263-267https://doi.org/10.1115/IMECE2005-81082
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Topics: Leakage , Microelectromechanical systems , Valves , Sealing (Process) , Silicon , Manganese (Metal) , Plasma desorption mass spectrometry , Seals , Coating processes , Coatings
Rapid Mixing in an Overlapping Crisscross Micromixer
Lilin Wang, Jing-Tang Yang
IMECE 2005; 269-271https://doi.org/10.1115/IMECE2005-81145
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Topics: Design , Flow (Dynamics) , Fluids , Microchannels , Microfluidics , Numerical analysis , Plasma desorption mass spectrometry
Synthetic Jets for Thermal Management of Microelectronic Chips
N. Erbas, M. Koklu, O. Baysal
IMECE 2005; 273-277https://doi.org/10.1115/IMECE2005-81419
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Topics: Jets , Thermal management , Channel flow , Temperature , Cavities , Computation , Heat transfer , Integrated circuits , Membranes , Momentum
Design and Analysis of a Double Superimposed Chamber MEMS Micropump
Enrico Zordan, Farid Amirouche
IMECE 2005; 279-286https://doi.org/10.1115/IMECE2005-81709
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Topics: Design , Microelectromechanical systems , Micropumps , Flow (Dynamics) , Pumps , Membranes , Pressure , Diffusers , Dimensions , Nozzles
ARCTIC: A Rotary Compressor Thermally Insulated µCooler
Joshua D. Heppner, David C. Walther, Albert P. Pisano
IMECE 2005; 287-294https://doi.org/10.1115/IMECE2005-82142
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Topics: Arctic region , Compressors , Compression , Cooling , Design , Heat , Cooling systems , Microelectromechanical systems , Microscale devices , Temperature
A Numerical Model for Micro Balloon-Jointed Actuation
ZhiYong An, Yenwen Lu
IMECE 2005; 295-300https://doi.org/10.1115/IMECE2005-82213
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Topics: Computer simulation , Finite element methods , Rotation , Stiffness
Precise Prediction on Pull-In Instability of a Deformable Micro-Plate Actuated by Distributed Electrostatic Force and Approximate Closed-Form Solutions
Paul C.-P. Chao, Chi-Wei Chiu
IMECE 2005; 301-306https://doi.org/10.1115/IMECE2005-82241
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Topics: Actuators , Microelectromechanical systems , Microplates , Sensors , Deflection , Plates (structures) , Stress , Dynamic models , External pressure , Galerkin method
Influence of Sensor Substrate Geometry on the Sensitivity of MEMS Micro-Extensometers
R. G. Azevedo, I. Chen, O. M. O’Reilly, A. P. Pisano
IMECE 2005; 307-312https://doi.org/10.1115/IMECE2005-82724
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Topics: Geometry , Microelectromechanical systems , Sensors , Silicon
Simulation Study of Static and Dynamic Characteristics of Piezoelectric Thin Film Coated Polymer Tube
Ahalapitiya H. Jayatissa, Himabindu Gadupudi
IMECE 2005; 313-318https://doi.org/10.1115/IMECE2005-82917
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Topics: Polymers , Simulation , Thin films , Pipes , Finite element analysis , Micropumps , Deformation , Disks , Pumps , Strips
Modeling of Displacement Micropump With Passive Check Valves
Ahalapitiya H. Jayatissa, Sandeep Chintakunta
IMECE 2005; 319-323https://doi.org/10.1115/IMECE2005-82921
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Topics: Displacement , Micropumps , Modeling , Valves , Flow (Dynamics) , Actuators , Finite element analysis , Heating , Pumps , Cantilevers

Materials and Applied Mechanics

Mechanical Effects of Galvanic Corrosion of Thin Film Polysilicon
David C. Miller, Ken Gall, Conrad R. Stoldt
IMECE 2005; 325-334https://doi.org/10.1115/IMECE2005-79295
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Topics: Electrolytic corrosion , Mechanical properties , Polysilicon , Thin films , Metals , Corrosion , Design , Elastic moduli , Electrical resistance , Ethanol
Thermoelastic Damping in Flexural-Mode Ring Gyroscopes
Zhili Hao, Farrokh Ayazi
IMECE 2005; 335-343https://doi.org/10.1115/IMECE2005-79965
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Topics: Thermoelastic damping , Design , Damping , Noise (Sound) , Resolution (Optics) , Thermoelasticity , Vibration
Modeling and Vibration Analysis of Vibrating Beam Microgyroscopes Under Longitudinal Rotation of the Support
Mehdi Esmaeili, Mohammad Durali, Nader Jalili
IMECE 2005; 345-351https://doi.org/10.1115/IMECE2005-80633
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Topics: Microgyroscopes , Modeling , Rotation , Vibration analysis
A Fracture Mechanics Model for the Repair of Microcantilevers by Laser Induced Stress Waves
Zayd C. Leseman, Sai Koppaka, Thomas J. Mackin
IMECE 2005; 353-357https://doi.org/10.1115/IMECE2005-81000
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Topics: Fracture mechanics , Lasers , Maintenance , Microcantilevers , Stress , Waves , Stiction , Fluence (Radiation measurement) , Fracture (Materials) , Wavelength
An Analysis of Elastic Deformation Induced by Gradient Residual Stresses in Multilayered MEMS Structures
Shusen Huang, Xin Zhang
IMECE 2005; 359-362https://doi.org/10.1115/IMECE2005-81383
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Topics: Deformation , Microelectromechanical systems , Residual stresses , Cantilevers , Elastic analysis , Errors , Stress
Effect of Film Thickness on Fracture Toughness of Amorphous Diamond-Like Carbon
Krishna Jonnalagadda, Ioannis Chasiotis
IMECE 2005; 363-364https://doi.org/10.1115/IMECE2005-81631
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Topics: Carbon , Diamonds , Film thickness , Fracture toughness , Fracture (Materials) , Atomic force microscopy , Chemical etching , Gages , Hydrogen , Microelectromechanical systems
MEMS Testbed for Mechanical Testing of Nanowires
A. A. Desai, M. A. Haque, P. C. Eklund
IMECE 2005; 365-368https://doi.org/10.1115/IMECE2005-81987
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Topics: Mechanical testing , Microelectromechanical systems , Nanowires , Nanotubes , Buckling , Deformation , Displacement , Elastic moduli , Resolution (Optics) , Testing
Probabilistic Analysis and Design of a MEMS Re-Entry Switch
R. V. Field, Jr., S. Reese
IMECE 2005; 369-376https://doi.org/10.1115/IMECE2005-82492
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Topics: Design , Microelectromechanical systems , Switches , Degrees of freedom , Excitation , Manufacturing , Testing

Micro/Nano Devices and Systems

Modeling the Response of Surface Micromachined Thermal Actuators
Amarendra P. Atre
IMECE 2005; 377-382https://doi.org/10.1115/IMECE2005-79197
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Topics: Actuators , Micromachining , Modeling
A Novel Approach for Batch Fabrication of Bifunctional AFM-SECM Probes
Heungjoo Shin, Peter J. Hesketh, Christine Kranz, Douglas A. Rudolph, Boris Mizaikoff
IMECE 2005; 383-387https://doi.org/10.1115/IMECE2005-79424
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Topics: Atomic force microscopy , Manufacturing , Probes , Electrodes , Imaging , Microscopy , Semiconductor wafers
Membrane Deflection Analysis of the Intelligent Micro-Sensor/Pump Under the Consideration of Micro-Viscosity and Membrane Pillar
T. C. Yih, Shalini R. Gillella
IMECE 2005; 389-397https://doi.org/10.1115/IMECE2005-79531
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Topics: Columns (Structural) , Deflection , Membranes , Microelectromechanical systems , Micropumps , Microsensors , Pumps , Viscosity
Actuated Tweezers for Precision Microassembly
James M. Bailar, Brian A. Kast, James F. Jones
IMECE 2005; 399-403https://doi.org/10.1115/IMECE2005-79581
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Topics: Microassembling , Grippers , Manufacturing , Design , Fixturing , Micromanipulation , Microscale devices , Rapid prototyping , Robotics , Sensors
Development of a High Sensitivity Three-Axis Force/Torque Sensor for Microassembly
Scott E. Rose, James F. Jones, Eniko T. Enikov
IMECE 2005; 405-409https://doi.org/10.1115/IMECE2005-79583
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Topics: Microassembling , Sensors , Torque
Nano-Gap Piezoelectric Resonators for Mechanical RF Magnetic Field Modulation
C. D. White, G. Piazza, P. J. Stephanou, A. P. Pisano
IMECE 2005; 411-414https://doi.org/10.1115/IMECE2005-79623
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Topics: Magnetic fields , Microelectromechanical systems
An Improved Analytical Model for Deflections of a Circular Multi-Layer Piezoelectric Actuator
Mandar Deshpande, Laxman Saggere
IMECE 2005; 415-423https://doi.org/10.1115/IMECE2005-79818
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Topics: Deflection , Piezoelectric actuators , Actuators , Optimization , Design , Microelectromechanical systems , Pressure , Bonding , Cantilevers , Dimensions
Development of a Light-Driven Thin-Film Piezoelectric Microactuator
Mandar Deshpande, Laxman Saggere
IMECE 2005; 425-431https://doi.org/10.1115/IMECE2005-79819
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Topics: Microactuators , Solar cells , Thin films
Design and Fabrication of a Cascaded Electro-Thermal Bimorph Actuator
Cheng-Hsuan Lin, Cheng-Chi Yeh, Chen-Peng Hsu, Wensyang Hsu
IMECE 2005; 433-438https://doi.org/10.1115/IMECE2005-79854
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Topics: Actuators , Design , Heating , Manufacturing
Effects of Rotary Inertia and Shear Deformation on Nonlinear Vibration of Micro/Nano-Beam Resonators
Asghar Ramezani, Aria Alasty
IMECE 2005; 439-445https://doi.org/10.1115/IMECE2005-80204
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Topics: Nonlinear vibration , Rotational inertia , Shear deformation , Microbeams , Partial differential equations , Vibration , Free vibrations , Hamilton's principle , Nonlinear differential equations
Fabrication and Characterization of NEMS-Based Single Nanotube Emitter Arrays
Lixin Dong, Arunkumar Subramanian, Bradley J. Nelson
IMECE 2005; 447-456https://doi.org/10.1115/IMECE2005-80212
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Topics: Carbon nanotubes , Manufacturing , Nanoelectromechanical systems , Nanotubes
Carbon Nanotube-Tipped Microcantilever Arrays for High Speed Biological System Testing and Imaging
Eunjeong Lee
IMECE 2005; 457-464https://doi.org/10.1115/IMECE2005-80703
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Topics: Carbon , Imaging , Nanotubes , Testing , Carbon nanotubes , Dimensions , Engineering simulation , Multi-walled carbon nanotubes , Simulation , Control equipment
Design and Fabrication of a CMOS-MEMS Thermoelectric Infrared Microsensor
Ke-Min Liao, Da-Hong Chiou, Keng-Shun Lin, Rongshun Chen
IMECE 2005; 465-471https://doi.org/10.1115/IMECE2005-80806
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Topics: Complementary metal oxide semiconductors , Design , Manufacturing , Microelectromechanical systems , Microsensors , Sensors , Finite element analysis , Heat transfer , Membranes , Micromachining
Mechanical Testing of Freestanding Nano-Films Using a Novel Finite Diameter Tip MEMS-Based Testing Machine
Zayd C. Leseman, Zuhaib Sheikh, Thomas J. Mackin, Matthew Begley
IMECE 2005; 473-477https://doi.org/10.1115/IMECE2005-80987
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Topics: Machinery , Mechanical testing , Microelectromechanical systems , Testing , Mechanical properties , Membranes , Stress
A Novel Glucose Sensor Based on Deflection of a Thin Membrane
Sandeep Mariserla, Zayd Leseman, Thomas J. Mackin
IMECE 2005; 479-480https://doi.org/10.1115/IMECE2005-81026
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Topics: Deflection , Glucose , Membranes , Sensors , Engineering prototypes , Glucose measurement by monitoring device , Hydrogels , Manufacturing
A Fully-Compliant, In-Plane Rotary, Bistable Micromechanism
Rajesh Luharuka, Peter J. Hesketh
IMECE 2005; 481-485https://doi.org/10.1115/IMECE2005-81220
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Topics: Micromechanical devices , Design , Deflection , Electroplating , Finite element model , Gates (Closures) , Geometry , Linkages , Magnetic materials , Photoresists
Effective Range of Micro and Synthetic Jets for Flow Control
Mehti Koklu, Nurhak Erbas, Oktay Baysal
IMECE 2005; 487-496https://doi.org/10.1115/IMECE2005-81432
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Topics: Flow control , Jets , Flow (Dynamics) , Cavities , Design , Membranes , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Momentum , Oscillations
System Hierarchy Optimization Method for MEMS Applications
Nan Liu, Souran Manoochehri
IMECE 2005; 497-505https://doi.org/10.1115/IMECE2005-81653
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Topics: Microelectromechanical systems , Optimization , Design , Uncertainty , Accelerometers , Geometry , Microfabrication , Robustness , Sensitivity analysis
Design of a Piezoresistive Surface Micromachined Three-Axis Force Transducer for Microassembly
Gustavo A. Roman, Jessica R. Bronson, Gloria J. Wiens, James F. Jones, James J. Allen
IMECE 2005; 507-515https://doi.org/10.1115/IMECE2005-81672
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Topics: Design , Microassembling , Micromachining , Transducers
Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter
Philip J. Stephanou, Gianluca Piazza, Carolyn D. White, Muthu B. J. Wijesundara, Albert P. Pisano
IMECE 2005; 517-523https://doi.org/10.1115/IMECE2005-81679
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Topics: Filters , Thin films , Aluminum , Blocks (Building materials) , Experimental characterization , Manufacturing , Microelectromechanical systems , Poles (Building) , Semiconductor wafers , Vibration
Microelectromechanical Wavelength-Selective Switching for Integrated Optics
Laura Waller, Satoshi Takahashi, Gregory N. Nielson, Dilan Seneviratne, Harry Tuller, George Barbastathis
IMECE 2005; 525-529https://doi.org/10.1115/IMECE2005-81773
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Topics: Optics , Wavelength , Bridges (Structures) , Microelectromechanical systems , Feedback , Filters , Stress , Design , Electrodes , Engineering prototypes
Design, Fabrication, and Characterization of Piezoresistive MEMS Shear Stress Sensors
A. Alvin Barlian, Sung-Jin Park, Vikram Mukundan, Beth L. Pruitt
IMECE 2005; 531-536https://doi.org/10.1115/IMECE2005-81849
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Topics: Design , Manufacturing , Microelectromechanical systems , Sensors , Shear stress
Measurement of Thermophysical Properties of Thin Film Shape Memory Alloys Using the 3-Omega Method
Ankur Jain, Kenneth E. Goodson
IMECE 2005; 537-541https://doi.org/10.1115/IMECE2005-81902
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Topics: Shape memory thin films , Thin films , Nickel titanium alloys , Metals , Shapes , Microactuators , Micropumps , Modeling , Thermal conductivity , Thermal properties
Controlled Separation and Trapping of Particles Using Two-frequency DEP
Sophie Loire, Yanting Zhang, Frederic Bottausci, Noel C. MacDonald, Igor Mezic
IMECE 2005; 543-549https://doi.org/10.1115/IMECE2005-81911
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Topics: Particulate matter , Separation (Technology) , Electric fields , Electrodes , Dielectrophoresis , Microchannels , Titanium , Traveling waves , Biomedicine , Computer simulation
Parylene Micro-Membrane Capacitive Bio/Chemical Sensor
Srinath Satyanarayana, Daniel T. McCormick, Arunava Majumdar
IMECE 2005; 551-552https://doi.org/10.1115/IMECE2005-82017
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Topics: Membranes , Sensors , Cantilevers , Polymers , Stiffness , Stress , Deflection , Design , Geometry , Low temperature
A Novel Nanomaterial Based Electrochemical Sensor for Free Radical Detection
Swanand Patil, Anjum Mehta, Hyoungseok Bang, Hyoung J. Cho, Sudipta Seal
IMECE 2005; 553-557https://doi.org/10.1115/IMECE2005-82094
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Topics: Hydrogen , Nanomaterials , Sensors
Nano-Chemo-Mechanical Sensor Array Platform for High Throughput Selective Coating Material Search
Si-Hyung “Shawn” Lim, Digvijay Raorane, Srinath Satyanarayana, Arunava Majumdar
IMECE 2005; 559-560https://doi.org/10.1115/IMECE2005-82151
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Topics: Coating processes , Coatings , Sensors , Polymers , Vapors , Stress , Explosives , Atomic force microscopy , Belts , Bonding
Design and Modeling of Thermally Actuated MEMS Nanopositioners
Se´bastien Bergna, Jason J. Gorman, Nicholas G. Dagalakis
IMECE 2005; 561-568https://doi.org/10.1115/IMECE2005-82158
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Topics: Actuators , Design , Microelectromechanical systems , Modeling
Monolithic 3-D Microfabrication of Mechanisms With Multiple Independently-Moving Parts
Adam L. Cohen, Susan M. Wooden
IMECE 2005; 569-578https://doi.org/10.1115/IMECE2005-82166
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Topics: Microfabrication , Instrumentation , Manufacturing , Microscale devices , Metals , Bearings , Cables , Catheters , Chain , Design
A Room Temperature Hydrogen Sensor With High Sensitivity and Selectivity Using Nanocrystalline Semiconductor Particles
Peng Zhang, Satyajit Shukla, Larry Ludwig, Hyoung J. Cho, Sudipta Seal
IMECE 2005; 579-582https://doi.org/10.1115/IMECE2005-82357
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Topics: Hydrogen , Particulate matter , Semiconductors (Materials) , Sensors , Temperature
A Multi-Fingered Micromechanism for Coordinated Micro/Nano Manipulation
Sandeep Krishnan, Laxman Saggere
IMECE 2005; 583-591https://doi.org/10.1115/IMECE2005-82633
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Topics: Micromanipulation , Micromechanical devices , Design , Manufacturing , Nanoscale phenomena , Optimization , Silicon-on-insulator , Biological cells , Computer software , Displacement
Design and Fabrication of 2D Phononic Crystals in Surface Acoustic Wave Micro Devices
Kebin Gu, Chien-Liu Chang, Jyh-Cherng Shieh
IMECE 2005; 593-596https://doi.org/10.1115/IMECE2005-82692
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Topics: Design , Manufacturing , Phononic crystals , Surface acoustic waves , Electrodes , Crystals , Micromachining , Silicon , Acoustics , Copper
A New Hierarchical Technique for the Multiscale Modeling of Carbon Nanostructures
Arash Mahdavi, Eric Mockensturm
IMECE 2005; 597-600https://doi.org/10.1115/IMECE2005-82988
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Topics: Carbon , Multiscale modeling , Nanostructures , Finite element analysis , Atoms , Degrees of freedom , Stiffness , Atomic structure , Kinematics , Modeling
Modeling and Experimentation of Viscous Damping for LIGA Structures
Baris Yagci, Tikeswar Naik, Wei-Yang Lu
IMECE 2005; 601-606https://doi.org/10.1115/IMECE2005-83027
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Topics: Damping , Modeling , Energy dissipation , Fluids , Cantilevers , Construction , Dynamics (Mechanics) , Fluid dynamics , Laser Doppler vibrometers , Manufacturing

Microfluidics and Thermal Sciences

A Novel Asymmetric Microfluidic Oscillator
Chiko Chen, Jing-Tang Yang, Chien-Hung Ho
IMECE 2005; 607-610https://doi.org/10.1115/IMECE2005-79269
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Topics: Microfluidics , Design , Feedback , Experimental methods , Flow (Dynamics) , Fluids , Nozzles , Reynolds number
High Performance Microvalve Array
Dong Gun Lee, Daniel D. Shin, Gregory P. Carman
IMECE 2005; 611-615https://doi.org/10.1115/IMECE2005-79294
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Topics: Bonding , Displacement , Failure , Flow (Dynamics) , Fracture toughness , Manufacturing , Micromachining , Resonance , Semiconductor wafers , Silicon-on-insulator
Digitized Heat Transfer for Thermal Management of Compact Microsystems
Kamran Mohseni, Eric Baird, Hongwu Zhao
IMECE 2005; 617-625https://doi.org/10.1115/IMECE2005-79372
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Topics: Heat transfer , Microelectromechanical systems , Thermal management , Drops , Flow (Dynamics) , Fluids , Liquid metals , Alloys , Computer cooling , Computer simulation
A Subgrid Physics Model for Multi-Length Scale Thermal Analysis of MEMS
C. Channy Wong
IMECE 2005; 627-634https://doi.org/10.1115/IMECE2005-79613
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Topics: Microelectromechanical systems , Physics , Thermal analysis , Electromagnetic scattering , Phonons , Radiation scattering , Scattering (Physics) , Anisotropy , Grain boundaries , Grain size
A MEMS Thermal Biosensor for Metabolite Measurements
Li Wang, Qiao Lin
IMECE 2005; 635-639https://doi.org/10.1115/IMECE2005-79614
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Topics: Biosensors , Microelectromechanical systems
Non-Equilibrium Molecular Dynamics Approach for Nano-Electro-Mechanical Systems: Nano-Fluidics and Its Applications
Changsung Sean Kim
IMECE 2005; 641-646https://doi.org/10.1115/IMECE2005-79628
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Topics: Equilibrium (Physics) , Molecular dynamics , Nanoelectromechanical systems , Nanofluidics , Fluids , Particulate matter , Drops , Boundary-value problems , Drying , Flow (Dynamics)
Prediction of Laminar Flow in a Microchannel With Transverse Ultrahydrophobic Ribs
J. Davies, B. Woolford, D. Maynes, B. W. Webb
IMECE 2005; 647-653https://doi.org/10.1115/IMECE2005-80039
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Topics: Laminar flow , Microchannels , Cavities , Flow (Dynamics) , Vapors , Friction , Shear (Mechanics) , Coating processes , Coatings , Creeping flow
Experimental Study of Entrance Effects on Laminar Gas Flow Through Silicon Orifices
Aaron J. Knobloch, Joell R. Hibshman, George Wu, Rich Saia
IMECE 2005; 655-660https://doi.org/10.1115/IMECE2005-80230
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Topics: Gas flow , Orifices , Silicon , Flow (Dynamics) , Pressure , Semiconductor wafers , Bonding , Micromachining , Reynolds number , Transfer functions
Single-Phase Heat Transfer in Mems-Based Pin Fin Heat Sink
Ali Kosar, Yoav Peles
IMECE 2005; 661-668https://doi.org/10.1115/IMECE2005-80412
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Topics: Heat sinks , Heat transfer , Microelectromechanical systems , Reynolds number , Fins , Flux (Metallurgy) , Heat , Heat transfer coefficients , Water
Droplet Breakup in Shear and Elongation Dominated Flows in Microfluidic Devices
Shelley L. Anna, Gordon F. Christopher, Nadia Noharuddin
IMECE 2005; 669-671https://doi.org/10.1115/IMECE2005-80625
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Topics: Drops , Elongation , Flow (Dynamics) , Microfluidics , Shear (Mechanics) , Bubbles , Drug delivery systems , Shear flow , Stress , Viscosity
Adaptive Hot-Spot Cooling of Integrated Circuits Using Digital Microfluidics
Phil Paik, Vamsee K. Pamula, Krishnendu Chakrabarty
IMECE 2005; 673-678https://doi.org/10.1115/IMECE2005-81081
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Topics: Cooling , Drops , Integrated circuits , Microfluidics
Numerical Modeling of an Ion-Drag Micropump Performance
Vytenis Benetis, Amir Shooshtari, Michael Ohadi
IMECE 2005; 679-687https://doi.org/10.1115/IMECE2005-81357
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Topics: Computer simulation , Drag (Fluid dynamics) , Micropumps
Characterization and Modeling of Thermal Buckling in Eccentrically Loaded Microfabricated Nickel Beams for Adaptive Cooling
Matthew McCarthy, Nicholas Tiliakos, Vijay Modi, Luc Freche´tte
IMECE 2005; 689-698https://doi.org/10.1115/IMECE2005-81415
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Topics: Buckling , Cooling , Modeling , Nickel , Manufacturing , Deflection , Design , Temperature , Micromachining , Testing
Demonstration and Characterization of a Multi-Stage Silicon Microturbine
Changgu Lee, Luc G. Fre´chette
IMECE 2005; 699-705https://doi.org/10.1115/IMECE2005-81435
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Topics: Microturbines , Silicon , Turbines , Pressure , Rotors , Semiconductor wafers , Blades , Bonding , Borosilicate glasses , Computational fluid dynamics
Evaporative Heat Transfer From Ten-Micron Micro-Channels
T. A. Quy, D. A. Carpenter, C. D. Richards, D. F. Bahr, R. F. Richards
IMECE 2005; 707-710https://doi.org/10.1115/IMECE2005-81460
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Topics: Heat transfer , Microchannels , Membranes , Fluids , Silicon , Electricity (Physics) , Energy budget (Physics) , Evaporation , Heat , Microscopes
Theoretical and Experimental Performance of a High Frequency Micropump
Aaron Astle, Luis P. Bernal, Hanseup Kim, Khalil Najafi, Peter D. Washabaugh
IMECE 2005; 711-720https://doi.org/10.1115/IMECE2005-81626
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Topics: Micropumps , Pumps , Theoretical analysis , Microelectromechanical systems , Flow (Dynamics) , Pressure , Design , Experimental characterization , Monitoring systems
Noncontinuum Gas-Phase Heat Transfer From a Heated Microbeam to the Adjacent Substrate
M. A. Gallis, J. R. Torczynski, D. J. Rader, B. L. Bainbridge
IMECE 2005; 721-730https://doi.org/10.1115/IMECE2005-81683
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Topics: Heat transfer , Microbeams , Computational methods , Geometry , Microscale devices , Heat flux , Heating , Simulation , Slabs , Temperature
Fabrication and Characterization of Liquid and Gaseous Micro- and Nanojets
Nisarga Naik, Christophe Courcimault, Hanif Hunter, John Berg, Jungchul Lee, Kianoush Naeli, Tanya Wright, Mark Allen, Oliver Brand, Ari Glezer, William King
IMECE 2005; 731-736https://doi.org/10.1115/IMECE2005-81698
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Topics: Cantilevers , Lasers , Manufacturing , Nanonozzles , Flow (Dynamics) , Dimensions , Jets , Nozzles , Chemical etching , Design
Planar Microfabricated Check Valves Utilizing Large Compliance of PDMS
Bozhi Yang, Qiao Lin
IMECE 2005; 737-740https://doi.org/10.1115/IMECE2005-81958
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Topics: Plasma desorption mass spectrometry , Valves , Design , Flow (Dynamics) , Fluids , Microchannels , Microfluidics , Molding , Testing
Latchable Phase-Change Actuators for Micro Flow Control Applications
Bozhi Yang, Qiao Lin
IMECE 2005; 741-744https://doi.org/10.1115/IMECE2005-81964
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Topics: Actuators , Flow control , Flow (Dynamics) , Paraffin wax , Energy consumption , Fluid dynamics , Lithography , Melting , Melting point , Microchannels
Flow and Species Transport Control in Grooved Micro-Channels
Jungyoon Hahm, Ali Beskok
IMECE 2005; 745-750https://doi.org/10.1115/IMECE2005-82111
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Topics: Flow (Dynamics) , Microchannels , Electric fields , Chemistry , Diffusion (Physics) , Flow control , Microfluidics
Characterization of a Liquid-Vapor Phase-Change Actuator
S. A. Whalen, D. F. Bahr, C. D. Richards, R. F. Richards
IMECE 2005; 751-761https://doi.org/10.1115/IMECE2005-82564
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Topics: Actuators , Vapors , Membranes , Computer simulation , Deflection , Energy budget (Physics) , Evaporation , Geometry , Heating , Materials properties
Design and Fabrication of a Magnetocaloric Microcooler
Sangchae Kim, Bharath Bethala, Simone Ghirlanda, Senthil N. Sambandam, Shekhar Bhansali
IMECE 2005; 763-767https://doi.org/10.1115/IMECE2005-82720
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Topics: Design , Manufacturing , Microcoolers , Entropy , Refrigeration , Temperature , Cooling , Electromagnets , Magnetic fields , Microchannels
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