Proceedings Papers

Topics: Failure , Microelectromechanical systems , Polysilicon , Stress , Young's modulus , Actuators , Elastic moduli , Electric potential , Micromachining , Micromotors

Crystallization of Sputtered NiTi Films

Michael J. Vestel, David S. Grummon, Albert P. Pisano

IMECE 2003; 7-13doi:https://doi.org/10.1115/IMECE2003-41216

Abstract

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Topics: Crystallization , Nickel titanium alloys , Delamination , Nucleation (Physics) , Temperature , Actuators , Differential scanning calorimetry , Low temperature , Microelectromechanical systems , Nickel

Computer-Aided Synthesis of Microscale Electrophoretic Separation Systems in Confined Areas

Anton J. Pfeiffer, Tamal Mukherjee, Steinar Hauan

IMECE 2003; 15-24doi:https://doi.org/10.1115/IMECE2003-41289

Abstract

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Topics: Computer-aided engineering , Microscale devices , Separation (Technology) , Design , Manufacturing , Optimization , Resolution (Optics) , Sensors , Simulation

Dynamic Modeling of a Thermally-Driven Micro Diffuser Pump

Chen-li Sun, Albert P. Pisano

IMECE 2003; 25-31doi:https://doi.org/10.1115/IMECE2003-41313

Abstract

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Topics: Diffusers , Dynamic modeling , Evaporation , Modeling , Pumps

On the Entropic Heating of Microfluidics for PCR Applications

E. J. Walsh, P. A. Walsh, R. Grimes, M. R. D. Davies

IMECE 2003; 33-36doi:https://doi.org/10.1115/IMECE2003-41423

Abstract

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Topics: Heating , Microfluidics , Fluids , Chain , Cycles , Entropy , Flow (Dynamics) , Fluid dynamics , Heat , Microelectromechanical systems

Design and Microfabrication of Terahertz Magnetic Metamaterials

Ta-Jen Yen, Nicholas Fang, Xiang Zhang

IMECE 2003; 37-40doi:https://doi.org/10.1115/IMECE2003-41475

Abstract

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Topics: Design , Metamaterials , Microfabrication , Dimensions , Infrared spectroscopy , Resonance , Simulation

Dynamic Modeling and Design of a High Frequency Micro Vacuum Pump

Aaron Astle, Luis P. Bernal, Peter Washabaugh, Hanseup Kim, Khalil Najafi

IMECE 2003; 41-50doi:https://doi.org/10.1115/IMECE2003-41493

Abstract

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Topics: Design , Dynamic modeling , Vacuum pumps , Pumps , Valves , Cavities , Dynamic models , Flow (Dynamics) , Micropumps , Resonance

Fabrication of Piezoelectric Al_0.3Ga_0.7As Heterostructures

Parshant Kumar, Lihua Li, L. C. Calhoun, P. Boudreaux, Don L. DeVoe

IMECE 2003; 51-56doi:https://doi.org/10.1115/IMECE2003-41601

Abstract

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Topics: Manufacturing , Crystals , Reactive-ion etching , Cantilevers , Chemical etching , Gallium arsenide , Microelectromechanical systems , Molecular beams , Plasmas (Ionized gases)

An Empirical Formula for the Estimation of the Residual Stress in Boron-Doped Silicon Films

Ok Chan Jeong, Sang Sik Yang

IMECE 2003; 57-62doi:https://doi.org/10.1115/IMECE2003-42998

Abstract

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Topics: Boron , Silicon , Stress , Compressive stress , Diffusion (Physics) , Oxidation , Secondary ion mass spectrometry , Temperature

Fabrication and Manufacturing of Microelectromechanical Systems

Integrating SOI and Poly-Si Surface Structures Using a Monolithic Process

Mingching Wu, Shiunafang Shy, Weileun Fang

IMECE 2003; 63-68doi:https://doi.org/10.1115/IMECE2003-41182

Abstract

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Topics: Crystals , Self-assembly , Silicon-on-insulator , Semiconductor wafers , Thin films , Accelerated life testing , Microactuators , Microelectromechanical systems , Mirrors , Optical instruments

Microfabrication and Laser Diagnosis of Pressure-Swirl Atomizers

Ker-Jer Huang, Alex C. Chen, Jing-Tang Yang

IMECE 2003; 69-75doi:https://doi.org/10.1115/IMECE2003-41361

Abstract

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Topics: Lasers , Microfabrication , Pressure , Flow (Dynamics) , Injection molding , Molding , Sprays , Design , Dimensions , Electroplating

Design and Fabrication of a High Frequency Thin Film Resonator Using Low Acoustic Impedance Reflective Layer

Chung-Hsien Lin, Hong-Ren Chen, Chen-Hsun Du, Weileun Fang

IMECE 2003; 77-82doi:https://doi.org/10.1115/IMECE2003-41416

Abstract

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Topics: Acoustics , Design , Manufacturing , Thin films , Etching , Waves

High Precision Femtosecond Laser Micromachining for Rapid Manufacture of MEMS Devices

A. Bulusu, S. P. Joshi, P. S. Shiakolas

IMECE 2003; 83-87doi:https://doi.org/10.1115/IMECE2003-41557

Abstract

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Topics: Lasers , Microelectromechanical systems , Micromachining , Damage , Ablation (Vaporization technology) , Chemical vapor deposition , Databases , Design , Electrical discharge machining , Embossing

Artificial Plasmonic Metamaterial Fabricated by Micro-Stereolithography

Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang, Willie J. Padilla, Dimitri N. Basov, David R. Smith, Sheldon Schultz

IMECE 2003; 89-91doi:https://doi.org/10.1115/IMECE2003-41569

Abstract

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Topics: Metamaterials , Stereolithography , Filters , Wire , Metals , Plasmas (Ionized gases) , Cylinders , Fourier transform infrared spectroscopy , Fourier transforms , Imaging

Micro Ultrasonic Machining of Ceramic MEMS With Micro Metallic Dies

Yong Yang, Xiaochun Li

IMECE 2003; 93-95doi:https://doi.org/10.1115/IMECE2003-41635

Abstract

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Topics: Ceramics , Microelectromechanical systems , Ultrasonic machining , Electrical discharge machining , Brittleness , Industrial ceramics , Manufacturing , Nickel , Tungsten

A Novel Maskless Post-CMOS Bulk Micromachining Process

Jing-Hung Chiou, Ching-Liang Dai, Jen-Yi Chen, Michael S.-C. Lu

IMECE 2003; 97-100doi:https://doi.org/10.1115/IMECE2003-41721

Abstract

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Topics: Complementary metal oxide semiconductors , Micromachining

Theoretical Analysis of Focusing and Intensity Mechanisms for a Spot Bonding Process Using Femtosecond Laser

M. Sarkar, S. P. Joshi, P. S. Shiakolas, A. Bulusu

IMECE 2003; 101-105doi:https://doi.org/10.1115/IMECE2003-41906

Abstract

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Topics: Bonding , Lasers , Theoretical analysis , Damage , Energy dissipation , Heat , Laser beams , Lenses (Optics) , Numerical analysis , Reflection

Fabrication and Testing of a Novel Microelectromechnical Device for the Study of Boiling Bubble Dynamics

Saeed Moghaddam, Kenneth T. Kiger, Jean-Marc Henriette, Michael Ohadi

IMECE 2003; 107-114doi:https://doi.org/10.1115/IMECE2003-42303

Abstract

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Topics: Boiling , Bubbles , Dynamics (Mechanics) , Manufacturing , Testing , Temperature , Cavities , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Sensors

Micro, Internal-Combustion Engine Fabrication With 900 µm Deep Features Via DRIE

Aaron J. Knobloch, Matt Wasilik, Carlos Fernandez-Pello, Albert P. Pisano

IMECE 2003; 115-123doi:https://doi.org/10.1115/IMECE2003-42558

Abstract

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Topics: Combustion , Engines , Manufacturing , Etching , Rotors , Microelectromechanical systems , Generators , Semiconductor wafers , Spur gears , Surface roughness

Construction of a 3D MEMS Microcoil Using Sequential Robotic Microassembly Operations

Nikolai Dechev, William L. Cleghorn, James K. Mills

IMECE 2003; 125-131doi:https://doi.org/10.1115/IMECE2003-42798

Abstract

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Topics: Construction , Microassembling , Microelectromechanical systems , Robotics , End effectors , Micromachining

Metallic Microactuators Based on Sacrificial Layer SU8 Release

Eniko T. Enikov, Kalin V. Lazarov

IMECE 2003; 133-139doi:https://doi.org/10.1115/IMECE2003-43200

Abstract

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Topics: Microactuators , Actuators , Microelectromechanical systems , Cooling , Displacement , Energy consumption , Etching , Excitation , Medical instrumentation , Nickel

Laser Repair Process Yields for MEMS Devices Adhered During Release or Operation

Sai B. Koppaka, Leslie M. Phinney

IMECE 2003; 141-147doi:https://doi.org/10.1115/IMECE2003-43363

Abstract

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Topics: Lasers , Maintenance , Microelectromechanical systems , Stiction , Failure , Adhesives , Cantilevers , Drying , Failure mechanisms , Adhesion

Fabrication and Testing of MEMS Packaging

A High-Density Flexible Connector Array for Multi-Substrate Packages

Asli B. Ucok, Joseph M. Giachino, Khalil Najafi

IMECE 2003; 149-155doi:https://doi.org/10.1115/IMECE2003-41562

Abstract

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Topics: Cables , Density , Manufacturing , Actuators , Circuits , Design , Metals , Microelectromechanical systems , Packaging , Polymers

Apex Seal Design for the MEMS Rotary Engine Power System

Fabian C. Martinez, Aaron J. Knobloch, Albert P. Pisano

IMECE 2003; 157-162doi:https://doi.org/10.1115/IMECE2003-42071

Abstract

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Topics: Design , Engines , Microelectromechanical systems , Power systems (Machinery) , Cantilevers , Compression , Manufacturing , Pressure , Combustion , Internal combustion engines

Mechanics of Direct Wafer Bonding

K. T. Turner, S. M. Spearing

IMECE 2003; 163-168doi:https://doi.org/10.1115/IMECE2003-42106

Abstract

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Topics: Bonding , Semiconductor wafers , Modeling , Etching , Microelectromechanical systems , Design , Failure , Geometry , Energy budget (Physics) , Manufacturing

Wafer-Level MEMS Package by Gold-Tin Bonding Method

Sihai Chen, Sheng Liu, Mingxiang Chen, Tao Xiong, Daming Zhang, Honghai Zhang, Xinjian Yi

IMECE 2003; 169-172doi:https://doi.org/10.1115/IMECE2003-43467

Abstract

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Topics: Bonding , MEMS packages , Semiconductor wafers , Heating , Tin , Metals , Microelectromechanical systems , Annealing , Ovens , Reliability

Failure Analysis and Reliability Aspects of MEMS

Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines

M. B. J. Wijesundara, D. C. Walther, C. R. Stoldt, K. Fu, D. Gao, C. Carraro, A. P. Pisano, R. Maboudian

IMECE 2003; 173-180doi:https://doi.org/10.1115/IMECE2003-41696

Abstract

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Topics: Chemical vapor deposition , Engines , Low temperature , Oxidation , Chemical etching , Chemically reactive flow , Coatings , Flames , Flow (Dynamics) , Friction

The Effects of Grain-Refinement and Heat Treatment on the Properties of Ni-Alloys for LIGA Microsystems

Steve Goods, Samuel Graham, James Kelly

IMECE 2003; 181-186doi:https://doi.org/10.1115/IMECE2003-42090

Abstract

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Topics: Heat treating (Metalworking) , Microelectromechanical systems , Nickel alloys , Grain size , Materials properties , Electrical conductivity , Materials processing , Materials research , Nanomaterials , Plating

Microstructure and Reliability of Surface Micromachined Polysilicon Used for MEMS

Thomas E. Buchheit, Corbett C. Bataille, Joseph R. Michael, Brad L. Boyce

IMECE 2003; 187-190doi:https://doi.org/10.1115/IMECE2003-43796

Abstract

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Topics: Microelectromechanical systems , Micromachining , Polysilicon , Reliability , Failure , Engineering simulation , Simulation , Brittleness , Ceramics , Deformation

General

A Planar Fabricated 1-3 Composite Ultrasonic Transducer to Determine the Dynamic Response of Microstructures

Wen Pin Lai, Weileun Fang

IMECE 2003; 191-195doi:https://doi.org/10.1115/IMECE2003-41147

Abstract

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Topics: Composite materials , Dynamic response , Hammers , Ultrasonic transducers

Design Optimization of a Novel, Large-Displacement, Multi-Axis, Silicon/Polymer Hybrid Actuator for Micro Optics

Yi-Chung Tung, Jeong-Gil Kim, Katsuo Kurabayashi

IMECE 2003; 197-204doi:https://doi.org/10.1115/IMECE2003-41174

Abstract

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Topics: Actuators , Design , Displacement , Optics , Optimization , Silicon polymers , Finite element analysis , Plasma desorption mass spectrometry , Diffraction gratings , Genetic algorithms

Analysis of Flexible Joints for Micromachined Devices

Robert W. Johnstone, Ash Parameswaran

IMECE 2003; 205-209doi:https://doi.org/10.1115/IMECE2003-41304

Abstract

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Topics: Micromachining , Stiffness

Analysis and Design of Thermoelectric Infrared Microsensor

Ke-Min Liao, Rongshun Chen, Bruce C. S. Chou

IMECE 2003; 211-216doi:https://doi.org/10.1115/IMECE2003-41348

Abstract

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Topics: Design , Microsensors , Manufacturing , Sensors , Thermocouples , Cantilever beams , Complementary metal oxide semiconductors , Finite element analysis , Membranes , Micromachining

Static Analysis of Thin Film Piezoelectric Micro-Accelerometer Using Analytical and Finite Element Modeling

Zhaochun Yang, Qing-Ming Wang, Patrick Smolinski, Hongbo Yang

IMECE 2003; 217-224doi:https://doi.org/10.1115/IMECE2003-41387

Abstract

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Topics: Accelerometers , Finite element analysis , Modeling , Thin films , Design , Elastic moduli , Elasticity , Geometry , Silicon , Structural optimization

Simultaneous Electrical and Thermal Modeling of a Contact-Type RF MEMS Switch

Brian Jensen, Zhongde Wang, Kazuhiro Saitou, John L. Volakis, Katsuo Kurabayashi

IMECE 2003; 225-228doi:https://doi.org/10.1115/IMECE2003-41422

Abstract

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Topics: Microelectromechanical systems , Modeling , Switches , Temperature , Contact resistance , Energy dissipation , Bulk solids , Currents , Metals

CNT Extracted Lithography

Jaehyun Chung, Kyong-Hoon Lee, Junghoon Lee

IMECE 2003; 229-232doi:https://doi.org/10.1115/IMECE2003-41549

Abstract

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Topics: Carbon nanotubes , Lithography , Multi-walled carbon nanotubes , Manufacturing , Metals , Nanoscale phenomena , Cathode ray oscilloscopes , Electric fields , Electrodes , Electron beams

Modeling and Analysis of RF MEMS Filters

Mehrnaz Motiee, Amir Khajepour, Raafat R. Mansour

IMECE 2003; 233-239doi:https://doi.org/10.1115/IMECE2003-41568

Abstract

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Topics: Filters , Microelectromechanical systems , Modeling , Cantilever beams , Cantilevers , Computer software , Finite element analysis , Flow charts , Micromechanical resonators , Physics

The Mechanical Behavior of a Micromachined PZT Membrane

I. Demir, R. F. Richards, D. F. Bahr, C. D. Richards

IMECE 2003; 241-245doi:https://doi.org/10.1115/IMECE2003-41570

Abstract

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Topics: Mechanical behavior , Membranes , Micromachining , Deflection , Electricity (Physics) , Electrodes , Energy conservation , Heat engines , Materials properties , Piezoelectric ceramics

Design and Fabrication of Microtacks for Retinal Implant Applications

Scott Cambron, Robert Keynton, Jose Franco, Mark Crain, Doug Shire, Kevin Walsh, John Naber, Henry Kaplan, Joseph Rizzo

IMECE 2003; 247-249doi:https://doi.org/10.1115/IMECE2003-41572

Abstract

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Topics: Design , Manufacturing , Micromilling , Semiconductor wafers , Chisels , Control equipment , Machinery , Machining , Micromachining , Polishing

Design, Fabrication and Thermal Characterization of a MEMS Device for Control of Nerve Cell Growth

Ankur Jain, Kevin Ness, Angie McConnell, Linan Jiang, Kenneth Goodson

IMECE 2003; 251-257doi:https://doi.org/10.1115/IMECE2003-41590

Abstract

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Topics: Design , Manufacturing , Microelectromechanical systems , Thermal characterization , Membranes , Temperature , Biomedicine , Finite element analysis , Heating , Modeling

Why Is (111) Silicon a Better Mechanical Material for MEMS: Torsion Case

Donghun Kwak, Jongpal Kim, Sangjun Park, Hyoungho Ko, Dong-Il Cho

IMECE 2003; 259-264doi:https://doi.org/10.1115/IMECE2003-41869

Abstract

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Topics: Finite element methods , Microelectromechanical systems , Semiconductor wafers , Silicon , Stiffness , Torsion

Design of Radio Frequency (RF) MEMS Switches: Modeling

Yong Zhu, Horacio D. Espinosa

IMECE 2003; 265-270doi:https://doi.org/10.1115/IMECE2003-41945

Abstract

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Topics: Design , Microelectromechanical systems , Modeling , Switches , Deflection , Finite element model , Electrostatic actuators , Geometry , Optimization , Reliability

Geometric Error Assessment of a Nanomechanical Drill

Nikhil Joshi, Ajay P. Malshe, April Bryan, Jaime A. Camelio, S. Jack Hu

IMECE 2003; 271-276doi:https://doi.org/10.1115/IMECE2003-42116

Abstract

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Topics: Drills (Tools) , Errors , Microelectromechanical systems , Kinematics , Computer-aided engineering , Manufacturing , Dimensions , Drilling

Adaptive Control of a Simulated MEMS Gyroscope

Qais A. Khasawneh, C. Batur

IMECE 2003; 277-282doi:https://doi.org/10.1115/IMECE2003-42140

Abstract

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Topics: Adaptive control , Microelectromechanical systems , Stability , Automobiles , Design , Energy consumption , Feedback , Finite element analysis , Weight (Mass)

Micro Four-Point Probe With Metal Tip

Heungjoo Shin, Peter J. Hesketh

IMECE 2003; 283-287doi:https://doi.org/10.1115/IMECE2003-42443

Abstract

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Topics: Metals , Probes , Atomic force microscopy , Cantilevers , Coating processes , Coatings , Electrodes , Resolution (Optics) , Wear , Electrical conductivity

Metrology and Analytical Techniques for MEMS/Nanotechnology

Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance

Jon R. Pratt, David B. Newell, John A. Kramar, Eric Whitenton

IMECE 2003; 289-292doi:https://doi.org/10.1115/IMECE2003-41164

Abstract

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Topics: Calibration , Cantilevers , Force sensors , National Institute of Standards and Technology , Chain , Engineering standards , Equipment performance , Hinges , Instrumentation , Levers

Using White Light Interferometry for Mesoscale Part Inspection

K. Meghan Shilling, Thomas R. Kurfess

IMECE 2003; 293-298doi:https://doi.org/10.1115/IMECE2003-42328

Abstract

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Topics: Inspection , Metrology , White light interferometry

Micro-Sensors and Micro-Actuators

Principle and Experimental Study of a MEMS Explosive Particle Detector

Yan Zhang, Tao Mei, Deyi Kong, Chengmei Zhang, Yongchun Tao, Shengjun Hu

IMECE 2003; 299-305doi:https://doi.org/10.1115/IMECE2003-41236

Abstract

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Topics: Explosives , Microelectromechanical systems , Particulate matter , Sensors

Piezoelectric Microbeam Resonators Based on Epitaxial Al_xGa_1−xAs Films

Lihua Li, Parshant Kumar, Don L. DeVoe

IMECE 2003; 307-310doi:https://doi.org/10.1115/IMECE2003-41307

Abstract

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Topics: Cantilevers , Chemical etching , Crystals , Electrodes , Frequency response , Gallium arsenide , Lasers , Manufacturing , Microbeams , Plasmas (Ionized gases)

Characterization of Balloon-Jointed Micro-Fingers

Yenwen Lu, Chang-Jin Kim

IMECE 2003; 311-316doi:https://doi.org/10.1115/IMECE2003-41326

Abstract

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Topics: Grasping , Manganese (Metal) , Pressure , Robotics , Robots , Silicon , Stiffness , Thin films

Mechanically Driven Microtweezers

Yoonsu Choi, James Ross, Steve DeWeerth, Mark G. Allen

IMECE 2003; 317-320doi:https://doi.org/10.1115/IMECE2003-41705

Abstract

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Topics: Design , Electrophysiology , Microassembling , Microelectromechanical systems

Micro-Systems Including Micro-Robotics, Total Analytical Systems, and MEMS Based Power Sources

A Novel 3-DOF Micromanipulator

Heng-Chung Chang, Julius Ming-Lin Tsai, Hsin-Chang Tsai, Weileun Fang

IMECE 2003; 321-326doi:https://doi.org/10.1115/IMECE2003-41344

Abstract

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Topics: Actuators , Crystals , Degrees of freedom , Grippers , Manipulators , Manufacturing , Mechanical properties , Micromachining , Robots , Silicon

Leakage Flow Analysis for a MEMS Rotary Engine

Joshua D. Heppner, David C. Walther, Albert P. Pisano

IMECE 2003; 327-334doi:https://doi.org/10.1115/IMECE2003-41868

Abstract

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Topics: Engines , Leakage flows , Microelectromechanical systems , Leakage , Rotors , Flow (Dynamics) , Sealing (Process) , Compression , Design , Rotation

Design of a Microfabricated Rankine Cycle Steam Turbine for Power Generation

Luc G. Fre´chette, Changgu Lee, Selin Arslan, Yuan-Chun Liu

IMECE 2003; 335-344doi:https://doi.org/10.1115/IMECE2003-42082

Abstract

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Topics: Design , Energy generation , Microelectromechanical systems , Micropumps , Microturbines , Rankine cycle , Steam turbines

Design, Optimization, and Experiments of Compliant Microgripper

Young Seok Oh, Woo Ho Lee, Harry E. Stephanou, George D. Skidmore

IMECE 2003; 345-350doi:https://doi.org/10.1115/IMECE2003-55013

Abstract

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Topics: Design , Optimization , Finite element analysis , Grippers , Manufacturing , Microassembling , Silicon-on-insulator , Snap fitting , Actuators , Mass production

Microflow Studies, Measurement Techniques, Flow Visualization, Sensing of Flow Properties, Transport of Complex Fluids, Biological Materials, or Flows Containing Particulates

Development of an Electrohydrodynamic Injection Micropump for Cryogenic Cooling

J. Darabi, H. Wang

IMECE 2003; 351-357doi:https://doi.org/10.1115/IMECE2003-55247

Abstract

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Topics: Cooling , Electrohydrodynamics , Micropumps , Electrodes , Nitrogen , Cooling systems , Design , Dimensions , Electric fields , Electronics

Microfluidic Devices and Systems

Analysis and Verifications for Meso-Scale Heat Exchanger With Magneto-Hydrodynamic (MHD) Pumps

Pei-Jen Wang, Chia-Yuan Chang

IMECE 2003; 359-367doi:https://doi.org/10.1115/IMECE2003-41068

Abstract

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Topics: Heat exchangers , Magnetohydrodynamics , Pumps , Coolants , Cooling , Flow (Dynamics) , Heat , Amperes , Computer simulation , Cooling systems

Microfabricated PDMS Check Valves

Bozhi Yang, George C. Lopez, Qiao Lin, Alan J. Rosenbloom

IMECE 2003; 369-372doi:https://doi.org/10.1115/IMECE2003-41213

Abstract

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Topics: Microfluidics , Molding , Plasma desorption mass spectrometry , Valves

High-Accuracy Microflow Controllers Using Fluidic Digital-to-Analog Converters

Sang-Hee Yoon, Young-Ho Cho

IMECE 2003; 373-377doi:https://doi.org/10.1115/IMECE2003-41233

Abstract

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Topics: Control equipment , Flow (Dynamics) , Engineering prototypes , Resistors , Errors , Micromachining , Microchannels , Pressure , Valves

Sequential Electrolytic Bubble-Based Micro-Pump Dosing System

Melanie Lewandowski, Daniel A. Ateya, Ashish A. Shah, Susan Z. Hua

IMECE 2003; 379-383doi:https://doi.org/10.1115/IMECE2003-41314

Abstract

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Topics: Bubbles , Microfluidics , Micropumps

Fabrication and Preliminary Testing of a Novel Piezoelectrically Actuated Microvalve

Fatih Ayhan, Jeffrey S. Vipperman, William Clark, Jimmy Thornton, Randall Gemmen

IMECE 2003; 385-391doi:https://doi.org/10.1115/IMECE2003-41482

Abstract

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Topics: Manufacturing , Testing , Actuators , Flow (Dynamics) , Temperature , Valves , Brass (Metal) , Crystals , Cutting , Deflection

Characterization of a Radiantly Driven Multistage Knudsen Compressor

M. Young, Y. L. Han, E. P. Muntz, G. Shiflett

IMECE 2003; 393-400doi:https://doi.org/10.1115/IMECE2003-41486

Abstract

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Topics: Compressors , Transpiration , Membranes , Pumps , Atmospheric pressure , Creep , Design , Flow (Dynamics) , Gas compressors , Nitrogen

The Design and Analysis of Piezoelectrically Actuated Microfluidic Systems

Paul Chiarot, Pierre Sullivan, Ridha Ben Mrad

IMECE 2003; 401-409doi:https://doi.org/10.1115/IMECE2003-41760

Abstract

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Topics: Design , Microfluidics , Flow (Dynamics) , Finite element analysis , Microscale devices , Reliability , Valves

A Structure of Bistable Electromagnetic Actuated Microvalve Fabricated on a Single Wafer, Implementing the SLA and PDMS Technique

Jemmy Sutanto Bintoro, Rajesh Luharuka, Edward W. Wong, Peter J. Hesketh

IMECE 2003; 411-417doi:https://doi.org/10.1115/IMECE2003-43857

Abstract

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Topics: Plasma desorption mass spectrometry , Semiconductor wafers , Valves , Leakage , Manufacturing , Complementary metal oxide semiconductors , Energy generation , Fuel cells , Fuel delivery systems , Gaskets

Microfluidics 2003: Applications of Fluid Mechanics to Microsystems Technology

Slip Flow Analyses of a Capacitive Pressure-Based Micro Flow Sensor

Jaesung Jang, Steven T. Wereley

IMECE 2003; 421-427doi:https://doi.org/10.1115/IMECE2003-41142

Abstract

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Topics: Capacitance , Flow sensors , Microchannels , Pressure , Slip flow

High Resolution Separation of Proteins in a Polymeric Micro-Fluidic Chip

Keisuke Horiuchi, Prashanta Dutta, Huanchun Cui, Cornelius F. Ivory

IMECE 2003; 429-433doi:https://doi.org/10.1115/IMECE2003-41206

Abstract

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Topics: Microfluidics , Proteins , Resolution (Optics) , Separation (Technology) , Plasma desorption mass spectrometry , Biocompatibility , Lithography , Manufacturing , Mass production , Rapid prototyping

Shear Superposition Micromixer: 3-D Analysis

Fre´de´ric Bottausci, Caroline Cardonne, Sophie Loire, Igor Mezi, Carl Meinhart

IMECE 2003; 435-444doi:https://doi.org/10.1115/IMECE2003-41212

Abstract

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Topics: Flow (Dynamics) , Flow visualization , Lamination , Optimization , Shear (Mechanics)

Static Chaos Microfluid Mixers Using Microblock-Induced Alternating Whirl and Microchannel-Induced Lamination

Sunghwan Chang, Young-Ho Cho

IMECE 2003; 445-449doi:https://doi.org/10.1115/IMECE2003-41230

Abstract

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Topics: Chaos , Lamination , Microchannels , Whirls , Flow (Dynamics) , Design , Geometry , Plasma desorption mass spectrometry , Pressure drop , Visualization

Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror

Zhiliang Wan, Alan Feinerman, Gary Friedman, Hongjun Zeng

IMECE 2003; 451-455doi:https://doi.org/10.1115/IMECE2003-41288

Abstract

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Topics: Engineering prototypes , Pistons

Study on Air Damping Force Exerted on an Oscillating Micro Cantilever

Seiji Aoyagi, Yoshimasa Matsumoto, Yutaka Kasuda, Yasuhiko Arai, Masaharu Takano

IMECE 2003; 457-464doi:https://doi.org/10.1115/IMECE2003-41315

Abstract

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Topics: Damping , Finite element methods , Finite element model , Flow (Dynamics) , Microcantilevers , Viscous flow

Investigation of the Flow Mal-Distribution in Microchannels

Jyh-Tong Teng, Jiann-Cherng Chu, Min-Sheng Liu, Chi-Chuan Wang, Ralph Greif

IMECE 2003; 465-469doi:https://doi.org/10.1115/IMECE2003-41323

Abstract

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Topics: Flow (Dynamics) , Microchannels , Manifolds , Reynolds number , Shapes , Water

Formation of Hexagonal Monolayers by Flow of Bead Suspensions Into Flat Microchambers

Markus Grumann, Patric Schippers, Michael Dobmeier, Stefan Ha¨berle, Andreas Geipel, Thilo Brenner, Roland Zengerle, Jens Ducre´e, Claus Kuhn, Michael Fritsche

IMECE 2003; 471-477doi:https://doi.org/10.1115/IMECE2003-41427

Abstract

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Topics: Flow (Dynamics) , Assaying , Computational fluid dynamics , Design , Detergents , Engineering simulation , Microfluidics , Optimization , Packaging density (Electronics) , Pressure

AC Electrokinetics for Microfluidic Immunosensors

M. Sigurdson, C. Meinhart, D. Wang, X. Liu, J. J. Feng, S. Krishnamoorthy, S. Sundaram

IMECE 2003; 479-483doi:https://doi.org/10.1115/IMECE2003-41442

Abstract

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Topics: Electrokinetics , Microfluidics , Sensors , Electrodes , Computer simulation , Diffusion (Physics) , Fluids , Geometry , Microchannel flow , Microchannels

Simulation and Design of E. Coli-Based Rotary Micropump for Use in Microfluidic Systems: Integration of Micro-Nano-Bio

Mohamed G. Al-Fandi, Ajay P. Malshe, Shankar Sundaram, Jerry Jenkins, Steve Tung, Jin-Woo Kim

IMECE 2003; 485-490doi:https://doi.org/10.1115/IMECE2003-41450

Abstract

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Topics: Design , Microfluidics , Micropumps , Simulation , Motors , Computational fluid dynamics , Microchannels , Biological cells , Modeling , Computer software

A Compact, Easily Assembled Micromirror With Liquid Metal Pivot

Hongjun Zeng, Alan Feinerman, Zhiliang Wan

IMECE 2003; 491-494doi:https://doi.org/10.1115/IMECE2003-41528

Abstract

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Topics: Liquid metals

A Cellular Motor Based Micro Pump: Integration of Cellular Motors With Micro Channels

Ryan Pooran, Jin-Woo Kim, Steve Tung, Ajay P. Malshe, Chuen Cheak Lee

IMECE 2003; 495-499doi:https://doi.org/10.1115/IMECE2003-41545

Abstract

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Topics: Microchannels , Microelectromechanical systems , Micropumps , Motors

Enhancement of Heat Transfer in Miniaturized Channels Using Ferrohydrodynamic Convection

Ranjan Ganguly, Swarnendu Sen, Ishwar K. Puri

IMECE 2003; 501-505doi:https://doi.org/10.1115/IMECE2003-41578

Abstract

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Topics: Convection , Heat transfer , Ferrofluids , Magnetic fields , Flow (Dynamics) , Computer cooling , Coolants , Density , Engineering simulation , Fluids

Evaporation of Methanol/Water Mixtures in Microchannels

Brenda E. Haendler, Chen-Li Sun, Kenneth I. Pettigrew, David C. Walther, Albert P. Pisano

IMECE 2003; 507-514doi:https://doi.org/10.1115/IMECE2003-41863

Abstract

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Topics: Evaporation , Methanol , Microchannels , Water , Fluids , Flow (Dynamics) , Arches , Boiling , Bubbles , Microscale devices

Parametric Study of Phase Change Suspension Flow in Microchannels

Y. L. Hao, Y.-X. Tao

IMECE 2003; 515-526doi:https://doi.org/10.1115/IMECE2003-42039

Abstract

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Topics: Flow (Dynamics) , Microchannels , Heat transfer , Heat transfer coefficients , Laminar flow , Melting , Particulate matter , Computational fluid dynamics , Computer simulation , Computers

Molecular Tagging in Microchannels With Microbubble Lensing-Induced Photobleaching (µ-BLIP)

D. Sinton, D. Erickson, D. Li

IMECE 2003; 527-535doi:https://doi.org/10.1115/IMECE2003-42730

Abstract

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Topics: Microchannels , Bubbles , Flow visualization , Computer simulation , Electric fields , Electric potential , Electrokinetics , Flow (Dynamics) , Imaging , Interface phenomena

Heat Transfer and Electrokinetic Flow Analysis in Poly(Dimethylsiloxane) Microfluidic Systems

David Erickson, David Sinton, Vesna Nikolic, Dongqing Li

IMECE 2003; 537-544doi:https://doi.org/10.1115/IMECE2003-42738

Abstract

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Topics: Electrokinetics , Flow (Dynamics) , Heat transfer , Heating , Joules , Microfluidics

A Micro-Flow Cytometer Based on Dielectrophoretic Particle Focusing

Choongho Yu, Li Shi, Jody Vykoukal, Peter R. C. Gascoyne

IMECE 2003; 545-549doi:https://doi.org/10.1115/IMECE2003-42795

Abstract

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Topics: Flow (Dynamics) , Particulate matter , Semiconductor wafers , Blood , Bonding , Design , Electrodes , Etching , Fluorescence , Glass

Effects of Meniscus Motion on Ejection Performance in Thermal Inkjet Print Heads by 3-D Numerical Simulation and 1-D Lumped Modeling

Min Soo Kim, Yong Soo Lee, Suho Shin, You-Seop Lee, Seung Joo Shin, Yong Soo Oh

IMECE 2003; 551-558doi:https://doi.org/10.1115/IMECE2003-43701

Abstract

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Topics: Computer simulation , Modeling

Validation of Analytical Solution for Depth-of-Correlation in Microscopic Particle Image Velocimetry

Christopher J. Bourdon, Michael G. Olsen, Allen D. Gorby

IMECE 2003; 559-570doi:https://doi.org/10.1115/IMECE2003-43788

Abstract

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Topics: Particulate matter , Engineering simulation , Imaging , Particle size , Separation (Technology) , Simulation

Microscale Heat Transfer

The Dynamic Characteristics of MEMS Driven by Laser Beam

Yasuhiko Arai, Shunsuke Yokozeki, Seiji Aoyagi, Atsunobu Mori

IMECE 2003; 571-575doi:https://doi.org/10.1115/IMECE2003-41117

Abstract

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Topics: Laser beams , Microelectromechanical systems , Microcantilevers , Machinery , Frequency response , Mechanical properties , Resonance , Semiconductor lasers , Signals , Vacuum

MEMS-Based Microcalorimeter for Liquid Samples

Haruna Tada, Peter Y. Wong

IMECE 2003; 577-581doi:https://doi.org/10.1115/IMECE2003-41150

Abstract

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Topics: Microelectromechanical systems , Thermometers , Design , Silicon nitride ceramics , Temperature , Biomaterials , Biomedicine , Calorimetry , Computer simulation , Heat

Design, Analysis, and Testing of Electrostatically Actuated Micromembranes

Lucas Yeary, Glenn Cunningham, Nagesh Panduga, Corinne Darvennes, Kevin Walsh, Mark Crain, Robert W. Cohn, Steven A. Harfenist, Jeff Frolik

IMECE 2003; 583-588doi:https://doi.org/10.1115/IMECE2003-41155

Abstract

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Topics: Design , Testing , Membranes , Deflection , Engineering simulation , Simulation , Dimensions , Electrical measurement , Electrodes , Finite element analysis

Optimizing Design of a Force Probe With Six-Degree of Freedom

Shengjun Hu, Tao Mei, Deyi Kong, Yan Zhang, Fei Sun

IMECE 2003; 589-595doi:https://doi.org/10.1115/IMECE2003-41234

Abstract

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Topics: Design , Microelectromechanical systems , Probes , Semiconductor wafers , Electric bridges , Finite element analysis , Force sensors , Microsensors , Piezoresistors , Sensors

Design and Fabrication of a Temperature Sensor Based on Thermopile in CMOS Technology

Ioana Voiculescu, Mona Zaghloul, R. Andrew McGill

IMECE 2003; 597-601doi:https://doi.org/10.1115/IMECE2003-41302

Abstract

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Topics: Complementary metal oxide semiconductors , Design , Manufacturing , Temperature sensors

Time-Dependent Simulations of Sub-Continuum Heat Generation Effects in Electronic Devices Using the Lattice Boltzmann Method

Rodrigo A. Escobar, Sartaj S. Ghai, Cristina H. Amon, Myung S. Jhon

IMECE 2003; 603-612doi:https://doi.org/10.1115/IMECE2003-41522

Abstract

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Topics: Engineering simulation , Heat , Lattice Boltzmann methods , Simulation , Silicon-on-insulator , Temperature , Boundary-value problems , Dimensions , Dynamics (Mechanics) , Electromagnetic scattering

Design, Modeling, and Fabrication of a Micro Corona Motor

Sanghoon Lee, Daejong Kim, Michael D. Bryant, Frederick F. Ling

IMECE 2003; 613-621doi:https://doi.org/10.1115/IMECE2003-41587

Abstract

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Topics: Design , Engines , Manufacturing , Modeling , Motors , Electrodes , Rotors , Stators , Torque , X-ray lithography

An Actuator for Controlling the Area of Dielectric Layer of the Tunable Capacitor by Commercial CMOS Fabrication

Jing-Hung Chiou, Ran-Jin Lin, Ching-Liang Dai, Kai-Hsiang Yen, Yu-Ching Shih, Chen-Kuei Chung

IMECE 2003; 623-627doi:https://doi.org/10.1115/IMECE2003-41717

Abstract

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Topics: Actuators , Capacitors , Complementary metal oxide semiconductors , Manufacturing

Temperature-Dependence of Water Bridge Formation in Atomic Force Microscopy

Brent A. Nelson, Mark A. Poggi, Lawrence A. Bottomley, William P. King

IMECE 2003; 629-636doi:https://doi.org/10.1115/IMECE2003-41762

Abstract

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Topics: Adhesion , Aqueducts , Atomic force microscopy , Nanolithography , Temperature , Temperature effects

Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)

Hong-Seok Noh, Sangkyung Kim, Peter J. Hesketh, Hua Mao, Lid Wong

IMECE 2003; 637-641doi:https://doi.org/10.1115/IMECE2003-42441

Abstract

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Topics: Diaphragms (Mechanical devices) , Diaphragms (Structural) , Fibers , Pressure , Biomedicine , Deflection , Design , Endoscopes , Manufacturing , Pressure transducers

Design and Fabrication of a High Efficiency Piezoelectric Vibration-Induced Micro Power Generator

Gou-Jen Wang, Ying-Hsu Lin, His-Harng Yang, Cheng-Tang Pan

IMECE 2003; 643-650doi:https://doi.org/10.1115/IMECE2003-42682

Abstract

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Topics: Design , Generators , Manufacturing , Vibration , Energy conversion , Capacitors , Finite element analysis , Resonance , Theoretical analysis , Transducers

High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons

Yoonsu Choi, Richard Powers, Varadraj Vernekar, A. Bruno Frazier, Michelle C. LaPlaca, Mark G. Allen

IMECE 2003; 651-654doi:https://doi.org/10.1115/IMECE2003-42794

Abstract

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Topics: Adhesion , Biocompatibility , Epoxy adhesives , Epoxy resins , Manufacturing , Mechanical stability , Micromachining

Thermal Management of a Polyimide V-Groove Leg Actuator for a Walking Micro-Robot

Ritesh A. Khire, Satish G. Kandlikar, Wayne W. Walter, Alan Raisanen, Ferat Sahin

IMECE 2003; 655-662doi:https://doi.org/10.1115/IMECE2003-43722

Abstract

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Topics: Actuators , Robots , Thermal management , Cycles , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Cooling , Design , Geometry , Heat conduction

Comparison of Self-Sensing Techniques for Mercury Vapor Detection Using Piezoelectric Microcantilevers

B. Rogers, C. A. Bauer, J. D. Adams

IMECE 2003; 663-666doi:https://doi.org/10.1115/IMECE2003-55024

Abstract

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Topics: Microcantilevers , Vapors

Nonlinear Dynamics of Micro/Nano Systems

Finite Time Lyapunov Exponent for Micro Chaotic Mixer Design

Xi-Ze Niu, Patrick Tabeling, Yi-Kuen Lee

IMECE 2003; 667-672doi:https://doi.org/10.1115/IMECE2003-41389

Abstract

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Topics: Design , Microchannels , Computational fluid dynamics , Diffusion (Physics) , Engineering simulation , Navier-Stokes equations , Simulation

Bistable Nature of the Hydrophobic Contact Angle on Rough Surfaces

Bo He, Neelesh A. Patankar, Junghoon Lee

IMECE 2003; 673-677doi:https://doi.org/10.1115/IMECE2003-41536

Abstract

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Topics: Surface roughness

DSMC Analysis of Fluid Film Damping in Laterally Oscillating Microstructures

Jae Hyun Park, Ali Beskok

IMECE 2003; 679-686doi:https://doi.org/10.1115/IMECE2003-41610

Abstract

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Topics: Damping , Fluid films , Knudsen flow , Flow (Dynamics) , Dynamic response , Knudsen number , Q-factor

A Port-Controlled Hamiltonian Approach to Control of an Electrostatic MEMS Actuator

D. H. S. Maithripala, Jordan M. Berg, W. P. Dayawansa

IMECE 2003; 687-692doi:https://doi.org/10.1115/IMECE2003-42461

Abstract

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Topics: Actuators , Microelectromechanical systems , Damping , Bifurcation , Closed loop systems , Dynamics (Mechanics) , Electromechanical systems , Energy transformation , Equations of motion , Feedback

Novel Processes and Tools for Unique Micro and Nano Structures

A Batch Fabricated Linear Synchronous Motor

Martin Fo¨hse, Hans-D. Sto¨lting, Jens Edler, Hans H. Gatzen

IMECE 2003; 693-700doi:https://doi.org/10.1115/IMECE2003-41388

Abstract

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Topics: Motors , Actuators , Design , Electromechanical systems , Manufacturing , Microassembling , Microelectromechanical systems , Stators

Characterization of the Thermodynamic Working Cycle in a MEMS-Based Micro Heat Engine

S. A. Whalen, L. W. Weiss, C. D. Richards, D. F. Bahr, R. F. Richards

IMECE 2003; 701-707doi:https://doi.org/10.1115/IMECE2003-41426

Abstract

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Topics: Cycles , Heat engines , Microelectromechanical systems , Engines , Membranes , Pressure , Deflection , Fluids , Temperature , Cavities

Modeling and Characterization of Micromachined Bi-Directional Electro-Thermal Vibromotors

Wen-Pin Shih, Minfan Pai, Yu-Yun Lin, Chung-Yuen Hui, Norman C. Tien

IMECE 2003; 709-716doi:https://doi.org/10.1115/IMECE2003-41498

Abstract

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Topics: Micromachining , Modeling , Actuators , Cycles , Friction

Mechanical and Thermal Design of a Combustion-Based Thermionic Micro Power Generator

Chunbo Zhang, Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh

IMECE 2003; 717-724doi:https://doi.org/10.1115/IMECE2003-41531

Abstract

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Topics: Combustion , Design , Energy generation , Generators , Thermionic emission

Microcombustors Based on Controllable Solid Fuel Elements

Brian E. English, Heather H. DiBiaso, Mark G. Allen

IMECE 2003; 725-733doi:https://doi.org/10.1115/IMECE2003-42823

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Topics: Fuels , Combustion chambers , Composite materials , Heat losses , Accelerants (Fuels) , Actuators , Atmospheric pressure , Chemistry , Combustion , Geometry

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