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Proceedings Papers

Proceedings Volume Cover
ASME 2003 International Mechanical Engineering Congress and Exposition
November 15–21, 2003
Washington, DC, USA
Conference Sponsors:
  • Microelectromechanical Devices Division
ISBN:
0-7918-3721-1
Microelectromechanical Systems

Microelectromechanical Systems

Design Methodology and Modeling of Micro/Nano Scale Devices

Polysilicon Failure Stress and Young’s Modulus Evaluation in MEMS Devices
Fabio Carli, Rossana Cambie, Benedetto Vigna, Chantal Combi
IMECE 2003; 1-6https://doi.org/10.1115/IMECE2003-41157
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Topics: Failure , Microelectromechanical systems , Polysilicon , Stress , Young's modulus , Actuators , Elastic moduli , Electric potential , Micromachining , Micromotors
Crystallization of Sputtered NiTi Films
Michael J. Vestel, David S. Grummon, Albert P. Pisano
IMECE 2003; 7-13https://doi.org/10.1115/IMECE2003-41216
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Topics: Crystallization , Nickel titanium alloys , Delamination , Nucleation (Physics) , Temperature , Actuators , Differential scanning calorimetry , Low temperature , Microelectromechanical systems , Nickel
Computer-Aided Synthesis of Microscale Electrophoretic Separation Systems in Confined Areas
Anton J. Pfeiffer, Tamal Mukherjee, Steinar Hauan
IMECE 2003; 15-24https://doi.org/10.1115/IMECE2003-41289
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Topics: Computer-aided engineering , Microscale devices , Separation (Technology) , Design , Manufacturing , Optimization , Resolution (Optics) , Sensors , Simulation
Dynamic Modeling of a Thermally-Driven Micro Diffuser Pump
Chen-li Sun, Albert P. Pisano
IMECE 2003; 25-31https://doi.org/10.1115/IMECE2003-41313
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Topics: Diffusers , Dynamic modeling , Evaporation , Modeling , Pumps
On the Entropic Heating of Microfluidics for PCR Applications
E. J. Walsh, P. A. Walsh, R. Grimes, M. R. D. Davies
IMECE 2003; 33-36https://doi.org/10.1115/IMECE2003-41423
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Topics: Heating , Microfluidics , Fluids , Chain , Cycles , Entropy , Flow (Dynamics) , Fluid dynamics , Heat , Microelectromechanical systems
Design and Microfabrication of Terahertz Magnetic Metamaterials
Ta-Jen Yen, Nicholas Fang, Xiang Zhang
IMECE 2003; 37-40https://doi.org/10.1115/IMECE2003-41475
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Topics: Design , Metamaterials , Microfabrication , Dimensions , Infrared spectroscopy , Resonance , Simulation
Dynamic Modeling and Design of a High Frequency Micro Vacuum Pump
Aaron Astle, Luis P. Bernal, Peter Washabaugh, Hanseup Kim, Khalil Najafi
IMECE 2003; 41-50https://doi.org/10.1115/IMECE2003-41493
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Topics: Design , Dynamic modeling , Vacuum pumps , Pumps , Valves , Cavities , Dynamic models , Flow (Dynamics) , Micropumps , Resonance
Fabrication of Piezoelectric Al0.3Ga0.7As Heterostructures
Parshant Kumar, Lihua Li, L. C. Calhoun, P. Boudreaux, Don L. DeVoe
IMECE 2003; 51-56https://doi.org/10.1115/IMECE2003-41601
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Topics: Manufacturing , Crystals , Reactive-ion etching , Cantilevers , Chemical etching , Gallium arsenide , Microelectromechanical systems , Molecular beams , Plasmas (Ionized gases)
An Empirical Formula for the Estimation of the Residual Stress in Boron-Doped Silicon Films
Ok Chan Jeong, Sang Sik Yang
IMECE 2003; 57-62https://doi.org/10.1115/IMECE2003-42998
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Topics: Boron , Silicon , Stress , Compressive stress , Diffusion (Physics) , Oxidation , Secondary ion mass spectrometry , Temperature

Fabrication and Manufacturing of Microelectromechanical Systems

Integrating SOI and Poly-Si Surface Structures Using a Monolithic Process
Mingching Wu, Shiunafang Shy, Weileun Fang
IMECE 2003; 63-68https://doi.org/10.1115/IMECE2003-41182
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Topics: Crystals , Self-assembly , Silicon-on-insulator , Semiconductor wafers , Thin films , Accelerated life testing , Microactuators , Microelectromechanical systems , Mirrors , Optical instruments
Microfabrication and Laser Diagnosis of Pressure-Swirl Atomizers
Ker-Jer Huang, Alex C. Chen, Jing-Tang Yang
IMECE 2003; 69-75https://doi.org/10.1115/IMECE2003-41361
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Topics: Lasers , Microfabrication , Pressure , Flow (Dynamics) , Injection molding , Molding , Sprays , Design , Dimensions , Electroplating
Design and Fabrication of a High Frequency Thin Film Resonator Using Low Acoustic Impedance Reflective Layer
Chung-Hsien Lin, Hong-Ren Chen, Chen-Hsun Du, Weileun Fang
IMECE 2003; 77-82https://doi.org/10.1115/IMECE2003-41416
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Topics: Acoustics , Design , Manufacturing , Thin films , Etching , Waves
High Precision Femtosecond Laser Micromachining for Rapid Manufacture of MEMS Devices
A. Bulusu, S. P. Joshi, P. S. Shiakolas
IMECE 2003; 83-87https://doi.org/10.1115/IMECE2003-41557
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Topics: Lasers , Microelectromechanical systems , Micromachining , Damage , Ablation (Vaporization technology) , Chemical vapor deposition , Databases , Design , Electrical discharge machining , Embossing
Artificial Plasmonic Metamaterial Fabricated by Micro-Stereolithography
Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang, Willie J. Padilla, Dimitri N. Basov, David R. Smith, Sheldon Schultz
IMECE 2003; 89-91https://doi.org/10.1115/IMECE2003-41569
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Topics: Metamaterials , Stereolithography , Filters , Wire , Metals , Plasmas (Ionized gases) , Cylinders , Fourier transform infrared spectroscopy , Fourier transforms , Imaging
Micro Ultrasonic Machining of Ceramic MEMS With Micro Metallic Dies
Yong Yang, Xiaochun Li
IMECE 2003; 93-95https://doi.org/10.1115/IMECE2003-41635
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Topics: Ceramics , Microelectromechanical systems , Ultrasonic machining , Electrical discharge machining , Brittleness , Industrial ceramics , Manufacturing , Nickel , Tungsten
A Novel Maskless Post-CMOS Bulk Micromachining Process
Jing-Hung Chiou, Ching-Liang Dai, Jen-Yi Chen, Michael S.-C. Lu
IMECE 2003; 97-100https://doi.org/10.1115/IMECE2003-41721
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Topics: Complementary metal oxide semiconductors , Micromachining
Theoretical Analysis of Focusing and Intensity Mechanisms for a Spot Bonding Process Using Femtosecond Laser
M. Sarkar, S. P. Joshi, P. S. Shiakolas, A. Bulusu
IMECE 2003; 101-105https://doi.org/10.1115/IMECE2003-41906
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Topics: Bonding , Lasers , Theoretical analysis , Damage , Energy dissipation , Heat , Laser beams , Lenses (Optics) , Numerical analysis , Reflection
Fabrication and Testing of a Novel Microelectromechnical Device for the Study of Boiling Bubble Dynamics
Saeed Moghaddam, Kenneth T. Kiger, Jean-Marc Henriette, Michael Ohadi
IMECE 2003; 107-114https://doi.org/10.1115/IMECE2003-42303
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Topics: Boiling , Bubbles , Dynamics (Mechanics) , Manufacturing , Testing , Temperature , Cavities , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Sensors
Micro, Internal-Combustion Engine Fabrication With 900 µm Deep Features Via DRIE
Aaron J. Knobloch, Matt Wasilik, Carlos Fernandez-Pello, Albert P. Pisano
IMECE 2003; 115-123https://doi.org/10.1115/IMECE2003-42558
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Topics: Combustion , Engines , Manufacturing , Etching , Rotors , Microelectromechanical systems , Generators , Semiconductor wafers , Spur gears , Surface roughness
Construction of a 3D MEMS Microcoil Using Sequential Robotic Microassembly Operations
Nikolai Dechev, William L. Cleghorn, James K. Mills
IMECE 2003; 125-131https://doi.org/10.1115/IMECE2003-42798
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Topics: Construction , Microassembling , Microelectromechanical systems , Robotics , End effectors , Micromachining
Metallic Microactuators Based on Sacrificial Layer SU8 Release
Eniko T. Enikov, Kalin V. Lazarov
IMECE 2003; 133-139https://doi.org/10.1115/IMECE2003-43200
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Topics: Microactuators , Actuators , Microelectromechanical systems , Cooling , Displacement , Energy consumption , Etching , Excitation , Medical instrumentation , Nickel
Laser Repair Process Yields for MEMS Devices Adhered During Release or Operation
Sai B. Koppaka, Leslie M. Phinney
IMECE 2003; 141-147https://doi.org/10.1115/IMECE2003-43363
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Topics: Lasers , Maintenance , Microelectromechanical systems , Stiction , Failure , Adhesives , Cantilevers , Drying , Failure mechanisms , Adhesion

Fabrication and Testing of MEMS Packaging

A High-Density Flexible Connector Array for Multi-Substrate Packages
Asli B. Ucok, Joseph M. Giachino, Khalil Najafi
IMECE 2003; 149-155https://doi.org/10.1115/IMECE2003-41562
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Topics: Cables , Density , Manufacturing , Actuators , Circuits , Design , Metals , Microelectromechanical systems , Packaging , Polymers
Apex Seal Design for the MEMS Rotary Engine Power System
Fabian C. Martinez, Aaron J. Knobloch, Albert P. Pisano
IMECE 2003; 157-162https://doi.org/10.1115/IMECE2003-42071
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Topics: Design , Engines , Microelectromechanical systems , Power systems (Machinery) , Cantilevers , Compression , Manufacturing , Pressure , Combustion , Internal combustion engines
Mechanics of Direct Wafer Bonding
K. T. Turner, S. M. Spearing
IMECE 2003; 163-168https://doi.org/10.1115/IMECE2003-42106
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Topics: Bonding , Semiconductor wafers , Modeling , Etching , Microelectromechanical systems , Design , Failure , Geometry , Energy budget (Physics) , Manufacturing
Wafer-Level MEMS Package by Gold-Tin Bonding Method
Sihai Chen, Sheng Liu, Mingxiang Chen, Tao Xiong, Daming Zhang, Honghai Zhang, Xinjian Yi
IMECE 2003; 169-172https://doi.org/10.1115/IMECE2003-43467
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Topics: Bonding , MEMS packages , Semiconductor wafers , Heating , Tin , Metals , Microelectromechanical systems , Annealing , Ovens , Reliability

Failure Analysis and Reliability Aspects of MEMS

Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines
M. B. J. Wijesundara, D. C. Walther, C. R. Stoldt, K. Fu, D. Gao, C. Carraro, A. P. Pisano, R. Maboudian
IMECE 2003; 173-180https://doi.org/10.1115/IMECE2003-41696
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Topics: Chemical vapor deposition , Engines , Low temperature , Oxidation , Chemical etching , Chemically reactive flow , Coatings , Flames , Flow (Dynamics) , Friction
The Effects of Grain-Refinement and Heat Treatment on the Properties of Ni-Alloys for LIGA Microsystems
Steve Goods, Samuel Graham, James Kelly
IMECE 2003; 181-186https://doi.org/10.1115/IMECE2003-42090
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Topics: Heat treating (Metalworking) , Microelectromechanical systems , Nickel alloys , Grain size , Materials properties , Electrical conductivity , Materials processing , Materials research , Nanomaterials , Plating
Microstructure and Reliability of Surface Micromachined Polysilicon Used for MEMS
Thomas E. Buchheit, Corbett C. Bataille, Joseph R. Michael, Brad L. Boyce
IMECE 2003; 187-190https://doi.org/10.1115/IMECE2003-43796
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Topics: Microelectromechanical systems , Micromachining , Polysilicon , Reliability , Failure , Engineering simulation , Simulation , Brittleness , Ceramics , Deformation

General

A Planar Fabricated 1-3 Composite Ultrasonic Transducer to Determine the Dynamic Response of Microstructures
Wen Pin Lai, Weileun Fang
IMECE 2003; 191-195https://doi.org/10.1115/IMECE2003-41147
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Topics: Composite materials , Dynamic response , Hammers , Ultrasonic transducers
Design Optimization of a Novel, Large-Displacement, Multi-Axis, Silicon/Polymer Hybrid Actuator for Micro Optics
Yi-Chung Tung, Jeong-Gil Kim, Katsuo Kurabayashi
IMECE 2003; 197-204https://doi.org/10.1115/IMECE2003-41174
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Topics: Actuators , Design , Displacement , Optics , Optimization , Silicon polymers , Finite element analysis , Plasma desorption mass spectrometry , Diffraction gratings , Genetic algorithms
Analysis of Flexible Joints for Micromachined Devices
Robert W. Johnstone, Ash Parameswaran
IMECE 2003; 205-209https://doi.org/10.1115/IMECE2003-41304
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Topics: Micromachining , Stiffness
Analysis and Design of Thermoelectric Infrared Microsensor
Ke-Min Liao, Rongshun Chen, Bruce C. S. Chou
IMECE 2003; 211-216https://doi.org/10.1115/IMECE2003-41348
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Topics: Design , Microsensors , Manufacturing , Sensors , Thermocouples , Cantilever beams , Complementary metal oxide semiconductors , Finite element analysis , Membranes , Micromachining
Static Analysis of Thin Film Piezoelectric Micro-Accelerometer Using Analytical and Finite Element Modeling
Zhaochun Yang, Qing-Ming Wang, Patrick Smolinski, Hongbo Yang
IMECE 2003; 217-224https://doi.org/10.1115/IMECE2003-41387
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Topics: Accelerometers , Finite element analysis , Modeling , Thin films , Design , Elastic moduli , Elasticity , Geometry , Silicon , Structural optimization
Simultaneous Electrical and Thermal Modeling of a Contact-Type RF MEMS Switch
Brian Jensen, Zhongde Wang, Kazuhiro Saitou, John L. Volakis, Katsuo Kurabayashi
IMECE 2003; 225-228https://doi.org/10.1115/IMECE2003-41422
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Topics: Microelectromechanical systems , Modeling , Switches , Temperature , Contact resistance , Energy dissipation , Bulk solids , Currents , Metals
CNT Extracted Lithography
Jaehyun Chung, Kyong-Hoon Lee, Junghoon Lee
IMECE 2003; 229-232https://doi.org/10.1115/IMECE2003-41549
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Topics: Carbon nanotubes , Lithography , Multi-walled carbon nanotubes , Manufacturing , Metals , Nanoscale phenomena , Cathode ray oscilloscopes , Electric fields , Electrodes , Electron beams
Modeling and Analysis of RF MEMS Filters
Mehrnaz Motiee, Amir Khajepour, Raafat R. Mansour
IMECE 2003; 233-239https://doi.org/10.1115/IMECE2003-41568
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Topics: Filters , Microelectromechanical systems , Modeling , Cantilever beams , Cantilevers , Computer software , Finite element analysis , Flow charts , Micromechanical resonators , Physics
The Mechanical Behavior of a Micromachined PZT Membrane
I. Demir, R. F. Richards, D. F. Bahr, C. D. Richards
IMECE 2003; 241-245https://doi.org/10.1115/IMECE2003-41570
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Topics: Mechanical behavior , Membranes , Micromachining , Deflection , Electricity (Physics) , Electrodes , Energy conservation , Heat engines , Materials properties , Piezoelectric ceramics
Design and Fabrication of Microtacks for Retinal Implant Applications
Scott Cambron, Robert Keynton, Jose Franco, Mark Crain, Doug Shire, Kevin Walsh, John Naber, Henry Kaplan, Joseph Rizzo
IMECE 2003; 247-249https://doi.org/10.1115/IMECE2003-41572
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Topics: Design , Manufacturing , Micromilling , Semiconductor wafers , Chisels , Control equipment , Machinery , Machining , Micromachining , Polishing
Design, Fabrication and Thermal Characterization of a MEMS Device for Control of Nerve Cell Growth
Ankur Jain, Kevin Ness, Angie McConnell, Linan Jiang, Kenneth Goodson
IMECE 2003; 251-257https://doi.org/10.1115/IMECE2003-41590
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Topics: Design , Manufacturing , Microelectromechanical systems , Thermal characterization , Membranes , Temperature , Biomedicine , Finite element analysis , Heating , Modeling
Why Is (111) Silicon a Better Mechanical Material for MEMS: Torsion Case
Donghun Kwak, Jongpal Kim, Sangjun Park, Hyoungho Ko, Dong-Il Cho
IMECE 2003; 259-264https://doi.org/10.1115/IMECE2003-41869
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Topics: Finite element methods , Microelectromechanical systems , Semiconductor wafers , Silicon , Stiffness , Torsion
Design of Radio Frequency (RF) MEMS Switches: Modeling
Yong Zhu, Horacio D. Espinosa
IMECE 2003; 265-270https://doi.org/10.1115/IMECE2003-41945
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Topics: Design , Microelectromechanical systems , Modeling , Switches , Deflection , Finite element model , Electrostatic actuators , Geometry , Optimization , Reliability
Geometric Error Assessment of a Nanomechanical Drill
Nikhil Joshi, Ajay P. Malshe, April Bryan, Jaime A. Camelio, S. Jack Hu
IMECE 2003; 271-276https://doi.org/10.1115/IMECE2003-42116
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Topics: Drills (Tools) , Errors , Microelectromechanical systems , Kinematics , Computer-aided engineering , Manufacturing , Dimensions , Drilling
Adaptive Control of a Simulated MEMS Gyroscope
Qais A. Khasawneh, C. Batur
IMECE 2003; 277-282https://doi.org/10.1115/IMECE2003-42140
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Topics: Adaptive control , Microelectromechanical systems , Stability , Automobiles , Design , Energy consumption , Feedback , Finite element analysis , Weight (Mass)
Micro Four-Point Probe With Metal Tip
Heungjoo Shin, Peter J. Hesketh
IMECE 2003; 283-287https://doi.org/10.1115/IMECE2003-42443
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Topics: Metals , Probes , Atomic force microscopy , Cantilevers , Coating processes , Coatings , Electrodes , Resolution (Optics) , Wear , Electrical conductivity

Metrology and Analytical Techniques for MEMS/Nanotechnology

Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance
Jon R. Pratt, David B. Newell, John A. Kramar, Eric Whitenton
IMECE 2003; 289-292https://doi.org/10.1115/IMECE2003-41164
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Topics: Calibration , Cantilevers , Force sensors , National Institute of Standards and Technology , Chain , Engineering standards , Equipment performance , Hinges , Instrumentation , Levers
Using White Light Interferometry for Mesoscale Part Inspection
K. Meghan Shilling, Thomas R. Kurfess
IMECE 2003; 293-298https://doi.org/10.1115/IMECE2003-42328
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Topics: Inspection , Metrology , White light interferometry

Micro-Sensors and Micro-Actuators

Principle and Experimental Study of a MEMS Explosive Particle Detector
Yan Zhang, Tao Mei, Deyi Kong, Chengmei Zhang, Yongchun Tao, Shengjun Hu
IMECE 2003; 299-305https://doi.org/10.1115/IMECE2003-41236
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Topics: Explosives , Microelectromechanical systems , Particulate matter , Sensors
Piezoelectric Microbeam Resonators Based on Epitaxial AlxGa1−xAs Films
Lihua Li, Parshant Kumar, Don L. DeVoe
IMECE 2003; 307-310https://doi.org/10.1115/IMECE2003-41307
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Topics: Cantilevers , Chemical etching , Crystals , Electrodes , Frequency response , Gallium arsenide , Lasers , Manufacturing , Microbeams , Plasmas (Ionized gases)
Characterization of Balloon-Jointed Micro-Fingers
Yenwen Lu, Chang-Jin Kim
IMECE 2003; 311-316https://doi.org/10.1115/IMECE2003-41326
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Topics: Grasping , Manganese (Metal) , Pressure , Robotics , Robots , Silicon , Stiffness , Thin films
Mechanically Driven Microtweezers
Yoonsu Choi, James Ross, Steve DeWeerth, Mark G. Allen
IMECE 2003; 317-320https://doi.org/10.1115/IMECE2003-41705
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Topics: Design , Electrophysiology , Microassembling , Microelectromechanical systems

Micro-Systems Including Micro-Robotics, Total Analytical Systems, and MEMS Based Power Sources

A Novel 3-DOF Micromanipulator
Heng-Chung Chang, Julius Ming-Lin Tsai, Hsin-Chang Tsai, Weileun Fang
IMECE 2003; 321-326https://doi.org/10.1115/IMECE2003-41344
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Topics: Actuators , Crystals , Degrees of freedom , Grippers , Manipulators , Manufacturing , Mechanical properties , Micromachining , Robots , Silicon
Leakage Flow Analysis for a MEMS Rotary Engine
Joshua D. Heppner, David C. Walther, Albert P. Pisano
IMECE 2003; 327-334https://doi.org/10.1115/IMECE2003-41868
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Topics: Engines , Leakage flows , Microelectromechanical systems , Leakage , Rotors , Flow (Dynamics) , Sealing (Process) , Compression , Design , Rotation
Design of a Microfabricated Rankine Cycle Steam Turbine for Power Generation
Luc G. Fre´chette, Changgu Lee, Selin Arslan, Yuan-Chun Liu
IMECE 2003; 335-344https://doi.org/10.1115/IMECE2003-42082
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Topics: Design , Energy generation , Microelectromechanical systems , Micropumps , Microturbines , Rankine cycle , Steam turbines
Design, Optimization, and Experiments of Compliant Microgripper
Young Seok Oh, Woo Ho Lee, Harry E. Stephanou, George D. Skidmore
IMECE 2003; 345-350https://doi.org/10.1115/IMECE2003-55013
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Topics: Design , Optimization , Finite element analysis , Grippers , Manufacturing , Microassembling , Silicon-on-insulator , Snap fitting , Actuators , Mass production

Microflow Studies, Measurement Techniques, Flow Visualization, Sensing of Flow Properties, Transport of Complex Fluids, Biological Materials, or Flows Containing Particulates

Development of an Electrohydrodynamic Injection Micropump for Cryogenic Cooling
J. Darabi, H. Wang
IMECE 2003; 351-357https://doi.org/10.1115/IMECE2003-55247
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Topics: Cooling , Electrohydrodynamics , Micropumps , Electrodes , Nitrogen , Cooling systems , Design , Dimensions , Electric fields , Electronics

Microfluidic Devices and Systems

Analysis and Verifications for Meso-Scale Heat Exchanger With Magneto-Hydrodynamic (MHD) Pumps
Pei-Jen Wang, Chia-Yuan Chang
IMECE 2003; 359-367https://doi.org/10.1115/IMECE2003-41068
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Topics: Heat exchangers , Magnetohydrodynamics , Pumps , Coolants , Cooling , Flow (Dynamics) , Heat , Amperes , Computer simulation , Cooling systems
Microfabricated PDMS Check Valves
Bozhi Yang, George C. Lopez, Qiao Lin, Alan J. Rosenbloom
IMECE 2003; 369-372https://doi.org/10.1115/IMECE2003-41213
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Topics: Microfluidics , Molding , Plasma desorption mass spectrometry , Valves
High-Accuracy Microflow Controllers Using Fluidic Digital-to-Analog Converters
Sang-Hee Yoon, Young-Ho Cho
IMECE 2003; 373-377https://doi.org/10.1115/IMECE2003-41233
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Topics: Control equipment , Flow (Dynamics) , Engineering prototypes , Resistors , Errors , Micromachining , Microchannels , Pressure , Valves
Sequential Electrolytic Bubble-Based Micro-Pump Dosing System
Melanie Lewandowski, Daniel A. Ateya, Ashish A. Shah, Susan Z. Hua
IMECE 2003; 379-383https://doi.org/10.1115/IMECE2003-41314
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Topics: Bubbles , Microfluidics , Micropumps
Fabrication and Preliminary Testing of a Novel Piezoelectrically Actuated Microvalve
Fatih Ayhan, Jeffrey S. Vipperman, William Clark, Jimmy Thornton, Randall Gemmen
IMECE 2003; 385-391https://doi.org/10.1115/IMECE2003-41482
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Topics: Manufacturing , Testing , Actuators , Flow (Dynamics) , Temperature , Valves , Brass (Metal) , Crystals , Cutting , Deflection
Characterization of a Radiantly Driven Multistage Knudsen Compressor
M. Young, Y. L. Han, E. P. Muntz, G. Shiflett
IMECE 2003; 393-400https://doi.org/10.1115/IMECE2003-41486
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Topics: Compressors , Transpiration , Membranes , Pumps , Atmospheric pressure , Creep , Design , Flow (Dynamics) , Gas compressors , Nitrogen
The Design and Analysis of Piezoelectrically Actuated Microfluidic Systems
Paul Chiarot, Pierre Sullivan, Ridha Ben Mrad
IMECE 2003; 401-409https://doi.org/10.1115/IMECE2003-41760
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Topics: Design , Microfluidics , Flow (Dynamics) , Finite element analysis , Microscale devices , Reliability , Valves
A Structure of Bistable Electromagnetic Actuated Microvalve Fabricated on a Single Wafer, Implementing the SLA and PDMS Technique
Jemmy Sutanto Bintoro, Rajesh Luharuka, Edward W. Wong, Peter J. Hesketh
IMECE 2003; 411-417https://doi.org/10.1115/IMECE2003-43857
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Topics: Plasma desorption mass spectrometry , Semiconductor wafers , Valves , Leakage , Manufacturing , Complementary metal oxide semiconductors , Energy generation , Fuel cells , Fuel delivery systems , Gaskets

Microfluidics 2003: Applications of Fluid Mechanics to Microsystems Technology

Slip Flow Analyses of a Capacitive Pressure-Based Micro Flow Sensor
Jaesung Jang, Steven T. Wereley
IMECE 2003; 421-427https://doi.org/10.1115/IMECE2003-41142
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Topics: Capacitance , Flow sensors , Microchannels , Pressure , Slip flow
High Resolution Separation of Proteins in a Polymeric Micro-Fluidic Chip
Keisuke Horiuchi, Prashanta Dutta, Huanchun Cui, Cornelius F. Ivory
IMECE 2003; 429-433https://doi.org/10.1115/IMECE2003-41206
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Topics: Microfluidics , Proteins , Resolution (Optics) , Separation (Technology) , Plasma desorption mass spectrometry , Biocompatibility , Lithography , Manufacturing , Mass production , Rapid prototyping
Shear Superposition Micromixer: 3-D Analysis
Fre´de´ric Bottausci, Caroline Cardonne, Sophie Loire, Igor Mezi, Carl Meinhart
IMECE 2003; 435-444https://doi.org/10.1115/IMECE2003-41212
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Topics: Flow (Dynamics) , Flow visualization , Lamination , Optimization , Shear (Mechanics)
Static Chaos Microfluid Mixers Using Microblock-Induced Alternating Whirl and Microchannel-Induced Lamination
Sunghwan Chang, Young-Ho Cho
IMECE 2003; 445-449https://doi.org/10.1115/IMECE2003-41230
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Topics: Chaos , Lamination , Microchannels , Whirls , Flow (Dynamics) , Design , Geometry , Plasma desorption mass spectrometry , Pressure drop , Visualization
Electrocapillary Piston Motion and a Prototype of Phase-Manipulating Micromirror
Zhiliang Wan, Alan Feinerman, Gary Friedman, Hongjun Zeng
IMECE 2003; 451-455https://doi.org/10.1115/IMECE2003-41288
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Topics: Engineering prototypes , Pistons
Study on Air Damping Force Exerted on an Oscillating Micro Cantilever
Seiji Aoyagi, Yoshimasa Matsumoto, Yutaka Kasuda, Yasuhiko Arai, Masaharu Takano
IMECE 2003; 457-464https://doi.org/10.1115/IMECE2003-41315
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Topics: Damping , Finite element methods , Finite element model , Flow (Dynamics) , Microcantilevers , Viscous flow
Investigation of the Flow Mal-Distribution in Microchannels
Jyh-Tong Teng, Jiann-Cherng Chu, Min-Sheng Liu, Chi-Chuan Wang, Ralph Greif
IMECE 2003; 465-469https://doi.org/10.1115/IMECE2003-41323
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Topics: Flow (Dynamics) , Microchannels , Manifolds , Reynolds number , Shapes , Water
Formation of Hexagonal Monolayers by Flow of Bead Suspensions Into Flat Microchambers
Markus Grumann, Patric Schippers, Michael Dobmeier, Stefan Ha¨berle, Andreas Geipel, Thilo Brenner, Roland Zengerle, Jens Ducre´e, Claus Kuhn, Michael Fritsche
IMECE 2003; 471-477https://doi.org/10.1115/IMECE2003-41427
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Topics: Flow (Dynamics) , Assaying , Computational fluid dynamics , Design , Detergents , Engineering simulation , Microfluidics , Optimization , Packaging density (Electronics) , Pressure
AC Electrokinetics for Microfluidic Immunosensors
M. Sigurdson, C. Meinhart, D. Wang, X. Liu, J. J. Feng, S. Krishnamoorthy, S. Sundaram
IMECE 2003; 479-483https://doi.org/10.1115/IMECE2003-41442
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Topics: Electrokinetics , Microfluidics , Sensors , Electrodes , Computer simulation , Diffusion (Physics) , Fluids , Geometry , Microchannel flow , Microchannels
Simulation and Design of E. Coli-Based Rotary Micropump for Use in Microfluidic Systems: Integration of Micro-Nano-Bio
Mohamed G. Al-Fandi, Ajay P. Malshe, Shankar Sundaram, Jerry Jenkins, Steve Tung, Jin-Woo Kim
IMECE 2003; 485-490https://doi.org/10.1115/IMECE2003-41450
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Topics: Design , Microfluidics , Micropumps , Simulation , Motors , Computational fluid dynamics , Microchannels , Biological cells , Modeling , Computer software
A Compact, Easily Assembled Micromirror With Liquid Metal Pivot
Hongjun Zeng, Alan Feinerman, Zhiliang Wan
IMECE 2003; 491-494https://doi.org/10.1115/IMECE2003-41528
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Topics: Liquid metals
A Cellular Motor Based Micro Pump: Integration of Cellular Motors With Micro Channels
Ryan Pooran, Jin-Woo Kim, Steve Tung, Ajay P. Malshe, Chuen Cheak Lee
IMECE 2003; 495-499https://doi.org/10.1115/IMECE2003-41545
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Topics: Microchannels , Microelectromechanical systems , Micropumps , Motors
Enhancement of Heat Transfer in Miniaturized Channels Using Ferrohydrodynamic Convection
Ranjan Ganguly, Swarnendu Sen, Ishwar K. Puri
IMECE 2003; 501-505https://doi.org/10.1115/IMECE2003-41578
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Topics: Convection , Heat transfer , Ferrofluids , Magnetic fields , Flow (Dynamics) , Computer cooling , Coolants , Density , Engineering simulation , Fluids
Evaporation of Methanol/Water Mixtures in Microchannels
Brenda E. Haendler, Chen-Li Sun, Kenneth I. Pettigrew, David C. Walther, Albert P. Pisano
IMECE 2003; 507-514https://doi.org/10.1115/IMECE2003-41863
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Topics: Evaporation , Methanol , Microchannels , Water , Fluids , Flow (Dynamics) , Arches , Boiling , Bubbles , Microscale devices
Parametric Study of Phase Change Suspension Flow in Microchannels
Y. L. Hao, Y.-X. Tao
IMECE 2003; 515-526https://doi.org/10.1115/IMECE2003-42039
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Topics: Flow (Dynamics) , Microchannels , Heat transfer , Heat transfer coefficients , Laminar flow , Melting , Particulate matter , Computational fluid dynamics , Computer simulation , Computers
Molecular Tagging in Microchannels With Microbubble Lensing-Induced Photobleaching (µ-BLIP)
D. Sinton, D. Erickson, D. Li
IMECE 2003; 527-535https://doi.org/10.1115/IMECE2003-42730
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Topics: Microchannels , Bubbles , Flow visualization , Computer simulation , Electric fields , Electric potential , Electrokinetics , Flow (Dynamics) , Imaging , Interface phenomena
Heat Transfer and Electrokinetic Flow Analysis in Poly(Dimethylsiloxane) Microfluidic Systems
David Erickson, David Sinton, Vesna Nikolic, Dongqing Li
IMECE 2003; 537-544https://doi.org/10.1115/IMECE2003-42738
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Topics: Electrokinetics , Flow (Dynamics) , Heat transfer , Heating , Joules , Microfluidics
A Micro-Flow Cytometer Based on Dielectrophoretic Particle Focusing
Choongho Yu, Li Shi, Jody Vykoukal, Peter R. C. Gascoyne
IMECE 2003; 545-549https://doi.org/10.1115/IMECE2003-42795
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Topics: Flow (Dynamics) , Particulate matter , Semiconductor wafers , Blood , Bonding , Design , Electrodes , Etching , Fluorescence , Glass
Effects of Meniscus Motion on Ejection Performance in Thermal Inkjet Print Heads by 3-D Numerical Simulation and 1-D Lumped Modeling
Min Soo Kim, Yong Soo Lee, Suho Shin, You-Seop Lee, Seung Joo Shin, Yong Soo Oh
IMECE 2003; 551-558https://doi.org/10.1115/IMECE2003-43701
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Topics: Computer simulation , Modeling
Validation of Analytical Solution for Depth-of-Correlation in Microscopic Particle Image Velocimetry
Christopher J. Bourdon, Michael G. Olsen, Allen D. Gorby
IMECE 2003; 559-570https://doi.org/10.1115/IMECE2003-43788
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Topics: Particulate matter , Engineering simulation , Imaging , Particle size , Separation (Technology) , Simulation

Microscale Heat Transfer

The Dynamic Characteristics of MEMS Driven by Laser Beam
Yasuhiko Arai, Shunsuke Yokozeki, Seiji Aoyagi, Atsunobu Mori
IMECE 2003; 571-575https://doi.org/10.1115/IMECE2003-41117
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Topics: Laser beams , Microelectromechanical systems , Microcantilevers , Machinery , Frequency response , Mechanical properties , Resonance , Semiconductor lasers , Signals , Vacuum
MEMS-Based Microcalorimeter for Liquid Samples
Haruna Tada, Peter Y. Wong
IMECE 2003; 577-581https://doi.org/10.1115/IMECE2003-41150
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Topics: Microelectromechanical systems , Thermometers , Design , Silicon nitride ceramics , Temperature , Biomaterials , Biomedicine , Calorimetry , Computer simulation , Heat
Design, Analysis, and Testing of Electrostatically Actuated Micromembranes
Lucas Yeary, Glenn Cunningham, Nagesh Panduga, Corinne Darvennes, Kevin Walsh, Mark Crain, Robert W. Cohn, Steven A. Harfenist, Jeff Frolik
IMECE 2003; 583-588https://doi.org/10.1115/IMECE2003-41155
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Topics: Design , Testing , Membranes , Deflection , Engineering simulation , Simulation , Dimensions , Electrical measurement , Electrodes , Finite element analysis
Optimizing Design of a Force Probe With Six-Degree of Freedom
Shengjun Hu, Tao Mei, Deyi Kong, Yan Zhang, Fei Sun
IMECE 2003; 589-595https://doi.org/10.1115/IMECE2003-41234
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Topics: Design , Microelectromechanical systems , Probes , Semiconductor wafers , Electric bridges , Finite element analysis , Force sensors , Microsensors , Piezoresistors , Sensors
Design and Fabrication of a Temperature Sensor Based on Thermopile in CMOS Technology
Ioana Voiculescu, Mona Zaghloul, R. Andrew McGill
IMECE 2003; 597-601https://doi.org/10.1115/IMECE2003-41302
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Topics: Complementary metal oxide semiconductors , Design , Manufacturing , Temperature sensors
Time-Dependent Simulations of Sub-Continuum Heat Generation Effects in Electronic Devices Using the Lattice Boltzmann Method
Rodrigo A. Escobar, Sartaj S. Ghai, Cristina H. Amon, Myung S. Jhon
IMECE 2003; 603-612https://doi.org/10.1115/IMECE2003-41522
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Topics: Engineering simulation , Heat , Lattice Boltzmann methods , Simulation , Silicon-on-insulator , Temperature , Boundary-value problems , Dimensions , Dynamics (Mechanics) , Electromagnetic scattering
Design, Modeling, and Fabrication of a Micro Corona Motor
Sanghoon Lee, Daejong Kim, Michael D. Bryant, Frederick F. Ling
IMECE 2003; 613-621https://doi.org/10.1115/IMECE2003-41587
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Topics: Design , Engines , Manufacturing , Modeling , Motors , Electrodes , Rotors , Stators , Torque , X-ray lithography
An Actuator for Controlling the Area of Dielectric Layer of the Tunable Capacitor by Commercial CMOS Fabrication
Jing-Hung Chiou, Ran-Jin Lin, Ching-Liang Dai, Kai-Hsiang Yen, Yu-Ching Shih, Chen-Kuei Chung
IMECE 2003; 623-627https://doi.org/10.1115/IMECE2003-41717
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Topics: Actuators , Capacitors , Complementary metal oxide semiconductors , Manufacturing
Temperature-Dependence of Water Bridge Formation in Atomic Force Microscopy
Brent A. Nelson, Mark A. Poggi, Lawrence A. Bottomley, William P. King
IMECE 2003; 629-636https://doi.org/10.1115/IMECE2003-41762
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Topics: Adhesion , Aqueducts , Atomic force microscopy , Nanolithography , Temperature , Temperature effects
Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)
Hong-Seok Noh, Sangkyung Kim, Peter J. Hesketh, Hua Mao, Lid Wong
IMECE 2003; 637-641https://doi.org/10.1115/IMECE2003-42441
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Topics: Diaphragms (Mechanical devices) , Diaphragms (Structural) , Fibers , Pressure , Biomedicine , Deflection , Design , Endoscopes , Manufacturing , Pressure transducers
Design and Fabrication of a High Efficiency Piezoelectric Vibration-Induced Micro Power Generator
Gou-Jen Wang, Ying-Hsu Lin, His-Harng Yang, Cheng-Tang Pan
IMECE 2003; 643-650https://doi.org/10.1115/IMECE2003-42682
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Topics: Design , Generators , Manufacturing , Vibration , Energy conversion , Capacitors , Finite element analysis , Resonance , Theoretical analysis , Transducers
High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons
Yoonsu Choi, Richard Powers, Varadraj Vernekar, A. Bruno Frazier, Michelle C. LaPlaca, Mark G. Allen
IMECE 2003; 651-654https://doi.org/10.1115/IMECE2003-42794
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Topics: Adhesion , Biocompatibility , Epoxy adhesives , Epoxy resins , Manufacturing , Mechanical stability , Micromachining
Thermal Management of a Polyimide V-Groove Leg Actuator for a Walking Micro-Robot
Ritesh A. Khire, Satish G. Kandlikar, Wayne W. Walter, Alan Raisanen, Ferat Sahin
IMECE 2003; 655-662https://doi.org/10.1115/IMECE2003-43722
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Topics: Actuators , Robots , Thermal management , Cycles , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Cooling , Design , Geometry , Heat conduction
Comparison of Self-Sensing Techniques for Mercury Vapor Detection Using Piezoelectric Microcantilevers
B. Rogers, C. A. Bauer, J. D. Adams
IMECE 2003; 663-666https://doi.org/10.1115/IMECE2003-55024
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Topics: Microcantilevers , Vapors

Nonlinear Dynamics of Micro/Nano Systems

Finite Time Lyapunov Exponent for Micro Chaotic Mixer Design
Xi-Ze Niu, Patrick Tabeling, Yi-Kuen Lee
IMECE 2003; 667-672https://doi.org/10.1115/IMECE2003-41389
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Topics: Design , Microchannels , Computational fluid dynamics , Diffusion (Physics) , Engineering simulation , Navier-Stokes equations , Simulation
Bistable Nature of the Hydrophobic Contact Angle on Rough Surfaces
Bo He, Neelesh A. Patankar, Junghoon Lee
IMECE 2003; 673-677https://doi.org/10.1115/IMECE2003-41536
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Topics: Surface roughness
DSMC Analysis of Fluid Film Damping in Laterally Oscillating Microstructures
Jae Hyun Park, Ali Beskok
IMECE 2003; 679-686https://doi.org/10.1115/IMECE2003-41610
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Topics: Damping , Fluid films , Knudsen flow , Flow (Dynamics) , Dynamic response , Knudsen number , Q-factor
A Port-Controlled Hamiltonian Approach to Control of an Electrostatic MEMS Actuator
D. H. S. Maithripala, Jordan M. Berg, W. P. Dayawansa
IMECE 2003; 687-692https://doi.org/10.1115/IMECE2003-42461
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Topics: Actuators , Microelectromechanical systems , Damping , Bifurcation , Closed loop systems , Dynamics (Mechanics) , Electromechanical systems , Energy transformation , Equations of motion , Feedback

Novel Processes and Tools for Unique Micro and Nano Structures

A Batch Fabricated Linear Synchronous Motor
Martin Fo¨hse, Hans-D. Sto¨lting, Jens Edler, Hans H. Gatzen
IMECE 2003; 693-700https://doi.org/10.1115/IMECE2003-41388
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Topics: Motors , Actuators , Design , Electromechanical systems , Manufacturing , Microassembling , Microelectromechanical systems , Stators
Characterization of the Thermodynamic Working Cycle in a MEMS-Based Micro Heat Engine
S. A. Whalen, L. W. Weiss, C. D. Richards, D. F. Bahr, R. F. Richards
IMECE 2003; 701-707https://doi.org/10.1115/IMECE2003-41426
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Topics: Cycles , Heat engines , Microelectromechanical systems , Engines , Membranes , Pressure , Deflection , Fluids , Temperature , Cavities
Modeling and Characterization of Micromachined Bi-Directional Electro-Thermal Vibromotors
Wen-Pin Shih, Minfan Pai, Yu-Yun Lin, Chung-Yuen Hui, Norman C. Tien
IMECE 2003; 709-716https://doi.org/10.1115/IMECE2003-41498
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Topics: Micromachining , Modeling , Actuators , Cycles , Friction
Mechanical and Thermal Design of a Combustion-Based Thermionic Micro Power Generator
Chunbo Zhang, Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh
IMECE 2003; 717-724https://doi.org/10.1115/IMECE2003-41531
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Topics: Combustion , Design , Energy generation , Generators , Thermionic emission
Microcombustors Based on Controllable Solid Fuel Elements
Brian E. English, Heather H. DiBiaso, Mark G. Allen
IMECE 2003; 725-733https://doi.org/10.1115/IMECE2003-42823
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Topics: Fuels , Combustion chambers , Composite materials , Heat losses , Accelerants (Fuels) , Actuators , Atmospheric pressure , Chemistry , Combustion , Geometry
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