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Proceedings Papers

Microelectromechanical Systems

Microelectromechanical Systems

Design Methodology and Modeling of Micro/Nano Scale Devices

Fabrication and Manufacturing of Microelectromechanical Systems

Fabrication and Testing of MEMS Packaging

Failure Analysis and Reliability Aspects of MEMS

General

Metrology and Analytical Techniques for MEMS/Nanotechnology

Micro-Sensors and Micro-Actuators

Micro-Systems Including Micro-Robotics, Total Analytical Systems, and MEMS Based Power Sources

Microflow Studies, Measurement Techniques, Flow Visualization, Sensing of Flow Properties, Transport of Complex Fluids, Biological Materials, or Flows Containing Particulates

Microfluidic Devices and Systems

Microfluidics 2003: Applications of Fluid Mechanics to Microsystems Technology

Microscale Heat Transfer

Nonlinear Dynamics of Micro/Nano Systems

Novel Processes and Tools for Unique Micro and Nano Structures

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