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Proceedings Papers
In This Volume
Microelectromechanical Systems
Microelectromechanical Systems
Design Methodology and Modeling of Micro/Nano Scale Devices
Dynamic Modeling of a Thermally-Driven Micro Diffuser Pump
IMECE 2003; 25-31https://doi.org/10.1115/IMECE2003-41313
Topics:
Diffusers
,
Dynamic modeling
,
Evaporation
,
Modeling
,
Pumps
On the Entropic Heating of Microfluidics for PCR Applications
IMECE 2003; 33-36https://doi.org/10.1115/IMECE2003-41423
Topics:
Heating
,
Microfluidics
,
Fluids
,
Chain
,
Cycles
,
Entropy
,
Flow (Dynamics)
,
Fluid dynamics
,
Heat
,
Microelectromechanical systems
Dynamic Modeling and Design of a High Frequency Micro Vacuum Pump
IMECE 2003; 41-50https://doi.org/10.1115/IMECE2003-41493
Topics:
Design
,
Dynamic modeling
,
Vacuum pumps
,
Pumps
,
Valves
,
Cavities
,
Dynamic models
,
Flow (Dynamics)
,
Micropumps
,
Resonance
Fabrication and Manufacturing of Microelectromechanical Systems
Microfabrication and Laser Diagnosis of Pressure-Swirl Atomizers
IMECE 2003; 69-75https://doi.org/10.1115/IMECE2003-41361
Topics:
Lasers
,
Microfabrication
,
Pressure
,
Flow (Dynamics)
,
Injection molding
,
Molding
,
Sprays
,
Design
,
Dimensions
,
Electroplating
Theoretical Analysis of Focusing and Intensity Mechanisms for a Spot Bonding Process Using Femtosecond Laser
IMECE 2003; 101-105https://doi.org/10.1115/IMECE2003-41906
Topics:
Bonding
,
Lasers
,
Theoretical analysis
,
Damage
,
Energy dissipation
,
Heat
,
Laser beams
,
Lenses (Optics)
,
Numerical analysis
,
Reflection
Fabrication and Testing of a Novel Microelectromechnical Device for the Study of Boiling Bubble Dynamics
IMECE 2003; 107-114https://doi.org/10.1115/IMECE2003-42303
Topics:
Boiling
,
Bubbles
,
Dynamics (Mechanics)
,
Manufacturing
,
Testing
,
Temperature
,
Cavities
,
Diaphragms (Mechanical devices)
,
Diaphragms (Structural)
,
Sensors
Micro, Internal-Combustion Engine Fabrication With 900 µm Deep Features Via DRIE
IMECE 2003; 115-123https://doi.org/10.1115/IMECE2003-42558
Topics:
Combustion
,
Engines
,
Manufacturing
,
Etching
,
Rotors
,
Microelectromechanical systems
,
Generators
,
Semiconductor wafers
,
Spur gears
,
Surface roughness
Fabrication and Testing of MEMS Packaging
A High-Density Flexible Connector Array for Multi-Substrate Packages
IMECE 2003; 149-155https://doi.org/10.1115/IMECE2003-41562
Topics:
Cables
,
Density
,
Manufacturing
,
Actuators
,
Circuits
,
Design
,
Metals
,
Microelectromechanical systems
,
Packaging
,
Polymers
Mechanics of Direct Wafer Bonding
IMECE 2003; 163-168https://doi.org/10.1115/IMECE2003-42106
Topics:
Bonding
,
Semiconductor wafers
,
Modeling
,
Etching
,
Microelectromechanical systems
,
Design
,
Failure
,
Geometry
,
Energy budget (Physics)
,
Manufacturing
Wafer-Level MEMS Package by Gold-Tin Bonding Method
IMECE 2003; 169-172https://doi.org/10.1115/IMECE2003-43467
Topics:
Bonding
,
MEMS packages
,
Semiconductor wafers
,
Heating
,
Tin
,
Metals
,
Microelectromechanical systems
,
Annealing
,
Ovens
,
Reliability
Failure Analysis and Reliability Aspects of MEMS
Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines
M. B. J. Wijesundara, D. C. Walther, C. R. Stoldt, K. Fu, D. Gao, C. Carraro, A. P. Pisano, R. Maboudian
IMECE 2003; 173-180https://doi.org/10.1115/IMECE2003-41696
Topics:
Chemical vapor deposition
,
Engines
,
Low temperature
,
Oxidation
,
Chemical etching
,
Chemically reactive flow
,
Coatings
,
Flames
,
Flow (Dynamics)
,
Friction
Microstructure and Reliability of Surface Micromachined Polysilicon Used for MEMS
IMECE 2003; 187-190https://doi.org/10.1115/IMECE2003-43796
Topics:
Microelectromechanical systems
,
Micromachining
,
Polysilicon
,
Reliability
,
Failure
,
Engineering simulation
,
Simulation
,
Brittleness
,
Ceramics
,
Deformation
General
Static Analysis of Thin Film Piezoelectric Micro-Accelerometer Using Analytical and Finite Element Modeling
IMECE 2003; 217-224https://doi.org/10.1115/IMECE2003-41387
Topics:
Accelerometers
,
Finite element analysis
,
Modeling
,
Thin films
,
Design
,
Elastic moduli
,
Elasticity
,
Geometry
,
Silicon
,
Structural optimization
CNT Extracted Lithography
IMECE 2003; 229-232https://doi.org/10.1115/IMECE2003-41549
Modeling and Analysis of RF MEMS Filters
IMECE 2003; 233-239https://doi.org/10.1115/IMECE2003-41568
Design and Fabrication of Microtacks for Retinal Implant Applications
Scott Cambron, Robert Keynton, Jose Franco, Mark Crain, Doug Shire, Kevin Walsh, John Naber, Henry Kaplan, Joseph Rizzo
IMECE 2003; 247-249https://doi.org/10.1115/IMECE2003-41572
Topics:
Design
,
Manufacturing
,
Micromilling
,
Semiconductor wafers
,
Chisels
,
Control equipment
,
Machinery
,
Machining
,
Micromachining
,
Polishing
Micro Four-Point Probe With Metal Tip
IMECE 2003; 283-287https://doi.org/10.1115/IMECE2003-42443
Topics:
Metals
,
Probes
,
Atomic force microscopy
,
Cantilevers
,
Coating processes
,
Coatings
,
Electrodes
,
Resolution (Optics)
,
Wear
,
Electrical conductivity
Metrology and Analytical Techniques for MEMS/Nanotechnology
Micro-Sensors and Micro-Actuators
Characterization of Balloon-Jointed Micro-Fingers
IMECE 2003; 311-316https://doi.org/10.1115/IMECE2003-41326
Topics:
Grasping
,
Manganese (Metal)
,
Pressure
,
Robotics
,
Robots
,
Silicon
,
Stiffness
,
Thin films
Mechanically Driven Microtweezers
IMECE 2003; 317-320https://doi.org/10.1115/IMECE2003-41705
Topics:
Design
,
Electrophysiology
,
Microassembling
,
Microelectromechanical systems
Micro-Systems Including Micro-Robotics, Total Analytical Systems, and MEMS Based Power Sources
A Novel 3-DOF Micromanipulator
IMECE 2003; 321-326https://doi.org/10.1115/IMECE2003-41344
Topics:
Actuators
,
Crystals
,
Degrees of freedom
,
Grippers
,
Manipulators
,
Manufacturing
,
Mechanical properties
,
Micromachining
,
Robots
,
Silicon
Leakage Flow Analysis for a MEMS Rotary Engine
IMECE 2003; 327-334https://doi.org/10.1115/IMECE2003-41868
Topics:
Engines
,
Leakage flows
,
Microelectromechanical systems
,
Leakage
,
Rotors
,
Flow (Dynamics)
,
Sealing (Process)
,
Compression
,
Design
,
Rotation
Microflow Studies, Measurement Techniques, Flow Visualization, Sensing of Flow Properties, Transport of Complex Fluids, Biological Materials, or Flows Containing Particulates
Microfluidic Devices and Systems
Analysis and Verifications for Meso-Scale Heat Exchanger With Magneto-Hydrodynamic (MHD) Pumps
IMECE 2003; 359-367https://doi.org/10.1115/IMECE2003-41068
Topics:
Heat exchangers
,
Magnetohydrodynamics
,
Pumps
,
Coolants
,
Cooling
,
Flow (Dynamics)
,
Heat
,
Amperes
,
Computer simulation
,
Cooling systems
Microfabricated PDMS Check Valves
IMECE 2003; 369-372https://doi.org/10.1115/IMECE2003-41213
Topics:
Microfluidics
,
Molding
,
Plasma desorption mass spectrometry
,
Valves
Sequential Electrolytic Bubble-Based Micro-Pump Dosing System
IMECE 2003; 379-383https://doi.org/10.1115/IMECE2003-41314
Topics:
Bubbles
,
Microfluidics
,
Micropumps
Fabrication and Preliminary Testing of a Novel Piezoelectrically Actuated Microvalve
IMECE 2003; 385-391https://doi.org/10.1115/IMECE2003-41482
Topics:
Manufacturing
,
Testing
,
Actuators
,
Flow (Dynamics)
,
Temperature
,
Valves
,
Brass (Metal)
,
Crystals
,
Cutting
,
Deflection
Characterization of a Radiantly Driven Multistage Knudsen Compressor
IMECE 2003; 393-400https://doi.org/10.1115/IMECE2003-41486
Topics:
Compressors
,
Transpiration
,
Membranes
,
Pumps
,
Atmospheric pressure
,
Creep
,
Design
,
Flow (Dynamics)
,
Gas compressors
,
Nitrogen
Microfluidics 2003: Applications of Fluid Mechanics to Microsystems Technology
Slip Flow Analyses of a Capacitive Pressure-Based Micro Flow Sensor
IMECE 2003; 421-427https://doi.org/10.1115/IMECE2003-41142
Topics:
Capacitance
,
Flow sensors
,
Microchannels
,
Pressure
,
Slip flow
Shear Superposition Micromixer: 3-D Analysis
IMECE 2003; 435-444https://doi.org/10.1115/IMECE2003-41212
Topics:
Flow (Dynamics)
,
Flow visualization
,
Lamination
,
Optimization
,
Shear (Mechanics)
Static Chaos Microfluid Mixers Using Microblock-Induced Alternating Whirl and Microchannel-Induced Lamination
IMECE 2003; 445-449https://doi.org/10.1115/IMECE2003-41230
Topics:
Chaos
,
Lamination
,
Microchannels
,
Whirls
,
Flow (Dynamics)
,
Design
,
Geometry
,
Plasma desorption mass spectrometry
,
Pressure drop
,
Visualization
Investigation of the Flow Mal-Distribution in Microchannels
IMECE 2003; 465-469https://doi.org/10.1115/IMECE2003-41323
Topics:
Flow (Dynamics)
,
Microchannels
,
Manifolds
,
Reynolds number
,
Shapes
,
Water
Formation of Hexagonal Monolayers by Flow of Bead Suspensions Into Flat Microchambers
Markus Grumann, Patric Schippers, Michael Dobmeier, Stefan Ha¨berle, Andreas Geipel, Thilo Brenner, Roland Zengerle, Jens Ducre´e, Claus Kuhn, Michael Fritsche
IMECE 2003; 471-477https://doi.org/10.1115/IMECE2003-41427
AC Electrokinetics for Microfluidic Immunosensors
IMECE 2003; 479-483https://doi.org/10.1115/IMECE2003-41442
Topics:
Electrokinetics
,
Microfluidics
,
Sensors
,
Electrodes
,
Computer simulation
,
Diffusion (Physics)
,
Fluids
,
Geometry
,
Microchannel flow
,
Microchannels
Simulation and Design of E. Coli-Based Rotary Micropump for Use in Microfluidic Systems: Integration of Micro-Nano-Bio
IMECE 2003; 485-490https://doi.org/10.1115/IMECE2003-41450
Topics:
Design
,
Microfluidics
,
Micropumps
,
Simulation
,
Motors
,
Computational fluid dynamics
,
Microchannels
,
Biological cells
,
Modeling
,
Computer software
Enhancement of Heat Transfer in Miniaturized Channels Using Ferrohydrodynamic Convection
IMECE 2003; 501-505https://doi.org/10.1115/IMECE2003-41578
Topics:
Convection
,
Heat transfer
,
Ferrofluids
,
Magnetic fields
,
Flow (Dynamics)
,
Computer cooling
,
Coolants
,
Density
,
Engineering simulation
,
Fluids
Evaporation of Methanol/Water Mixtures in Microchannels
IMECE 2003; 507-514https://doi.org/10.1115/IMECE2003-41863
Topics:
Evaporation
,
Methanol
,
Microchannels
,
Water
,
Fluids
,
Flow (Dynamics)
,
Arches
,
Boiling
,
Bubbles
,
Microscale devices
A Micro-Flow Cytometer Based on Dielectrophoretic Particle Focusing
IMECE 2003; 545-549https://doi.org/10.1115/IMECE2003-42795
Topics:
Flow (Dynamics)
,
Particulate matter
,
Semiconductor wafers
,
Blood
,
Bonding
,
Design
,
Electrodes
,
Etching
,
Fluorescence
,
Glass
Microscale Heat Transfer
Design, Analysis, and Testing of Electrostatically Actuated Micromembranes
Lucas Yeary, Glenn Cunningham, Nagesh Panduga, Corinne Darvennes, Kevin Walsh, Mark Crain, Robert W. Cohn, Steven A. Harfenist, Jeff Frolik
IMECE 2003; 583-588https://doi.org/10.1115/IMECE2003-41155
Topics:
Design
,
Testing
,
Membranes
,
Deflection
,
Engineering simulation
,
Simulation
,
Dimensions
,
Electrical measurement
,
Electrodes
,
Finite element analysis
Design, Modeling, and Fabrication of a Micro Corona Motor
IMECE 2003; 613-621https://doi.org/10.1115/IMECE2003-41587
Topics:
Design
,
Engines
,
Manufacturing
,
Modeling
,
Motors
,
Electrodes
,
Rotors
,
Stators
,
Torque
,
X-ray lithography
Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)
IMECE 2003; 637-641https://doi.org/10.1115/IMECE2003-42441
Topics:
Diaphragms (Mechanical devices)
,
Diaphragms (Structural)
,
Fibers
,
Pressure
,
Biomedicine
,
Deflection
,
Design
,
Endoscopes
,
Manufacturing
,
Pressure transducers
Design and Fabrication of a High Efficiency Piezoelectric Vibration-Induced Micro Power Generator
IMECE 2003; 643-650https://doi.org/10.1115/IMECE2003-42682
Topics:
Design
,
Generators
,
Manufacturing
,
Vibration
,
Energy conversion
,
Capacitors
,
Finite element analysis
,
Resonance
,
Theoretical analysis
,
Transducers
High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons
Yoonsu Choi, Richard Powers, Varadraj Vernekar, A. Bruno Frazier, Michelle C. LaPlaca, Mark G. Allen
IMECE 2003; 651-654https://doi.org/10.1115/IMECE2003-42794
Topics:
Adhesion
,
Biocompatibility
,
Epoxy adhesives
,
Epoxy resins
,
Manufacturing
,
Mechanical stability
,
Micromachining
Thermal Management of a Polyimide V-Groove Leg Actuator for a Walking Micro-Robot
IMECE 2003; 655-662https://doi.org/10.1115/IMECE2003-43722
Topics:
Actuators
,
Robots
,
Thermal management
,
Cycles
,
Diaphragms (Mechanical devices)
,
Diaphragms (Structural)
,
Cooling
,
Design
,
Geometry
,
Heat conduction
Nonlinear Dynamics of Micro/Nano Systems
Novel Processes and Tools for Unique Micro and Nano Structures
A Batch Fabricated Linear Synchronous Motor
IMECE 2003; 693-700https://doi.org/10.1115/IMECE2003-41388
Topics:
Motors
,
Actuators
,
Design
,
Electromechanical systems
,
Manufacturing
,
Microassembling
,
Microelectromechanical systems
,
Stators