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Proceedings Papers

Proceedings Volume Cover
ASME 2001 International Mechanical Engineering Congress and Exposition
November 11–16, 2001
New York, New York, USA
Conference Sponsors:
  • ASME
ISBN:
978-0-7918-3555-5
Micro-Electro-Mechanical Systems (MEMS)

Micro-Electro-Mechanical Systems

MEMS Commercialization Through Teamwork

Issues and Directions of MEMS Research for the Electronics Industry
Y. Eugene Pak
IMECE 2001; 3-8https://doi.org/10.1115/IMECE2001/MEMS-23800
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Topics: Electronics , Microelectromechanical systems , Biotechnology , Electromechanical systems , Machining , Manufacturing , Microelectronic devices
Modeling and Simulating MEMS Devices Using Finite Element Analysis
Ulises Gonzalez
IMECE 2001; 9-13https://doi.org/10.1115/IMECE2001/MEMS-23801
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Topics: Finite element analysis , Microelectromechanical systems , Modeling , Computer software , Dimensions , Mechanical behavior , Design , Electromagnetic force , Electromagnetism , Electrostatics

Design Methodology, Modeling, and Characterization of MEMS

A Novel MEMS-Based Technique for In-Situ Characterization of Freestanding Nanometer Scale Thin Films Inside SEM and TEM
M. A. Haque, M. T. A. Saif
IMECE 2001; 15-20https://doi.org/10.1115/IMECE2001/MEMS-23802
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Topics: Microelectromechanical systems , Nanoscale phenomena , Thin films , Tensile testing , Aluminum , Displacement , Force sensors , Stress , Testing
Characterization of a Piezoelectric Membrane for MEMS Power
K. Bruce, R. Richards, D. Bahr, C. Richards
IMECE 2001; 21-28https://doi.org/10.1115/IMECE2001/MEMS-23803
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Topics: Membranes , Microelectromechanical systems , Generators , Thin films , Power systems (Machinery) , Carnot cycle , Design , Electrical measurement , Electricity (Physics) , Energy / power systems
On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation
Jerwei Hsieh, Chien-Cheng Chu, Weileun Fang
IMECE 2001; 29-34https://doi.org/10.1115/IMECE2001/MEMS-23804
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Topics: Actuators , Design , Electrostatic actuators , Microelectromechanical systems , Vibration equipment
Performance Characterization of Micromachined Tunneling Infrared Detectors
Olaleye Ajakaiye, Choongsoo Shin, John Grade, Thomas W. Kenny
IMECE 2001; 35-40https://doi.org/10.1115/IMECE2001/MEMS-23805
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Topics: Microelectromechanical systems , Micromachining , Performance characterization , Sensors , Tunnel construction , Noise (Sound) , Manufacturing , Semiconductor wafers
Magnetically Actuated, Circular Diaphragm Pumps Fabricated With Low-Temperature, Co-Fired Ceramic Tapes and Kapton Polyimide Films: Experiments and Theory
Moon Kim, G. K. Ananthasuresh, Haim H. Bau
IMECE 2001; 41-49https://doi.org/10.1115/IMECE2001/MEMS-23806
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Topics: Ceramics , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Low temperature , Microelectromechanical systems , Pumps , Design , Copper , Finite element methods , Currents

Novel Micromachining Processes and Packaging for MEMS

A Wafer Transfer Technology for MEMS Adaptive Optics
Eui-Hyeok Yang, Dean V. Wiberg
IMECE 2001; 51-55https://doi.org/10.1115/IMECE2001/MEMS-23807
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Topics: Microelectromechanical systems , Optics , Semiconductor wafers , Membranes , Mirrors , Actuators , Epoxy adhesives , Epoxy resins , Manufacturing , Photoresists
Flip-Chip Fabrication of Advanced MEMS Using a Novel Latching Off-Chip Hinge Mechanism
M. Adrian Michalicek, Victor M. Bright
IMECE 2001; 57-64https://doi.org/10.1115/IMECE2001/MEMS-23808
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Topics: Flip-chip , Hinges , Manufacturing , Microelectromechanical systems , Bonding , Design , Micromachining , Adhesives , Ceramics , Complementary metal oxide semiconductors
A New Assembly-Transferred Microwave Switch With Suspended CMOS-Compatible Coplanar Waveguides
Jen-Yi Chen, Long-Sun Huang, Chia-Hua Chu, I-Yin Li, Yao-Hui Kuo, Peizen Chang
IMECE 2001; 65-69https://doi.org/10.1115/IMECE2001/MEMS-23809
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Topics: Complementary metal oxide semiconductors , Manufacturing , Microelectromechanical systems , Microwaves , Switches , Waveguides , Microassembling , Micromachining , Resonance , Transmission lines
Micromechanical Clamps for Optical Fiber Packaging of High Aspect Ratio MEMS Devices
Michael A. Beamesderfer, Ed Litcher, Don L. DeVoe
IMECE 2001; 71-75https://doi.org/10.1115/IMECE2001/MEMS-23810
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Topics: Microelectromechanical systems , Optical fiber , Packaging , Clamps (Tools) , Fibers , Design , Nickel , Silicon , Cantilever beams , Cantilevers

MEMS Applications — I

Tunable Phase Grating Using CMOS Processes
Yu-Sheng Yang, Cheng-Hsien Liu, Bruce C. S. Chou
IMECE 2001; 77-82https://doi.org/10.1115/IMECE2001/MEMS-23811
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Topics: Complementary metal oxide semiconductors , Diffraction gratings , Microelectromechanical systems , Design , Aluminum , Dry etching , Electrodes , Electrostatic actuators , Modeling , Reactive-ion etching
A Magnetically Actuated, Electrostatically Clamped High Current MEMS Switch
Yoonsu Choi, Kieun Kim, Mark G. Allen
IMECE 2001; 83-87https://doi.org/10.1115/IMECE2001/MEMS-23812
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Topics: Microelectromechanical systems , Switches , Magnetic fields , Currents , Electrodes , Transients (Dynamics)
A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation
Huikai Xie, Yingtian Pan, Gary K. Fedder
IMECE 2001; 89-92https://doi.org/10.1115/IMECE2001/MEMS-23813
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Topics: Complementary metal oxide semiconductors , Microelectromechanical systems , Mirrors , Silicon , Aluminum , Bonding , Capacitance , Capacitors , Crystals , Displacement
Development and Testing of a Planar, Silicon Mini-Capillary Pumped Loop
Kenneth Pettigrew, Brian Smith, Kirk Yerkes, Carol Gamlen, Dorian Liepmann
IMECE 2001; 93-98https://doi.org/10.1115/IMECE2001/MEMS-23814
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Topics: Microelectromechanical systems , Silicon , Testing , Condensers (steam plant) , Temperature , Heat , Reservoirs , Cooling , Design , Dynamics (Mechanics)
Processing of Ceramic Tapes Into 3-D Shells and its Application to a Small Spherical Stepper Motor
Jun Li, G. K. Ananthasuresh
IMECE 2001; 99-105https://doi.org/10.1115/IMECE2001/MEMS-23815
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Topics: Ceramics , Microelectromechanical systems , Shells , Stepper motors , Packaging , Degrees of freedom , Low temperature , Manufacturing , Pipes

Microsensors and Microactuators

Actuation of MEMS by Light: An Optical Actuator
Marc Sulfridge, Taher Saif, Norman Miller, Keith O’Hara
IMECE 2001; 107-113https://doi.org/10.1115/IMECE2001/MEMS-23816
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Topics: Actuators , Microelectromechanical systems , Heat transfer , Momentum , Radiation pressure , Speed of light , Vacuum
Pirani Pressure Sensor With Distributed Temperature Sensing
J. J. van Baar, R. J. Wiegerink, T. S. J. Lammerink, G. J. M. Krijnen, M. Elwenspoek
IMECE 2001; 115-122https://doi.org/10.1115/IMECE2001/MEMS-23817
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Topics: Microelectromechanical systems , Pressure sensors , Temperature , Microbeams , Pressure , Temperature distribution , Thermal conductivity , Heat losses , Heat sinks , Resistors
Multiplexed Detection of Nanoscale Microcantilever Deflections for High-Throughput Biomolecular Analysis
Chris Dames, Guanghua Wu, Henry Lin, Aran Majumdar
IMECE 2001; 123-130https://doi.org/10.1115/IMECE2001/MEMS-23818
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Topics: Deflection , Microcantilevers , Microelectromechanical systems , Nanoscale phenomena , Stress
3 KHz Servo Bandwidth Demonstration by HDD Tracking Microactuator
Toshiki Hirano, Matthew White, Xin H. Yang, Tetsuo Semba, Victor Shum, Surya Pattanaik, Satya Arya, Dan Kercher, Long-Sheng Fan
IMECE 2001; 131-134https://doi.org/10.1115/IMECE2001/MEMS-23819
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Topics: Horizontal directional drilling , Microactuators , Microelectromechanical systems , Servomechanisms , Errors , Closed loop systems , Microscale devices , Signals , Simulation , Solders

Micro-Thermomechanical Devices and Microscale Heat Transfer

Microscale Liquid Impingement Cooling
Lian Zhang, Evelyn N. Wang, Jon D. Koch, Jonathan T. C. Liu, Jae-Mo Koo, Linan Jiang, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny
IMECE 2001; 135-140https://doi.org/10.1115/IMECE2001/MEMS-23820
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Topics: Impingement cooling , Microelectromechanical systems , Microscale devices , Jets , Water , Computer cooling , Flow (Dynamics) , Heat flux , Heat transfer coefficients , Orifices
Surface Micromachined Electrothermal V-Beam Micromotors
David S. Schreiber, Wei-Jen Cheng, John M. Maloney, Don L. DeVoe
IMECE 2001; 141-147https://doi.org/10.1115/IMECE2001/MEMS-23821
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Topics: Microelectromechanical systems , Micromachining , Micromotors , Microactuators , Displacement , Engine design , Engines , Motors , Polysilicon , Reliability
Stress Relaxation of Gold/Polysilicon Layered MEMS Microstructures Subjected to Thermal Loading
Yanhang Zhang, Martin L. Dunn
IMECE 2001; 149-156https://doi.org/10.1115/IMECE2001/MEMS-23822
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Topics: Microelectromechanical systems , Polysilicon , Relaxation (Physics) , Stress , Temperature , Cooling , Creep , Cycles , Deformation , Microelectronic devices
A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers
James W. Rogers, Thomas J. Mackin, Leslie M. Phinney
IMECE 2001; 157-165https://doi.org/10.1115/IMECE2001/MEMS-23823
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Topics: Adhesion , Microcantilevers , Microelectromechanical systems , Thermomechanics , Lasers , Fracture (Materials) , Irradiation (Radiation exposure) , Stiction , Fracture mechanics , Heating
Omnidirectional Walking Microrobot Realized by Thermal Microactuator Arrays
Matthew H. Mohebbi, Mason L. Terry, Karl F. Böhringer, Gregory T. A. Kovacs, John W. Suh
IMECE 2001; 167-173https://doi.org/10.1115/IMECE2001/MEMS-23824
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Topics: Actuators , Microactuators , Microelectromechanical systems , Degrees of freedom , Micromanipulation

MEMS Device Design and Fabrication

Design of MEMS Resonators for Tuning With Selective Polysilicon Deposition
Daphne Joachim, Liwei Lin
IMECE 2001; 175-180https://doi.org/10.1115/IMECE2001/MEMS-23825
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Topics: Design , Microelectromechanical systems , Polysilicon , Electromagnetic scattering , Engineering simulation , Finite element analysis , Manufacturing , Micromachining , Resonance , Rotors
Design and Simulation of Shaped Comb Fingers for Compensation of Mechanical Restoring Force in Tunable Resonators
Brian D. Jensen, Senol Mutlu, Sam Miller, Katsuo Kurabayashi, James J. Allen
IMECE 2001; 181-184https://doi.org/10.1115/IMECE2001/MEMS-23826
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Topics: Design , Microelectromechanical systems , Simulation , Actuators , Accelerometers , Blocks (Building materials) , Filters , Oscillations , Plates (structures) , Polysilicon
Design and Fabrication of High Power Electromagnetic Microactuator With Perpendicular Magnetic Anisotropy
C. T. Pan, S.-C. Shen, H.-P. Chou
IMECE 2001; 185-190https://doi.org/10.1115/IMECE2001/MEMS-23827
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Topics: Ablation (Vaporization technology) , Anisotropy , Design , Excimer lasers , Manufacturing , Microactuators , Microelectromechanical systems
Design of Deformable Focusing Micromirrors
Hanchee Yen, Chimin Lee, Rongshun Chen, Meng-Ju Lin
IMECE 2001; 191-197https://doi.org/10.1115/IMECE2001/MEMS-23828
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Topics: Design , Microelectromechanical systems , Mirrors , Warping , Deformation , Engineering simulation , Metals , Micromachining , Optical instruments , Shapes

Mechanics and Dynamics of MEMS

Novel Bulk Acoustic Wave Hammer to Determinate the Dynamic Response of Microstructures Using Pulsed Broad Bandwidth Ultrasonic Transducers
Wen-Pin Lai, Yi-Ping Ho, Weileun Fang
IMECE 2001; 199-206https://doi.org/10.1115/IMECE2001/MEMS-23829
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Topics: Acoustics , Dynamic response , Hammers , Microelectromechanical systems , Ultrasonic transducers , Waves , Damping , Excitation , Microbeams , Mode shapes
Splitting a Liquid Droplet for Electrowetting-Based Microfluidics
Sung Kwon Cho, Hyejin Moon, Jesse Fowler, Chang-Jin “CJ” Kim
IMECE 2001; 207-213https://doi.org/10.1115/IMECE2001/MEMS-23830
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Topics: Drops , Microelectromechanical systems , Microfluidics
Resistance of Liquid Metal Droplets Against Actuation on Microstructured Surfaces
Wenjiang Shen, Joonwon Kim, Chang-Jin “CJ” Kim
IMECE 2001; 215-220https://doi.org/10.1115/IMECE2001/MEMS-23831
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Topics: Drops , Liquid metals , Microelectromechanical systems
Operating Frequency of Thin Film NiTi in Fluid Media
Daniel D. Shin, Gregory P. Carman
IMECE 2001; 221-227https://doi.org/10.1115/IMECE2001/MEMS-23832
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Topics: Fluids , Microelectromechanical systems , Nickel titanium alloys , Thin films

MEMS Applications — II

MEMS Metrology Using Resonant Structures
A. Miller Allen, George C. Johnson
IMECE 2001; 229-231https://doi.org/10.1115/IMECE2001/MEMS-23833
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Topics: Metrology , Microelectromechanical systems , Resonance , Geometry , Materials properties , Micromachining
Building a ‘Design-to-Analysis’ Interface for Summit™-Based Microsystem Development
C. Channy Wong, Craig R. Jorgensen, Victor R. Yarberry, Pauline Ho, Roger P. Pawlowski, James Freymiller, Darryl J. Melander
IMECE 2001; 233-240https://doi.org/10.1115/IMECE2001/MEMS-23834
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Topics: Design , Microelectromechanical systems , Micromachining , Modeling
Mechanical Characterization and Controlled Manipulation of Micro Objects Using Vision-Based Techniques and Compliant Devices
Xiaoye Wang, James P. Ostrowski, G. K. Ananthasuresh
IMECE 2001; 241-249https://doi.org/10.1115/IMECE2001/MEMS-23835
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Topics: Computation , Damage , Deflection , Deformation , Displacement measurement , Errors , Force control , Force measurement , Geometry , Materials properties
Two-Dimension Shape Measurement System for MEMS Using Micro-Fizeau Interferometer and its Applications
Yasuhiko Arai, Shunsuke Yokozeki, Seiji Aoyagi, Astunobu Mori
IMECE 2001; 251-257https://doi.org/10.1115/IMECE2001/MEMS-23836
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Topics: Dimensions , Interferometers , Measurement systems , Microelectromechanical systems , Shapes , Optical measurement , Computer simulation , Deformation , Dynamics (Mechanics) , Laser beams
A Novel Testing Apparatus for Tribological Studies at the Small Scale
Brian P. Gearing, Lallit Anand
IMECE 2001; 259-263https://doi.org/10.1115/IMECE2001/MEMS-23837
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Topics: Microelectromechanical systems , Testing , Tribology , Bending (Stress) , Compression , Shear (Mechanics)

MEMS for Aerospace Applications

Achieving Close Frequency Match Without Incurring Instabilities in Micro Gyros
J. D. Haney, Z. C. Feng
IMECE 2001; 265-269https://doi.org/10.1115/IMECE2001/MEMS-23838
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Topics: Microelectromechanical systems , Resonance , Damping , Equations of motion , Nonlinear dynamics , Oscillations , Sensors , Structural design
Micro-Isolation Valve for Fuel Tank Array
Koji Takahashi, Kunihito Nagayama, Tetsuo Yasaka, Tanemasa Asano
IMECE 2001; 271-276https://doi.org/10.1115/IMECE2001/MEMS-23839
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Topics: Fuel storage , Microelectromechanical systems , Valves , Breakdown (Electricity) , Electrodes , High pressure (Physics) , Membranes , Pressure
A Novel Attitude Control Technique for Miniature Spacecraft
Jun Li, Sung K. Koh, G. K. Ananthasuresh, P. S. Ayyaswamy, S. Ananthakrishnan
IMECE 2001; 277-280https://doi.org/10.1115/IMECE2001/MEMS-23840
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Topics: Microelectromechanical systems , Space vehicles , Microactuators , Actuators , Torque
A Piezoresistive Microphone for Aeroacoustic Measurements
David P. Arnold, Sridhar Gururaj, Sunil Bhardwaj, Toshikazu Nishida, Mark Sheplak
IMECE 2001; 281-288https://doi.org/10.1115/IMECE2001/MEMS-23841
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Topics: Microelectromechanical systems , Microphones , Noise (Sound) , Piezoresistors

MEMS/FED Poster Session

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon
John M. Maloney, David S. Schreiber, Don L. DeVoe
IMECE 2001; 289-296https://doi.org/10.1115/IMECE2001/MEMS-23842
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Topics: Crystals , Microelectromechanical systems , Micromotors , Reactive-ion etching , Silicon , Motors , Actuators , Silicon-on-insulator , Clamps (Tools) , Compliant mechanisms
Modeling and Optimization of a High Sensitivity Out-of-Plane Microgyroscope
Shifeng Li, Shaochen Chen
IMECE 2001; 297-302https://doi.org/10.1115/IMECE2001/MEMS-23843
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Topics: Microelectromechanical systems , Microgyroscopes , Modeling , Optimization , Design , Dynamic models , Finite element methods , Finite element model , Mode shapes , Topology
Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors
Frederick F. Rosenberger, III, David S. Schreiber, Don L. DeVoe
IMECE 2001; 303-309https://doi.org/10.1115/IMECE2001/MEMS-23844
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Topics: Fibers , Interferometers , Microelectromechanical systems , Micromachining , Strain sensors , Design , Mirrors , Cavities , Micromotors , Optical fiber
Development of a Program for Predicting Residual Stress Distribution in Multi-Stacked Film
Hyeon Chang Choi, Jun Hyub Park, Yong Soo Park
IMECE 2001; 311-317https://doi.org/10.1115/IMECE2001/MEMS-23845
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Topics: Microelectromechanical systems , Stress concentration , Finite element methods , Semiconductor wafers , Deflection , Stress , Cantilever beams , Finite element analysis , Microcantilevers , Micromachining
Through-Wafer Electrical Interconnects for MEMS Sensors
Venkataraman Chandrasekaran, Eugene M. Chow, Thomas W. Kenny, Toshikazu Nishida, Mark Sheplak
IMECE 2001; 319-324https://doi.org/10.1115/IMECE2001/MEMS-23846
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Topics: Microelectromechanical systems , Semiconductor wafers , Sensors , Capacitance , Manufacturing , Noise (Sound) , Polysilicon , Silicon , Boron , Heat conduction
Selective Chemical Liquid Deposition for Fabrication of Mini-Structures and Microsystems
Jack G. Zhou, Feng Wang
IMECE 2001; 325-332https://doi.org/10.1115/IMECE2001/MEMS-23847
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Topics: Manufacturing , Microelectromechanical systems
A Large-Angle and Large-Mirror Microscanner Based on Thermal Actuators
Ching-Chen Tu, Cheng-Hsien Liu, Chen-Hsun Du, Jiunn-jye Tsaur, Chengkuo Lee
IMECE 2001; 333-338https://doi.org/10.1115/IMECE2001/MEMS-23848
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Topics: Actuators , Microelectromechanical systems , Mirrors
Analysis of a Natural Frequency Tracking System for MEMS Fatigue Testing
Xiaotian Sun, Roberto Horowitz, Kyriakos Komvopoulos
IMECE 2001; 339-344https://doi.org/10.1115/IMECE2001/MEMS-23849
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Topics: Fatigue testing , Microelectromechanical systems , Control systems , Fatigue damage , Nonlinear control systems , Resonance , Simulation results , Stability , Theoretical analysis
Metal-Induced Laterally Crystallized Polycrystalline Silicon for Micro-Systems: Mechanical and Etching Characteristics
Mingxiang Wang, Wan Lap Yeung, Yitshak Zohar, Man Wong
IMECE 2001; 345-349https://doi.org/10.1115/IMECE2001/MEMS-23850
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Topics: Etching , Metals , Microelectromechanical systems , Polysilicon , Electrical properties , Grain boundaries , Pressure , Vapors
Characterizing the Poisson’s Ratio of Thin Films Using Resonance Method
Hsin-Chang Tsai, Wen-Pin Lai, Weileun Fang
IMECE 2001; 351-355https://doi.org/10.1115/IMECE2001/MEMS-23851
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Topics: Microelectromechanical systems , Poisson ratio , Resonance , Thin films , Cantilevers , Micromachining , Silicon , Errors , Film thickness , Vibration
Design Optimization of a Fully-Compliant Bistable Micro-Mechanism
Brian D. Jensen, Matthew B. Parkinson, Katsuo Kurabayashi, Larry L. Howell, Michael S. Baker
IMECE 2001; 357-363https://doi.org/10.1115/IMECE2001/MEMS-23852
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Topics: Design , Microelectromechanical systems , Micromechanical devices , Optimization , Finite element analysis
Fabrication of Micropipes for Optical Interconnects Using Electroless Processes
Yu-Ting Cheng, Carlos Sambucetti, K. S. Teh
IMECE 2001; 365-369https://doi.org/10.1115/IMECE2001/MEMS-23853
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Topics: Electroless plating , Manufacturing , Microelectromechanical systems , Optical fiber , Optical interconnections , Switches , Fibers , Glass , Mass production , Nickel
A Novel Testing Machine for Characterization of Materials for MEMS Applications
Sauri Gudlavalleti, Lallit Anand
IMECE 2001; 371-376https://doi.org/10.1115/IMECE2001/MEMS-23854
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Topics: Machinery , Materials characterization , Microelectromechanical systems , Testing , Thin films , Displacement , Aluminum , Copper foil , Fibers , Force measurement
Effects of Stress Induced by the Underlying Layers on the Micro-Structures and Characteristic Phase Transformation Temperatures of Sputtered TiNi Thin Films
Rong Xin Wang, Yitshak Zohar, Man Wong
IMECE 2001; 377-381https://doi.org/10.1115/IMECE2001/MEMS-23855
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Topics: Microelectromechanical systems , Phase transitions , Stress , Temperature , Thin films , Nickel , Shape memory alloys , Titanium
Calibration of MEMS Strain Sensors Fabricated on Silicon
Li Cao, Chuck Hautamaki, Jia Zhou, Tae Song Kim, Sue Mantell
IMECE 2001; 383-390https://doi.org/10.1115/IMECE2001/MEMS-23856
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Topics: Calibration , Microelectromechanical systems , Silicon , Strain sensors , Sensors , Semiconductor wafers , Gages , Aluminum , Adhesives , Dimensions
Piezoelectric Bimorph Microphone With Serial Electrical Connection
Seung Hwan Yi, Eun Sok Kim
IMECE 2001; 391-396https://doi.org/10.1115/IMECE2001/MEMS-23857
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Topics: Microelectromechanical systems , Microphones
Creation of Nanometer-Sized Features in Polysilicon Using Fusing
Jeremy A. Levitan, Dan Good, Michael J. Sinclair, Joseph M. Jacobson
IMECE 2001; 397-402https://doi.org/10.1115/IMECE2001/MEMS-23858
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Topics: Microelectromechanical systems , Polysilicon , Microfabrication , Manufacturing , Resolution (Optics) , Dimensions , Electrons , Lithography , Melting , Semiconductors (Materials)
A Precision Alignment Method to <100> Direction on (110) Silicon Wafer
Fan-Gang Tseng, Kai-Chen Chang
IMECE 2001; 403-406https://doi.org/10.1115/IMECE2001/MEMS-23859
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Topics: Microelectromechanical systems , Semiconductor wafers , Etching , Corners (Structural elements) , Crystal structure , Shapes
Enhanced Copper Microplating Using High Frequency Acoustic Streaming
Ahmed A. Busnaina, V. Reynolds, Ian Suni, T. Way, C. S. Tiwari, M. Nakoski, Hong Lin
IMECE 2001; 407-410https://doi.org/10.1115/IMECE2001/MEMS-23860
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Topics: Acoustics , Copper , Electroplating , Microelectromechanical systems
Friction and Tribological Considerations for Nanometer Range Machining
Som Chattopadhyay
IMECE 2001; 411-417https://doi.org/10.1115/IMECE2001/MEMS-23861
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Topics: Friction , Machining , Microelectromechanical systems , Tribology , Deformation
Surface Micro-Machined Mirrors Using Simple Floating and Fixed Hinge Designs for Three-Layer Process
Alpha Mahatvaraj, Nirav D. Vora, Jimmy Bush, Glenn Cunningham, Joseph J. Biernacki, Jeffrey Frolik
IMECE 2001; 419-426https://doi.org/10.1115/IMECE2001/MEMS-23862
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Topics: Hinges , Microelectromechanical systems , Micromachining , Mirrors , Stress , Lasers , Manufacturing , Engineering simulation , Fibers , Geometry
Deep Reactive Ion Etched Submicron Beam/Trench Characterization
Gary O’Brien, Xing Cheng, L. J. Guo
IMECE 2001; 427-431https://doi.org/10.1115/IMECE2001/MEMS-23863
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Topics: Chemistry , Cycles , Etching , Lithography , Microelectromechanical systems , Plasmas (Ionized gases) , Reactive-ion etching , Semiconductor wafers , Silicon
The Knudsen Compressor As an Energy Efficient Micro-Scale Vacuum Pump
M. Young, S. Vargo, G. Shiflett, E. P. Muntz, Amanda Green
IMECE 2001; 433-441https://doi.org/10.1115/IMECE2001/MEMS-23864
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Topics: Compressors , Energy efficiency , Microelectromechanical systems , Microscale devices , Vacuum pumps , Pressure , Design , Flow (Dynamics) , Transpiration , Cascades (Fluid dynamics)
Temperature-Dependent Property Effects on Laminar Flow Characteristics in a Rectangular Microchannel
Ho Joon Park, Sang Young Son, Mun Cheol Choi, Geunbae Lim, In-Seob Song, James Jungho Pak
IMECE 2001; 443-448https://doi.org/10.1115/IMECE2001/MEMS-23865
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Topics: Laminar flow , Microchannels , Microelectromechanical systems , Temperature , Flow (Dynamics) , Fluids , Pressure drop , Resistance thermometers , Dimensions , Heat flux
Experimental Study on Roughness Effect for Laminar Micro-Channel Gas Flow
Jih-Hsing Tu, Fangang Tseng, Ching-Chang Chieng
IMECE 2001; 449-454https://doi.org/10.1115/IMECE2001/MEMS-23866
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Topics: Friction , Gas flow , Microchannels , Microelectromechanical systems , Surface roughness
Analysis of Time Periodic Electroosmotic Flows
Prashanta Dutta, Ali Beskok
IMECE 2001; 455-461https://doi.org/10.1115/IMECE2001/MEMS-23867
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Topics: Electroosmosis , Microelectromechanical systems , Flow (Dynamics) , Electric fields , Boundary-value problems , Excitation , Flat plates , Kinematics , Oscillations , Physics
The Resonant Micro Fan for Fluidic Transport, Mixing and Particle Filtering
Ryan J. Linderman, Subham Sett, Victor M. Bright
IMECE 2001; 463-470https://doi.org/10.1115/IMECE2001/MEMS-23868
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Topics: Microelectromechanical systems , Particle filtering (numerical methods) , Resonance , Fans , Flow (Dynamics) , Flow visualization , Particulate matter , Ceilings , Channel flow , Deflection
Design and Fabrication of a Cellular Motor Driven Micro Fluidic System
Jedediah J. Young, Chuen-Cheak Lee, Ajay P. Malshe, Steve Tung, Michael D. Manson
IMECE 2001; 471-477https://doi.org/10.1115/IMECE2001/MEMS-23869
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Topics: Design , Manufacturing , Microchannels , Microelectromechanical systems , Motors
The Fabrication and Test of a Phase-Change Micropump
Hyeun Joong Yoon, Woo Young Sim, Sang Sik Yang
IMECE 2001; 479-484https://doi.org/10.1115/IMECE2001/MEMS-23870
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Topics: Manufacturing , Microelectromechanical systems , Micropumps , Valves , Flow (Dynamics) , Actuators , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Fluids , Aluminum
Development of an Ejector-Driven Micro-Vacuum Pump
C. Channy Wong, Daniel P. Aeschliman, John F. Henfling, Jeffry J. Sniegowski, M. Steve Rodgers
IMECE 2001; 485-493https://doi.org/10.1115/IMECE2001/MEMS-23871
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Topics: Ejectors , Microelectromechanical systems , Pumps , Vacuum , Instrumentation , Energy consumption , Hardware , Microfluidics , Micropumps , Microscale devices
A Review of Laminar Single-Phase Flow in Microchannels
Ian Papautsky, Tim Ameel, A. Bruno Frazier
IMECE 2001; 495-503https://doi.org/10.1115/IMECE2001/MEMS-23872
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Topics: Flow (Dynamics) , Microchannels , Microelectromechanical systems , Microscale devices , Microfluidics , Fluid dynamics , Fluids , Internal flow
Numerical Simulation of Gas Flows in Micro-Filters
Imtiaz Ahmed, Ali Beskok
IMECE 2001; 505-513https://doi.org/10.1115/IMECE2001/MEMS-23873
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Topics: Computer simulation , Filters , Gas flow , Microelectromechanical systems , Flow (Dynamics) , Mach number , Boundary-value problems , Compressibility , Density , Engineering simulation
Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design
Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching-Jen Chen
IMECE 2001; 515-518https://doi.org/10.1115/IMECE2001/MEMS-23874
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Topics: Design , Microelectromechanical systems , Micromachining , Planetary gears , Pumps , Gears , Microgears , Polysilicon , Roller bearings , Rotation
Assessment of Viscous Flows in High-Speed Micro Rotating Machinery for Energy Conversion Applications
Luc G. Fréchette
IMECE 2001; 519-530https://doi.org/10.1115/IMECE2001/MEMS-23875
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Topics: Energy conversion , Flow (Dynamics) , Machinery , Microelectromechanical systems , Rotors , Shear flow , Design , Viscous flow , Centrifugal force , Disks
Impact of Pumping Surface Separation Distance on Micromachined Silicon Electroosmotic Pump Performance
Daniel J. Laser, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny
IMECE 2001; 531-535https://doi.org/10.1115/IMECE2001/MEMS-23876
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Topics: Microelectromechanical systems , Micromachining , Pumps , Separation (Technology) , Silicon , Micropumps , Design , Electrical measurement , Energy consumption , Engineering prototypes

Microfluidics

Microflows With Particles and Bubbles

A Fast Algorithm for Particulate Micro-Flows in Complex Geometries
D. Liu, M. Maxey, G. E. Karniadakis
IMECE 2001; 539-546https://doi.org/10.1115/IMECE2001/MEMS-23877
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Topics: Algorithms , Flow (Dynamics) , Microelectromechanical systems , Particulate matter , Computer simulation , Creeping flow , Resolution (Optics) , Reynolds number
Operational Limits of Suspension Flows Through Sudden Contractions
Boris Stoeber, Eddie Español, Dorian Liepmann
IMECE 2001; 547-552https://doi.org/10.1115/IMECE2001/MEMS-23878
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Topics: Flow (Dynamics) , Microelectromechanical systems , Particulate matter , Dimensional analysis , Fluid mechanics , Fluids , Microfluidics , Particle size , Shear (Mechanics) , Shear rate
Shear-Induced Arching of Particle-Laden Flows in Microtubes
Kendra V. Sharp, Ronald J. Adrian
IMECE 2001; 553-557https://doi.org/10.1115/IMECE2001/MEMS-23879
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Topics: Flow (Dynamics) , Microelectromechanical systems , Particulate matter , Shear (Mechanics)
A Sub-Millimeter Solenoid Device for Trapping Paramagnetic Microbeads
Luis D. García, Lawrence C. Cheung, James C. Mikkelsen, Jr., Juan G. Santiago, Anthony F. Bernhardt, Vincent Malba
IMECE 2001; 559-566https://doi.org/10.1115/IMECE2001/MEMS-23880
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Topics: Microelectromechanical systems , Solenoids , Chain , Design , Separation (Technology) , Dipoles (Electromagnetism) , Flow (Dynamics) , Magnetic fields , Copper , Drag (Fluid dynamics)
Two-Phase Flow Boiling in a Microchannel Heat Sink
Man Lee, Yiu Yan Wong, Man Wong, Yitshak Zohar
IMECE 2001; 567-573https://doi.org/10.1115/IMECE2001/MEMS-23881
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Topics: Boiling , Heat sinks , Microchannels , Microelectromechanical systems , Two-phase flow , Semiconductor wafers , Temperature , Vapors , Bubbles , Glass

Instabilities and Unsteady Phenomena in Microflows

An Electrokinetic Instability Micromixer
Michael H. Oddy, Juan G. Santiago, James C. Mikkelsen
IMECE 2001; 575-580https://doi.org/10.1115/IMECE2001/MEMS-23882
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Topics: Electrokinetics , Microelectromechanical systems , Electric fields , Flow (Dynamics) , Density , Design , Flow instability , Fluorescence , Manufacturing , Microchannels
Instability Modes of Two-Phase Flows in a Mixing-Layer Microdevice
Tak For Yu, Sylvanus Yuk Kwan Lee, Yitshak Zohar, Man Wong
IMECE 2001; 581-586https://doi.org/10.1115/IMECE2001/MEMS-23883
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Topics: Microelectromechanical systems , Two-phase flow , Flow (Dynamics) , Gas flow , Microchannels , Pressure , Microscale devices , Biomedicine , Flow visualization , Fluid dynamics
A Case for Magneto Hydro Dynamics (MHD)
Haim H. Bau
IMECE 2001; 587-594https://doi.org/10.1115/IMECE2001/MEMS-23884
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Topics: Dynamics (Mechanics) , Magnetohydrodynamics , Microelectromechanical systems , Flow (Dynamics) , Electrodes , Fluids , Actuators , Magnetic fields , Electric current , Electric fields
Dynamics of Field Amplified Sample Stacking
Rajiv Bharadwaj, Juan G. Santiago
IMECE 2001; 595-602https://doi.org/10.1115/IMECE2001/MEMS-23885
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Topics: Dynamics (Mechanics) , Electric fields , Electrodiffusion , Electroosmosis , Fluids , Glass , Microchannels , Microelectromechanical systems , Polishing equipment , Pressure
Design of a Microfin Array Heat Sink Using Flow-Induced Vibration to Enhance the Heat Transfer Rate in the Laminar Flow Regime
Jeung Sang Go, Geunbae Lim, Hayong Yun, Sung Jin Kim, Inseob Song
IMECE 2001; 603-609https://doi.org/10.1115/IMECE2001/MEMS-23886
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Topics: Design , Flow-induced vibrations , Heat sinks , Heat transfer , Laminar flow , Microelectromechanical systems , Displacement , Flow sensors , Heat , Numerical analysis

Molecular Effects and Micro-Biofluidics

Liquid Transport Properties in Sub-Micron Channel Flows
K. Johan A. Westin, Kenneth S. Breuer, Chang-Hwan Choi, Peter Huang, Zhiqiang Cao, Bruce Caswell, Peter D. Richardson, Merwin Sibulkin
IMECE 2001; 611-618https://doi.org/10.1115/IMECE2001/MEMS-23887
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Topics: Channel flow , Microelectromechanical systems , Flow (Dynamics) , Fluids , Microchannels , Silicon , Boundary-value problems , Ethanol , Lasers , Pressure
Ratcheting Electrophoresis Microchip (REM) for Programmable Transport and Separation of Macromolecules
T. Ohara, A. Majumdar
IMECE 2001; 619-628https://doi.org/10.1115/IMECE2001/MEMS-23888
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Topics: Electrophoresis , Integrated circuits , Macromolecules , Microelectromechanical systems , Separation (Technology)
Thermal Transpiration As a Co-Located Micro-Scale Source of High Pressure Gas for MEMS Devices
M. Young, G. Shiflett, E. P. Muntz, S. Vargo
IMECE 2001; 629-638https://doi.org/10.1115/IMECE2001/MEMS-23889
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Topics: High pressure (Physics) , Microelectromechanical systems , Microscale devices , Transpiration , Compressors , Pressure , Flow (Dynamics) , Actuators , Design , Dimensions

Novel Microfluidic Devices

A Large Flowrate Electroosmotic Pump With Micron Pores
Shuhuai Yao, David Huber, James C. Mikkelsen, Juan G. Santiago
IMECE 2001; 639-645https://doi.org/10.1115/IMECE2001/MEMS-23890
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Topics: Microelectromechanical systems , Pumps , Flow (Dynamics) , Cylinders , Design , Electroosmosis , Engineering prototypes , Filters , Fluids , Glass
Micropump Design for Optimum Pressure/Flow Characteristics
Brian E. Williams, Fred K. Forster
IMECE 2001; 647-655https://doi.org/10.1115/IMECE2001/MEMS-23891
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Topics: Design , Flow (Dynamics) , Microelectromechanical systems , Micropumps , Pressure , Pumps , Valves , Membranes , Stress , Algorithms
A Pressure-Controlled Torsion-Type Check Microvalve
Chien-Chong Hong, Sang-Mae Lee, Chong H. Ahn, Matthew Nielsen, Keith McManus
IMECE 2001; 657-662https://doi.org/10.1115/IMECE2001/MEMS-23892
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Topics: Microelectromechanical systems , Pressure , Torsion , High pressure (Physics) , Engineering simulation , Nickel , Propulsion systems , Simulation , Ultraviolet radiation , Valves
High-Impulse Digital Microthrusters Using Low-Boiling-Temperature Liquid Propellant With High-Viscosity Fluid Plug
Tae Goo Kang, Sang Wook Kim, Young-Ho Cho
IMECE 2001; 663-667https://doi.org/10.1115/IMECE2001/MEMS-23893
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Topics: Boiling , Fluids , Impulse (Physics) , Microelectromechanical systems , Propellants , Temperature , Viscosity , Micromachining , Pressure

Advanced Microfluidic Diagnostics

Pt Heater/Sensor Microarray for Distributed Fluidic Cooling Assessment
Yong-Kyu Yoon, Mark G. Allen
IMECE 2001; 669-675https://doi.org/10.1115/IMECE2001/MEMS-23894
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Topics: Cooling , Microelectromechanical systems , Sensors , Temperature , Heating , Lasers , Platinum , Cavities , Design , Heat
Electroosmotic Flow in a Grooved Micro-Channel Configuration: A Comparative Study of μ-PIV Measurements and Numerical Simulations
Prashanta Dutta, Min Jun Kim, Kenneth D. Kihm, Ali Beskok
IMECE 2001; 677-683https://doi.org/10.1115/IMECE2001/MEMS-23895
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Topics: Computer simulation , Electroosmosis , Microchannels , Microelectromechanical systems , Algorithms , Flow (Dynamics) , Fluorescence , Geometry , Microscale devices , Navier-Stokes equations
Velocity Measurements of Flow Over Hydrophobic Microchannel Walls
Derek C. Tretheway, Carl D. Meinhart
IMECE 2001; 685-689https://doi.org/10.1115/IMECE2001/MEMS-23896
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Topics: Flow (Dynamics) , Microchannels , Microelectromechanical systems , Velocity measurement , Boundary-value problems , Fluids , Fluid dynamics , Microscale devices , Modeling , Particulate matter
Infrared Diagnostics for the Measurement of Fluid and Solid Motion in Micromachined Devices
Kenneth S. Breuer, James C. Bird, Gengxin Han, K. Johan A. Westin
IMECE 2001; 691-698https://doi.org/10.1115/IMECE2001/MEMS-23897
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Topics: Flight , Fluid measurement , Fluids , Microelectromechanical systems , Microfabrication , Micromachining , Particulate matter , Silicon , Visible spectrum , Wavelength
Molecular Tagging Velocimetry Measurements in Supersonic Micro Jets
Walter R. Lempert, Naibo Jiang, Subin Sethuram, Mo Samimy
IMECE 2001; 699-704https://doi.org/10.1115/IMECE2001/MEMS-23898
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Topics: Jets , Microelectromechanical systems , Flow (Dynamics) , Pressure , Air flow , Dimensions , Emissions , Nitrogen , Nozzles , Resolution (Optics)

MEMS Packaging

Zinc Bonding for MEMS Packaging at the Wafer-Level
Ki Bang Lee, Liwei Lin
IMECE 2001; 707-710https://doi.org/10.1115/IMECE2001/MEMS-23899
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Topics: Bonding , MEMS packaging , Microelectromechanical systems , Semiconductor wafers , Nickel , Cavities , Fracture (Materials) , Fracture (Process) , Fracture toughness , Manufacturing
MEMS, MOEMS and Optoelectronics
Ken Gilleo
IMECE 2001; 711-718https://doi.org/10.1115/IMECE2001/MEMS-23900
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Topics: Microelectromechanical systems , Microoptoelectromechanical systems , Optoelectronic devices , Airbags , Electronics , Optics , Sensors , Switches , Accelerometers , Copper
Low Temperature Eutectic Bonding for In-Plane Type Micro Thermoelectric Cooler
Da-Jeng Yao, Gang Chen, Chang-Jin “CJ” Kim
IMECE 2001; 719-722https://doi.org/10.1115/IMECE2001/MEMS-23901
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Topics: Bonding , Low temperature , Microelectromechanical systems , Thermoelectric coolers , Cooling , Manufacturing , Microbeams , Silicon , Flow (Dynamics) , High temperature
Precision Alignment Packaging for Microsystems With Multiple Fluid Connections
Paul Galambos, Gilbert L. Benavides, Murat Okandan, Mark W. Jenkins, Dale Hetherington
IMECE 2001; 723-730https://doi.org/10.1115/IMECE2001/MEMS-23902
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Topics: Fluids , Microelectromechanical systems , Packaging , Microfluidics , Adhesives , Electronic packaging , Flip-chip , Flip-chip devices , Flow (Dynamics) , Leakage
Solder-Assembled MEMS Flaps to Enhance Fluid Mixing
Zhichun Ma, T. Peacock, E. Bradley, Y. C. Lee
IMECE 2001; 731-737https://doi.org/10.1115/IMECE2001/MEMS-23903
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Topics: Fluids , Microelectromechanical systems , Solders , Deflection , Manufacturing , Design , Actuators , Ceramics , Computer simulation , Corners (Structural elements)
Laser Micromachining of MEMS Packaging Materials
Vijay V. Kancharla, Kira K. Hendricks, Shaochen Chen
IMECE 2001; 739-743https://doi.org/10.1115/IMECE2001/MEMS-23904
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Topics: Lasers , MEMS packaging , Microelectromechanical systems , Micromachining , Silicon , Ceramics , Manufacturing , Polymers , Capacitance , Corrosion resistance
Micromachined Flexible Interconnect for Wafer Level Packaging
Yeun-Ho Joung, Mark G. Allen
IMECE 2001; 745-749https://doi.org/10.1115/IMECE2001/MEMS-23905
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Topics: Microelectromechanical systems , Micromachining , Packaging , Semiconductor wafers , Stress , Bonding , Complementary metal oxide semiconductors , Deflection , Density , Finite element analysis
New Approach to Development of Packaging for MEMS Inertial Sensors
Ryszard J. Pryputniewicz, Thomas F. Marinis, David S. Hanson, Cosme Furlong
IMECE 2001; 751-755https://doi.org/10.1115/IMECE2001/MEMS-23906
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Topics: Lasers , Microelectromechanical systems , Packaging , Sensors
Flexible Circuit-Based RF MEMS Switches
Chunjun Wang, Ramesh Ramadoss, Simone Lee, K. C. Gupta, Victor M. Bright, Y. C. Lee
IMECE 2001; 757-762https://doi.org/10.1115/IMECE2001/MEMS-23907
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Topics: Circuits , Microelectromechanical systems , Switches , Printed circuit boards
Selective Induction Heating for MEMS Packaging and Fabrication
Andrew Cao, Liwei Lin
IMECE 2001; 763-767https://doi.org/10.1115/IMECE2001/MEMS-23908
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Topics: Electromagnetic induction , Heating , Manufacturing , MEMS packaging , Microelectromechanical systems , Aluminum , Heat , Bonding , Borosilicate glasses , Design
A Novel Device-Level Micropackaging Using Micro Assembly Transfer
Jen-Yi Chen, Long-Sun Huang, Chia-Hua Chu, Yao-Hui Kuo, Peizen Chang
IMECE 2001; 769-774https://doi.org/10.1115/IMECE2001/MEMS-23909
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Topics: Microassembling , Microelectromechanical systems , Glass , Packaging , Micromachining , Robustness , Bonding , Contamination , Domes (Structural elements) , Electroplating

Medical Applications of Microsystems

A Device for Fabricating Protein Chips Using Surface Acoustic Wave Atomizer and Electrostatic Deposition
Joonwan Kim, Yutaka Yamagata, Kozo Inoue, Toshiro Higuchi
IMECE 2001; 777-780https://doi.org/10.1115/IMECE2001/MEMS-23910
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Topics: Microelectromechanical systems , Proteins , Surface acoustic waves , Particulate matter , Fluorescence , Insulation , Luminescence , Shapes
A Capillary Electrophoresis Platform With “On-Chip” Electrochemical Detection: Experimental and Computational Flow Studies
Thomas J. Roussel, Jr., Robert S. Keynton, Kevin M. Walsh, Mark M. Crain, John F. Naber, Douglas J. Jackson, Richard P. Baldwin
IMECE 2001; 781-785https://doi.org/10.1115/IMECE2001/MEMS-23911
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Topics: Electrophoresis , Flow (Dynamics) , Microelectromechanical systems , Separation (Technology) , Electroosmosis , Microfabrication , Circuits , Computer software , Design , Electrodes
An Integrated Microfluidic Device for the Continuous Sampling and Analysis of Biological Fluids
Jeffrey D. Zahn, Ajay A. Deshmukh, Alexandros P. Papavasiliou, Albert P. Pisano, Dorian Liepmann
IMECE 2001; 787-792https://doi.org/10.1115/IMECE2001/MEMS-23912
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Topics: Fluids , Microelectromechanical systems , Microfluidics , Sensors , Enzymes , Microneedles , Proteins , Biosensors , Molecular weight , Displacement
Fabrication of an Electromagnetic Micropump for Cerebrospinal Fluid Shunt
Myung Sik Kim, Kee Young Kwon, Sang Wook Lee, Sang Sik Yang
IMECE 2001; 793-798https://doi.org/10.1115/IMECE2001/MEMS-23913
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Topics: Cerebrospinal fluid , Manufacturing , Microelectromechanical systems , Micropumps , Diaphragms (Mechanical devices) , Diaphragms (Structural) , Design , Diffusers , Electromagnetic force , Flow (Dynamics)
A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging
Carl W. Chang, Thomas Budde, Hans H. Gatzen, Richard S. Muller
IMECE 2001; 799-804https://doi.org/10.1115/IMECE2001/MEMS-23914
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Topics: Microelectromechanical systems , Ultrasonic imaging , Circuits , Design , Rotation , Semiconductor wafers

Fabrication and Testing of Micro-Electro-Mechanical Systems

Constrained Layer Damping Treatments for Microstructures
Yi-Chu Hsu, I. Y. Shen
IMECE 2001; 807-812https://doi.org/10.1115/IMECE2001/MEMS-23915
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Topics: Damping , Microelectromechanical systems , Silicon , Aluminum , Etching , Photoresists , Excitation , Finite element analysis , Frequency response , Laser Doppler vibrometers
Process Modeling of Projection Micro Stereo Lithography for Three-Dimensional MEMS
Cheng Sun, Nicholas Fang, Xiang Zhang
IMECE 2001; 813-818https://doi.org/10.1115/IMECE2001/MEMS-23916
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Topics: Lithography , Microelectromechanical systems , Modeling , Manufacturing , Chemical properties , Hardening (Curing) , Resins , Resolution (Optics) , Springs , Ultraviolet radiation
A Simple Method for Determination of Thermal Conductivity Coefficients of Thin Films
Chi Hsiang Pan, Chien Li Tung
IMECE 2001; 819-826https://doi.org/10.1115/IMECE2001/MEMS-23917
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Topics: Microelectromechanical systems , Thermal conductivity , Thin films , Micromachining , Silicon , Temperature

Manufacturing of MEMS and Related Micro/Nano Systems

Noncontact Physical Removal of Nano-Scale Particles From Surfaces
Ahmed A. Busnaina, Hong Lin
IMECE 2001; 827-830https://doi.org/10.1115/IMECE2001/MEMS-23918
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Topics: Acoustics , Microelectromechanical systems , Nanoscale phenomena , Particulate matter , Fluctuations (Physics) , Integrated circuit fabrication , Nanoparticles , Pressure , Semiconductor wafers , Semiconductors (Materials)
Characterization of Drying Techniques for Micro-Stereolithography
Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang
IMECE 2001; 831-835https://doi.org/10.1115/IMECE2001/MEMS-23919
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Topics: Drying , Microelectromechanical systems , Stereolithography , Adhesion , Polymers , Manufacturing , Resins , Surface tension , Collapse , Deflection
Fabrication of Novel Polysilazane MEMS Structures by Microcasting
Li-Anne Liew, Tsali Cross, Victor M. Bright, Rishi Raj
IMECE 2001; 837-844https://doi.org/10.1115/IMECE2001/MEMS-23920
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Topics: Manufacturing , Microelectromechanical systems , Glass , Transparency , Absorption , Casting , Diffraction gratings , Optical instruments , Photoresists , Temperature
Design, Fabrication, and Testing of a Continuous Flow, Submicroliter Scale PCR for the Analysis of Plant Genomes
Wei Zheng, Shaochen Chen
IMECE 2001; 845-849https://doi.org/10.1115/IMECE2001/MEMS-23921
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Topics: Design , Flow (Dynamics) , Manufacturing , Microelectromechanical systems , Testing , Semiconductor wafers , Borosilicate glasses , Glass , Microchannels , Micromachining
A Batch Fabrication Micro-Ball Array for Optical Coupling in Free Space Communication
S.-C. Shen, H.-P. Chou
IMECE 2001; 851-857https://doi.org/10.1115/IMECE2001/MEMS-23922
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Topics: Lenses (Optics) , Manufacturing , Microelectromechanical systems , Semiconductor wafers , Vacuum , Fibers , Optical fiber , Silicon , Anisotropy , Bonding

Micro and Mesoscale Energy Systems and Conversion Devices

A Catalytically Sustained Microcombustor Burning Propane
Jonathan M. Hatfield, Richard B. Peterson
IMECE 2001; 861-865https://doi.org/10.1115/IMECE2001/MEMS-23923
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Topics: Combustion , Microelectromechanical systems , Heat , Combustion chambers , Flow (Dynamics) , Platinum , Shapes , Temperature , Wire
Design and Experimental Results of Small-Scale Rotary Engines
Kelvin Fu, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann, Kenji Miyaska, Kaoru Maruta
IMECE 2001; 867-873https://doi.org/10.1115/IMECE2001/MEMS-23924
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Topics: Design , Engines , Microelectromechanical systems , Manufacturing , Testing , Sealing (Process) , Ignition , Internal combustion engines , Combustion , Construction
Design and Fabrication of a Silicon-Based MEMS Rotary Engine
Kelvin Fu, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann
IMECE 2001; 875-880https://doi.org/10.1115/IMECE2001/MEMS-23925
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Topics: Design , Engines , Manufacturing , Microelectromechanical systems , Silicon , Rotors , Density , Energy / power systems , Etching , Geometry
Design and Analysis of a Miniature Rotary Wankel Compressor
G. W. Finger, J. S. Kapat, L. C. Chow
IMECE 2001; 881-888https://doi.org/10.1115/IMECE2001/MEMS-23926
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Topics: Compressors , Design , Microelectromechanical systems , Rotors , Energy / power systems , Gates (Closures) , Lithography , Electrical discharge machining , Pressure , Stress
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