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Keywords: PZT thin filmsClose
Proc. ASME. TRIB2002, Magnetic Storage Symposium: Frontiers of Magnetic Hard Disk Drive Tribology and Technology, 9-15, October 27–30, 2002
Paper No: 2002-TRIB-0249
... This paper describes MEMS-based active sliders with micro-actuators. The proposal active slider uses PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. The design procedure for the active slider is discussed. In addition, novel multi-layered composite PZT...