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Proceedings Papers

A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact

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R. P. Hennessy, G. G. Adams, N. E. McGruer
Proc. ASME. IJTC2011, ASME/STLE 2011 Joint Tribology Conference, 295-297, October 24–26, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2011-61156
https://doi.org/10.1115/IJTC2011-61156
View Paper titled, A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact
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Topics: Finite element methods, Modeling, Displacement, Force control, Elastic half space, Electric potential, Microelectromechanical systems, Physics, Switches
Proceedings Papers

Voltage Saturation in Electrical Contacts

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Dinesh G. Bansal, Jeffrey L. Streator
Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 371-374, October 19–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2009-15229
https://doi.org/10.1115/IJTC2009-15229
View Paper titled, Voltage Saturation in Electrical Contacts
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Topics: Aluminum, Contact resistance, Cycles, Switches
Proceedings Papers

Tribology Issues in the Operation of a Microswitch: A Tutorial

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George G. Adams
Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 25, October 19–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2009-15192
https://doi.org/10.1115/IJTC2009-15192
View Paper titled, Tribology Issues in the Operation of a Microswitch: A Tutorial
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Topics: Adhesion, Circuits, Contact resistance, Contamination, Energy consumption, Failure, Failure mechanisms, Friction, Gates (Closures), Metals
Proceedings Papers

Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling

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Seung Min Yeo, Spyros I. Tseregounis, Andreas A. Polycarpou, Adam Fruehling, Dimitrios Peroulis
Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 13-15, October 19–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2009-15120
https://doi.org/10.1115/IJTC2009-15120
View Paper titled, Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling
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Topics: Adhesion, Failure, Metals, Microelectromechanical systems, Switches, Cycles, Atomic force microscopy, Cantilevers, Optical microscopy, Reliability
Proceedings Papers

Cyclic Loading of an Elastic-Plastic Adhesive Contact

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Y. Kadin, Y. Kligerman, I. Etsion
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 27-29, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71055
https://doi.org/10.1115/IJTC2008-71055
View Paper titled, Cyclic Loading of an Elastic-Plastic Adhesive Contact
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Topics: Adhesives, Microelectromechanical systems, Computer simulation, Cycles, Deformation, Electrodes, Failure, Plasticity, Simulation, Switches
Proceedings Papers

Contact Failure Mechanisms in Ohmic-Type MEMS Switches

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George G. Adams, Nicol E. McGruer, Lei Chen, Yan Du, Z. J. Guo
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 853-855, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44265
https://doi.org/10.1115/IJTC2007-44265
View Paper titled, Contact Failure Mechanisms in Ohmic-Type MEMS Switches
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Topics: Failure mechanisms, Microelectromechanical systems, Switches, Failure, Adhesives, Brittleness, Contact mechanics, Contamination, Modeling, Separation (Technology)
Proceedings Papers

Characterisation of the Mechanical Properties of MEMS Devices Using Nanoscale Techniques

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N. X. Randall
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 769-771, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44018
https://doi.org/10.1115/IJTC2007-44018
View Paper titled, Characterisation of the Mechanical Properties of MEMS Devices Using Nanoscale Techniques
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Topics: Mechanical properties, Microelectromechanical systems, Nanoscale phenomena, Accelerometers, Testing, Cycles, Elastic constants, Failure, Friction, Micromachining
Proceedings Papers

Asperity Contact Evolution: Capillarity and Electromigration Effects

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Ji-Hee Kim, Pil-Ryung Cha, David J. Srolovitz
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 33-35, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64336
https://doi.org/10.1115/TRIB2004-64336
View Paper titled, Asperity Contact Evolution: Capillarity and Electromigration Effects
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Topics: Capillarity, Electrodiffusion, Temperature, Atoms, Electrons, Deformation, Diffusion (Physics), Electric current, Electromagnetic scattering, Grain boundary diffusion
Proceedings Papers

Micro/Nanotribology of RF MEMS Switches

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Steven T. Patton, Kalathil C. Eapen, Jeffrey S. Zabinski
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 83-85, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64351
https://doi.org/10.1115/TRIB2004-64351
View Paper titled, Micro/Nanotribology of RF MEMS Switches
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Topics: Microelectromechanical systems, Nanotribology, Switches, Adhesion, Reliability, Durability, Electric current, Aerospace industry, Contact resistance, Creep
Proceedings Papers

RF-MEMS Varactor With Minimal Contact

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Qin Shen, Ioannis Chasiotis, N. Scott Barker
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 41-45, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64340
https://doi.org/10.1115/TRIB2004-64340
View Paper titled, RF-MEMS Varactor With Minimal Contact
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Topics: Microelectromechanical systems, Capacitance, Switches, Accelerated life testing, Circuits, Design, Stiction
Proceedings Papers

Adhesion Effects on Contact Opening Time in MEMS Switches

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Brian D. Jensen, Linda L.-W. Chow, Katsuo Kurabayashi, John L. Volakis
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 75-82, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64350
https://doi.org/10.1115/TRIB2004-64350
View Paper titled, Adhesion Effects on Contact Opening Time in MEMS Switches
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Topics: Adhesion, Microelectromechanical systems, Switches, Contact resistance, Micromachining, Steady state
Proceedings Papers

The Role of Surface Topography in MEMS Switches and Relays

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L. Kogut, K. Komvopoulos
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 107-111, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64359
https://doi.org/10.1115/TRIB2004-64359
View Paper titled, The Role of Surface Topography in MEMS Switches and Relays
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Topics: Microelectromechanical systems, Switches, Operating temperature, Signals, Surface roughness
Proceedings Papers

Molecular Dynamics Simulation of Single Asperity Contact

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Pil-Ryung Cha, Jun Song, T. Kyle Vanderlick, David J. Srolovitz
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 29-32, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64335
https://doi.org/10.1115/TRIB2004-64335
View Paper titled, Molecular Dynamics Simulation of Single Asperity Contact
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Topics: Molecular dynamics simulation, Electrical conductance, Deformation, Adhesion, Surface roughness, Contact resistance, Displacement, Simulation, Cycles, Dimensions
Proceedings Papers

A Model for the Electrical Degradation of Metal Microcontacts During Many-Cycle Operation

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R. E. Mihailovich, J. F. DeNatale
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 37-40, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64337
https://doi.org/10.1115/TRIB2004-64337
View Paper titled, A Model for the Electrical Degradation of Metal Microcontacts During Many-Cycle Operation
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Topics: Cycles, Metals, Switches, Microelectromechanical systems
Proceedings Papers

AFM-Based Testing and Measurements of Contact and Stiction in a Micromechanical Switch

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Lei Chen, Nicol E. McGruer, George G. Adams
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 65-68, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64348
https://doi.org/10.1115/TRIB2004-64348
View Paper titled, AFM-Based Testing and Measurements of Contact and Stiction in a Micromechanical Switch
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Topics: Atomic force microscopy, Stiction, Switches, Testing, Cantilevers, Scanning probe microscopy, Contact resistance, Physics, Stiffness
Proceedings Papers

The Degradation of Electrical Contact Resistance of Metal Films at Low Contact Force

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Daniel J. Dickrell, III, Michael T. Dugger
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 9-15, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64332
https://doi.org/10.1115/TRIB2004-64332
View Paper titled, The Degradation of Electrical Contact Resistance of Metal Films at Low Contact Force
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Topics: Contact resistance, Metals, Microelectromechanical systems, Contamination, Reliability, Switches, Thin films
Proceedings Papers

Interrelationship Between Hardness and Resistivity of Metal Alloy Films as Contact Materials in MEMS Switches

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S. Mall, H. Lee, K. D. Leedy, R. A. Coutu, Jr.
Proc. ASME. IJTC2006, Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology, 1377-1378, October 23–25, 2006
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2006-12268
https://doi.org/10.1115/IJTC2006-12268
View Paper titled, Interrelationship Between Hardness and Resistivity of Metal Alloy Films as Contact Materials in MEMS Switches
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Topics: Alloys, Electrical resistivity, Microelectromechanical systems, Switches, Metals, Platinum, Ruthenium, Thin films, Adhesion, Contact resistance
Proceedings Papers

Influence of Heat, Force, and Secondary Factors on Electrical Contact Resistance in Microscale Gold Contacts

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Adam C. Frischknecht, Brian D. Jensen
Proc. ASME. IJTC2006, Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology, 1451-1457, October 23–25, 2006
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2006-12293
https://doi.org/10.1115/IJTC2006-12293
View Paper titled, Influence of Heat, Force, and Secondary Factors on Electrical Contact Resistance in Microscale Gold Contacts
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Topics: Contact resistance, Heat, Microscale devices, Heating, Manganese (Metal), Switches
Proceedings Papers

A Dynamic Model of Microscale Contact Breaking in RF MEMS Switches

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Gavin Gee, Brian D. Jensen
Proc. ASME. IJTC2006, Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology, 1475-1479, October 23–25, 2006
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2006-12297
https://doi.org/10.1115/IJTC2006-12297
View Paper titled, A Dynamic Model of Microscale Contact Breaking in RF MEMS Switches
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Topics: Dynamic models, Microelectromechanical systems, Microscale devices, Switches, Adhesion, Transients (Dynamics), Vibration