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Proceedings Papers

Ultrathin CN x Overcoats for 1 Tb/in 2 Hard Disk Drive Systems

De-Jun Li, Murat U. Guruz, Yip-Wah Chung
Proc. ASME. TRIB2001, ASME 2001 Symposium on Nanotribology and Nanotechnology for 1Tbit/in2, 61-64, October 21–24, 2001
Publisher: American Society of Mechanical Engineers
Paper No: TRIB-NANO2001-108
https://doi.org/10.1115/TRIB-NANO2001-108
View Paper titled, Ultrathin CN x Overcoats for 1 Tb/in 2 Hard Disk Drive Systems
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Topics: Disks, Rotation, Atomic force microscopy, Carbon, Corrosion, Damage, Momentum, Silicon, Sputtering (Irradiation), Surface roughness
Proceedings Papers

Debris Contamination in Sliding Contacts

Jonathan P. Kyle, Elon J. Terrell
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 453-455, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41306
https://doi.org/10.1115/IJTC2010-41306
View Paper titled, Debris Contamination in Sliding Contacts
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Topics: Contamination, Gears, Lubricants, Manufacturing, Particle size, Particulate matter, Sands, Silicon, Steel, Wear
Proceedings Papers

Design of a Composite Microtribology Experiment System for Silicon Sidewalls

Wei Zhang, Sihan Shen, Yonggang Meng
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 25-27, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41218
https://doi.org/10.1115/IJTC2010-41218
View Paper titled, Design of a Composite Microtribology Experiment System for Silicon Sidewalls
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Topics: Composite materials, Design, Microtribology, Silicon, Friction, Cantilevers, Lasers, Displacement, Information processing systems, Microscopes
Proceedings Papers

Tribological Properties of Polycrystalline Silicon Microdevices Sliding in High Vacuum

H. Xiang, K. Komvopoulos
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 29-31, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41220
https://doi.org/10.1115/IJTC2010-41220
View Paper titled, Tribological Properties of Polycrystalline Silicon Microdevices Sliding in High Vacuum
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Topics: Polysilicon, Tribology, Vacuum, Adhesion, Cycles, Friction, Stiction, Deformation, Scanning electron microscopy, Silicon
Proceedings Papers

Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings

S. Demiri, S. Boedo
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 21-23, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41189
https://doi.org/10.1115/IJTC2010-41189
View Paper titled, Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings
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Topics: Clearances (Engineering), Silicon, Bearings, Design, Impulse (Physics), Journal bearings, Metrology, Microfabrication, Momentum, Polysilicon
Proceedings Papers

Tribological Characteristics of the Aluminum-Silicon Alloy Impregnated Graphite Composite Under Insufficiently Lubricated Reciprocating Sliding Conditions

Hozumi Goto, Claudiu Valentin Suciu
Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 71-73, October 19–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2009-15061
https://doi.org/10.1115/IJTC2009-15061
View Paper titled, Tribological Characteristics of the Aluminum-Silicon Alloy Impregnated Graphite Composite Under Insufficiently Lubricated Reciprocating Sliding Conditions
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Topics: Alloys, Aluminum, Composite materials, Graphite, Silicon, Tribology, Lubrication, Disks, Bearing steel, Cycles
Proceedings Papers

Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion

Jie Wu, Shao Wang, Jianmin Miao
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 57-59, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71189
https://doi.org/10.1115/IJTC2008-71189
View Paper titled, Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion
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Topics: Friction, Microelectromechanical systems, Stiction, Actuators, Bearings, Bending (Stress), Crystals, Fittings, Manufacturing, Rotation
Proceedings Papers

Wear of Silicon and Carbon-Based Nanoscale Asperities

Jingjing Liu, Sean D. O’Connor, Bernd Gotsmann, Mark A. Lantz, Rachel J. Cannara, Jacob Notbohm, Nicolaie Moldovan, John A. Carlisle, Kumar Sridharan, Kevin T. Turner, Robert W. Carpick
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 37, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71135
https://doi.org/10.1115/IJTC2008-71135
View Paper titled, Wear of Silicon and Carbon-Based Nanoscale Asperities
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Topics: Carbon, Nanoscale phenomena, Silicon, Wear, Atomic force microscopy, Probes, Adhesion, Diamonds, Silicon nitride ceramics, Contamination
Proceedings Papers

Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch

Duc-Cuong Pham, R. Arvind Singh, Jinseok Kim, Sungwook Yang, Eui-Sung Yoon
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 115-117, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71289
https://doi.org/10.1115/IJTC2008-71289
View Paper titled, Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch
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Topics: Columns (Structural), Nanoscale phenomena, Silicon, Tribology, Adhesion, Friction, Microelectromechanical systems, Nanostructures , Semiconductor wafers
Proceedings Papers

Dynamics of the Formation of the Subambient Pressure Distribution During Chemical-Mechanical Polishing

A. Osorno, S. Tereshko, I. Yoon, S. Danyluk
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 1081-1082, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44441
https://doi.org/10.1115/IJTC2007-44441
View Paper titled, Dynamics of the Formation of the Subambient Pressure Distribution During Chemical-Mechanical Polishing
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Topics: Dynamics (Mechanics), Polishing, Pressure, Semiconductor wafers, Silicon, Particulate matter, Slurries, Electronics, Integrated circuits, Manufacturing
Proceedings Papers

Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices

David B. Asay, Michael T. Dugger, Seong H. Kim
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 885-887, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44419
https://doi.org/10.1115/IJTC2007-44419
View Paper titled, Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices
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Topics: Lubrication, Microelectromechanical systems, Nanotribology, Vapors, Silicon, Adhesion, Lubricants, Ethanol, Failure, Friction
Proceedings Papers

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Yonggang Meng, Zhanshe Guo, Hao Wu
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 897-899, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44471
https://doi.org/10.1115/IJTC2007-44471
View Paper titled, Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester
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Topics: Friction, Wear, Microelectromechanical systems, Sliding friction, Testing, Cycles, Manufacturing, Microgears, Micromotors, Oxidation
Proceedings Papers

Temperature Dependent Nanotribological Behavior of Ultrathin Thermoplastic Polymeric Resist Films Studied by Use of AFM

Adam Koszewski, Freimut Reuther, Zygmunt Rymuza
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 795-797, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44138
https://doi.org/10.1115/IJTC2007-44138
View Paper titled, Temperature Dependent Nanotribological Behavior of Ultrathin Thermoplastic Polymeric Resist Films Studied by Use of AFM
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Topics: Atomic force microscopy, Temperature, Polymers, Cantilevers, Embossing, Lithography, Manufacturing, Resolution (Optics), Silicon, Testing
Proceedings Papers

Micro- and Nano-Tribological Behaviour of Soybean Oil-Based Polymers of Different Crosslinking Densities

S. Bhuyan, S. Sundararajan, D. Andjelkovic, R. Larock
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 27-29, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44206
https://doi.org/10.1115/IJTC2007-44206
View Paper titled, Micro- and Nano-Tribological Behaviour of Soybean Oil-Based Polymers of Different Crosslinking Densities
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Topics: Adhesives, Atomic force microscopy, Benzene, Biopolymers, Density, Diamonds, Elastic moduli, Geometry, Microhardness, Nanoscale phenomena
Proceedings Papers

Wetting and Adhesion Properties of Organic Monolayer Modified Nano-Topography-Engineered Surfaces

R. Premachandran Nair, Y. Song, M. Zou, Y. A. Wang
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 1021-1023, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44053
https://doi.org/10.1115/IJTC2007-44053
View Paper titled, Wetting and Adhesion Properties of Organic Monolayer Modified Nano-Topography-Engineered Surfaces
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Topics: Adhesion, Aluminum, Crystallization, Self-assembly, Silicon, Water, Wetting, Surface properties, Surface texture
Proceedings Papers

Traction of Lubricated Rolling Contacts Between Thin Film Coatings and Steel

Ryan D. Evans, J. David Cogdell, Gary L. Doll
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 921-923, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44261
https://doi.org/10.1115/IJTC2007-44261
View Paper titled, Traction of Lubricated Rolling Contacts Between Thin Film Coatings and Steel
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Topics: Coatings, Steel, Thin films, Traction, Lubricants, Bearings, Diamond films, Film thickness, Gears, Oxidation
Proceedings Papers

Hardness and Frictional Properties of Alumina Coatings by AC Inverted Magnetron Sputtering Technique

H. Wang, A. Aryasomayajula, M. Zou, M. Gordon, D. Bhat
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 925-927, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44327
https://doi.org/10.1115/IJTC2007-44327
View Paper titled, Hardness and Frictional Properties of Alumina Coatings by AC Inverted Magnetron Sputtering Technique
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Topics: Coatings, Friction, Sputtering (Irradiation), Oxygen, Pressure, Silicon, Thin films
Proceedings Papers

Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication

M. McCarthy, B. Hanrahan, C. Zorman, R. Ghodssi
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 827-829, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44190
https://doi.org/10.1115/IJTC2007-44190
View Paper titled, Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication
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Topics: Ball bearings, Lubrication, Microelectromechanical systems, Rolling friction, Thin films, Silicon, Sliding friction, Steel, Lubricants, Plates (structures)
Proceedings Papers

Evaluation of Friction Behavior and Contact Area Dependence at the Micro and Nanoscales

K. S. Kanaga Karuppiah, Angela L. Bruck, Sriram Sundararajan
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 833-835, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44216
https://doi.org/10.1115/IJTC2007-44216
View Paper titled, Evaluation of Friction Behavior and Contact Area Dependence at the Micro and Nanoscales
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Topics: Friction, Stress, Atomic force microscopy, Microscale devices, Nanoscale phenomena, Silicon nitride ceramics, Contact mechanics, Damage, Molecular weight, Probes
Proceedings Papers

Nano Wear of Noble Metals Against Silicon

Luohan Peng, Hong Liang
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 841-843, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44227
https://doi.org/10.1115/IJTC2007-44227
View Paper titled, Nano Wear of Noble Metals Against Silicon
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Topics: Metals, Silicon, Wear, Atomic force microscopy, Adhesives, Atoms, Crystals, Eutectic alloys, Nanoscale phenomena, Oxidation