1-5 of 5
Polysilicon
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Tribological Properties of Polycrystalline Silicon Microdevices Sliding in High Vacuum

Available to Purchase

H. Xiang, K. Komvopoulos
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 29-31, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41220
https://doi.org/10.1115/IJTC2010-41220
View Paper titled, Tribological Properties of Polycrystalline Silicon Microdevices Sliding in High Vacuum
Open the PDF for Tribological Properties of Polycrystalline Silicon Microdevices Sliding in High Vacuum in another window
Topics: Polysilicon, Tribology, Vacuum, Adhesion, Cycles, Friction, Stiction, Deformation, Scanning electron microscopy, Silicon
Proceedings Papers

Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings

Available to Purchase

S. Demiri, S. Boedo
Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 21-23, October 17–20, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2010-41189
https://doi.org/10.1115/IJTC2010-41189
View Paper titled, Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings
Open the PDF for Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings in another window
Topics: Clearances (Engineering), Silicon, Bearings, Design, Impulse (Physics), Journal bearings, Metrology, Microfabrication, Momentum, Polysilicon
Proceedings Papers

Reduced Microstructure Adhesion Provided by Gas-Expanded Liquid Deposited Gold Nanoparticles

Available to Purchase

K. M. Hurst, C. B. Roberts, W. R. Ashurst
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 99-101, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71253
https://doi.org/10.1115/IJTC2008-71253
View Paper titled, Reduced Microstructure Adhesion Provided by Gas-Expanded Liquid Deposited Gold Nanoparticles
Open the PDF for Reduced Microstructure Adhesion Provided by Gas-Expanded Liquid Deposited Gold Nanoparticles in another window
Topics: Adhesion, Nanoparticles, Stiction, Cantilever beams, Condensation, Polysilicon, Surface roughness
Proceedings Papers

A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS

Available to Purchase

Clint A. Morrow, Michael R. Lovell
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 1245-1268, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64152
https://doi.org/10.1115/TRIB2004-64152
View Paper titled, A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS
Open the PDF for A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS in another window
Topics: Adhesives, Microelectromechanical systems, Surface roughness, Adhesion, Fractals, Geometry, Physics, Polysilicon, Simulation, Stiction
Proceedings Papers

Pre-Sliding Tangential Deflections Can Govern the Friction of MEMS Devices

Available to Purchase

Alex D. Corwin, Mark D. Street, Robert W. Carpick, William R. Ashurst, Maarten P. de Boer
Proc. ASME. TRIB2004, ASME/STLE 2004 International Joint Tribology Conference, Parts A and B, 113-116, October 24–27, 2004
Publisher: American Society of Mechanical Engineers
Paper No: TRIB2004-64360
https://doi.org/10.1115/TRIB2004-64360
View Paper titled, Pre-Sliding Tangential Deflections Can Govern the Friction of MEMS Devices
Open the PDF for Pre-Sliding Tangential Deflections Can Govern the Friction of MEMS Devices in another window
Topics: Deflection, Friction, Microelectromechanical systems, Carbon, Chain, Stiction, Actuators, Coating processes, Coatings, Metrology