1-20 of 50
Microelectromechanical systems
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Simultaneous Measurements of Friction Forces and Contact Areas During Shearing of Nanometer-Thick Liquid Lubricant Films

Available to Purchase

Shintaro Itoh, Takumi Mizuno, Yusuke Norizuki, Kenji Fukuzawa, Hedong Zhang
Proc. ASME. IJTC2012, ASME/STLE 2012 International Joint Tribology Conference, 25-27, October 7–10, 2012
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2012-61154
https://doi.org/10.1115/IJTC2012-61154
View Paper titled, Simultaneous Measurements of Friction Forces and Contact Areas During Shearing of Nanometer-Thick Liquid Lubricant Films
Open the PDF for Simultaneous Measurements of Friction Forces and Contact Areas During Shearing of Nanometer-Thick Liquid Lubricant Films in another window
Topics: Die cutting, Friction, Lubricants, Shearing (Deformation), Probes, Fibers, Mechanical properties, Shear (Mechanics), Deflection, Design
Proceedings Papers

A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact

Available to Purchase

R. P. Hennessy, G. G. Adams, N. E. McGruer
Proc. ASME. IJTC2011, ASME/STLE 2011 Joint Tribology Conference, 295-297, October 24–26, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2011-61156
https://doi.org/10.1115/IJTC2011-61156
View Paper titled, A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact
Open the PDF for A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact in another window
Topics: Finite element methods, Modeling, Displacement, Force control, Elastic half space, Electric potential, Microelectromechanical systems, Physics, Switches
Proceedings Papers

Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling

Available to Purchase

Seung Min Yeo, Spyros I. Tseregounis, Andreas A. Polycarpou, Adam Fruehling, Dimitrios Peroulis
Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 13-15, October 19–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2009-15120
https://doi.org/10.1115/IJTC2009-15120
View Paper titled, Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling
Open the PDF for Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling in another window
Topics: Adhesion, Failure, Metals, Microelectromechanical systems, Switches, Cycles, Atomic force microscopy, Cantilevers, Optical microscopy, Reliability
Proceedings Papers

Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion

Available to Purchase

Jie Wu, Shao Wang, Jianmin Miao
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 57-59, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71189
https://doi.org/10.1115/IJTC2008-71189
View Paper titled, Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion
Open the PDF for Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion in another window
Topics: Friction, Microelectromechanical systems, Stiction, Actuators, Bearings, Bending (Stress), Crystals, Fittings, Manufacturing, Rotation
Proceedings Papers

Limits to Lubrication Theory in Microsystems

Available to Purchase

John Tichy, Victor Marrero, Diana-Andra Borca-Tasciuc
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 311-313, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71068
https://doi.org/10.1115/IJTC2008-71068
View Paper titled, Limits to Lubrication Theory in Microsystems
Open the PDF for Limits to Lubrication Theory in Microsystems in another window
Topics: Lubrication theory, Microelectromechanical systems, Design, Film thickness, Fluid-dynamic forces, Wings
Proceedings Papers

Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch

Available to Purchase

Duc-Cuong Pham, R. Arvind Singh, Jinseok Kim, Sungwook Yang, Eui-Sung Yoon
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 115-117, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71289
https://doi.org/10.1115/IJTC2008-71289
View Paper titled, Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch
Open the PDF for Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch in another window
Topics: Columns (Structural), Nanoscale phenomena, Silicon, Tribology, Adhesion, Friction, Microelectromechanical systems, Nanostructures , Semiconductor wafers
Proceedings Papers

Optimum Roughness for Minimum Adhesion

Available to Purchase

D.-L. Liu, J. Martin, N. A. Burnham
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 593-595, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71192
https://doi.org/10.1115/IJTC2008-71192
View Paper titled, Optimum Roughness for Minimum Adhesion
Open the PDF for Optimum Roughness for Minimum Adhesion in another window
Topics: Adhesion, Surface roughness, Adhesives, Atomic force microscopy, Fractals, Cantilevers, Computer software, Contact mechanics, Microelectromechanical systems, Nanoscale phenomena
Proceedings Papers

Cyclic Loading of an Elastic-Plastic Adhesive Contact

Available to Purchase

Y. Kadin, Y. Kligerman, I. Etsion
Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 27-29, October 20–22, 2008
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2008-71055
https://doi.org/10.1115/IJTC2008-71055
View Paper titled, Cyclic Loading of an Elastic-Plastic Adhesive Contact
Open the PDF for Cyclic Loading of an Elastic-Plastic Adhesive Contact in another window
Topics: Adhesives, Microelectromechanical systems, Computer simulation, Cycles, Deformation, Electrodes, Failure, Plasticity, Simulation, Switches
Proceedings Papers

In-Situ Vapor Phase Lubrication of MEMS Devices

Available to Purchase

Seong H. Kim
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 883-884, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44418
https://doi.org/10.1115/IJTC2007-44418
View Paper titled, In-Situ Vapor Phase Lubrication of MEMS Devices
Open the PDF for In-Situ Vapor Phase Lubrication of MEMS Devices in another window
Topics: Lubrication, Microelectromechanical systems, Vapors
Proceedings Papers

Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices

Available to Purchase

David B. Asay, Michael T. Dugger, Seong H. Kim
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 885-887, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44419
https://doi.org/10.1115/IJTC2007-44419
View Paper titled, Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices
Open the PDF for Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices in another window
Topics: Lubrication, Microelectromechanical systems, Nanotribology, Vapors, Silicon, Adhesion, Lubricants, Ethanol, Failure, Friction
Proceedings Papers

Relations of Microstructure, Piezoelectricity, and Surface Forces at Nanoscale

Available to Purchase

Hyungoo Lee, Rodrigo Cooper, Bartosz Mika, Hong Liang
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 893-895, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44456
https://doi.org/10.1115/IJTC2007-44456
View Paper titled, Relations of Microstructure, Piezoelectricity, and Surface Forces at Nanoscale
Open the PDF for Relations of Microstructure, Piezoelectricity, and Surface Forces at Nanoscale in another window
Topics: Nanoscale phenomena, Piezoelectricity, Adhesion, Friction, Atomic force microscopy, Dipoles (Electromagnetism), Electric potential, Microelectromechanical systems, Nanoelectromechanical systems, Polymers
Proceedings Papers

The Effect of Channelling a Polymeric Surface on Its Adhesion and Friction Characteristics

Available to Purchase

Duc-Cuong Pham, R. Arvind Singh, Hoon Eui Jeong, Kahp Y. Suh, Eui-Sung Yoon
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 791-793, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44137
https://doi.org/10.1115/IJTC2007-44137
View Paper titled, The Effect of Channelling a Polymeric Surface on Its Adhesion and Friction Characteristics
Open the PDF for The Effect of Channelling a Polymeric Surface on Its Adhesion and Friction Characteristics in another window
Topics: Adhesion, Friction, Tribology, Lithography, Manufacturing, Microelectromechanical systems, Microscale devices, Nanoelectromechanical systems, Nanoscale phenomena, Polymer films
Proceedings Papers

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Available to Purchase

Yonggang Meng, Zhanshe Guo, Hao Wu
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 897-899, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44471
https://doi.org/10.1115/IJTC2007-44471
View Paper titled, Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester
Open the PDF for Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester in another window
Topics: Friction, Wear, Microelectromechanical systems, Sliding friction, Testing, Cycles, Manufacturing, Microgears, Micromotors, Oxidation
Proceedings Papers

Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication

Available to Purchase

M. McCarthy, B. Hanrahan, C. Zorman, R. Ghodssi
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 827-829, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44190
https://doi.org/10.1115/IJTC2007-44190
View Paper titled, Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication
Open the PDF for Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication in another window
Topics: Ball bearings, Lubrication, Microelectromechanical systems, Rolling friction, Thin films, Silicon, Sliding friction, Steel, Lubricants, Plates (structures)
Proceedings Papers

Device and Reliability Physics of Capacitive MEMS

Free

Evgeni Gusev
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 831, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44209
https://doi.org/10.1115/IJTC2007-44209
View Paper titled, Device and Reliability Physics of Capacitive MEMS
Open the PDF for Device and Reliability Physics of Capacitive MEMS in another window
Topics: Microelectromechanical systems, Physics, Reliability, Nanoelectromechanical systems, Cycles, Manufacturing, Packaging
Proceedings Papers

Tribological Characteristics of Materials for MEMS/NEMS by Using Chemically Modified AFM Tip

Available to Purchase

J. C. Heo, K. S. Kim, K. W. Kim
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 837-839, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44226
https://doi.org/10.1115/IJTC2007-44226
View Paper titled, Tribological Characteristics of Materials for MEMS/NEMS by Using Chemically Modified AFM Tip
Open the PDF for Tribological Characteristics of Materials for MEMS/NEMS by Using Chemically Modified AFM Tip in another window
Topics: Atomic force microscopy, Microelectromechanical systems, Nanoelectromechanical systems, Tribology, Adhesion, Friction, Plasma desorption mass spectrometry, Coating processes, Coatings, Self-assembly
Proceedings Papers

A MEMS Device for Studying the Friction Behavior of Sidewall Surfaces

Available to Purchase

Jie Wu, Shao Wang, Jianmin Miao
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 849-851, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44237
https://doi.org/10.1115/IJTC2007-44237
View Paper titled, A MEMS Device for Studying the Friction Behavior of Sidewall Surfaces
Open the PDF for A MEMS Device for Studying the Friction Behavior of Sidewall Surfaces in another window
Topics: Friction, Microelectromechanical systems, Actuators, Sensors, Displacement, Silicon, Crystals, Image processing, Plates (structures), Sliding friction
Proceedings Papers

Contact Failure Mechanisms in Ohmic-Type MEMS Switches

Available to Purchase

George G. Adams, Nicol E. McGruer, Lei Chen, Yan Du, Z. J. Guo
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 853-855, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44265
https://doi.org/10.1115/IJTC2007-44265
View Paper titled, Contact Failure Mechanisms in Ohmic-Type MEMS Switches
Open the PDF for Contact Failure Mechanisms in Ohmic-Type MEMS Switches in another window
Topics: Failure mechanisms, Microelectromechanical systems, Switches, Failure, Adhesives, Brittleness, Contact mechanics, Contamination, Modeling, Separation (Technology)
Proceedings Papers

Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model

Available to Purchase

T. Hirayama, K. Sasaki, R. Mizuno, T. Kitagawa, M. Kadotani, T. Matsuoka, H. Yabe
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 223-224, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44101
https://doi.org/10.1115/IJTC2007-44101
View Paper titled, Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model
Open the PDF for Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model in another window
Topics: Actuators, Bearings, Engineering prototypes, Servomechanisms, Biomechanics, Errors, Integrated circuit fabrication, Microelectromechanical systems, Nanoelectromechanical systems, Nanoscale phenomena
Proceedings Papers

Tribological Challenges in MEMS/NEMS Devices

Available to Purchase

Steven T. Patton, Andrey A. Voevodin
Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 857-859, October 22–24, 2007
Publisher: American Society of Mechanical Engineers
Paper No: IJTC2007-44270
https://doi.org/10.1115/IJTC2007-44270
View Paper titled, Tribological Challenges in MEMS/NEMS Devices
Open the PDF for Tribological Challenges in MEMS/NEMS Devices in another window
Topics: Microelectromechanical systems, Nanoelectromechanical devices, Tribology, Nanoelectromechanical systems, Design, Elastic constants, Failure, Redundancy (Engineering), Reliability