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Proceedings Papers

Simultaneous Measurements of Friction Forces and Contact Areas During Shearing of Nanometer-Thick Liquid Lubricant Films

Shintaro Itoh, Takumi Mizuno, Yusuke Norizuki, Kenji Fukuzawa, Hedong Zhang

Proc. ASME. IJTC2012, ASME/STLE 2012 International Joint Tribology Conference, 25-27, October 7–10, 2012

Paper No: IJTC2012-61154

DOI: https://doi.org/10.1115/IJTC2012-61154

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Topics: Die cutting, Friction, Lubricants, Shearing (Deformation), Probes, Fibers, Mechanical properties, Shear (Mechanics), Deflection, Design

Proceedings Papers

A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact

R. P. Hennessy, G. G. Adams, N. E. McGruer

Proc. ASME. IJTC2011, ASME/STLE 2011 Joint Tribology Conference, 295-297, October 24–26, 2011

Paper No: IJTC2011-61156

DOI: https://doi.org/10.1115/IJTC2011-61156

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Topics: Finite element methods, Modeling, Displacement, Force control, Elastic half space, Electric potential, Microelectromechanical systems, Physics, Switches

Proceedings Papers

Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling

Seung Min Yeo, Spyros I. Tseregounis, Andreas A. Polycarpou, Adam Fruehling, Dimitrios Peroulis

Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 13-15, October 19–21, 2009

Paper No: IJTC2009-15120

DOI: https://doi.org/10.1115/IJTC2009-15120

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Topics: Adhesion, Failure, Metals, Microelectromechanical systems, Switches, Cycles, Atomic force microscopy, Cantilevers, Optical microscopy, Reliability

Proceedings Papers

Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion

Jie Wu, Shao Wang, Jianmin Miao

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 57-59, October 20–22, 2008

Paper No: IJTC2008-71189

DOI: https://doi.org/10.1115/IJTC2008-71189

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Topics: Friction, Microelectromechanical systems, Stiction, Actuators, Bearings, Bending (Stress), Crystals, Fittings, Manufacturing, Rotation

Proceedings Papers

Limits to Lubrication Theory in Microsystems

John Tichy, Victor Marrero, Diana-Andra Borca-Tasciuc

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 311-313, October 20–22, 2008

Paper No: IJTC2008-71068

DOI: https://doi.org/10.1115/IJTC2008-71068

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Topics: Lubrication theory, Microelectromechanical systems, Design, Film thickness, Fluid-dynamic forces, Wings

Proceedings Papers

Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch

Duc-Cuong Pham, R. Arvind Singh, Jinseok Kim, Sungwook Yang, Eui-Sung Yoon

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 115-117, October 20–22, 2008

Paper No: IJTC2008-71289

DOI: https://doi.org/10.1115/IJTC2008-71289

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Topics: Columns (Structural), Nanoscale phenomena, Silicon, Tribology, Adhesion, Friction, Microelectromechanical systems, Nanostructures , Semiconductor wafers

Proceedings Papers

Optimum Roughness for Minimum Adhesion

D.-L. Liu, J. Martin, N. A. Burnham

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 593-595, October 20–22, 2008

Paper No: IJTC2008-71192

DOI: https://doi.org/10.1115/IJTC2008-71192

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Topics: Adhesion, Surface roughness, Adhesives, Atomic force microscopy, Fractals, Cantilevers, Computer software, Contact mechanics, Microelectromechanical systems, Nanoscale phenomena

Proceedings Papers

Cyclic Loading of an Elastic-Plastic Adhesive Contact

Y. Kadin, Y. Kligerman, I. Etsion

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 27-29, October 20–22, 2008

Paper No: IJTC2008-71055

DOI: https://doi.org/10.1115/IJTC2008-71055

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Topics: Adhesives, Microelectromechanical systems, Computer simulation, Cycles, Deformation, Electrodes, Failure, Plasticity, Simulation, Switches

Proceedings Papers

MEMS Lubrication by Tribochemical Reaction

Michael T. Dugger, David B. Asay, James A. Ohlhausen, Seong H. Kim

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 873-875, October 22–24, 2007

Paper No: IJTC2007-44308

DOI: https://doi.org/10.1115/IJTC2007-44308

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Topics: Lubrication, Microelectromechanical systems, Tribochemistry, Ethanol, Nitrogen, Silicon, Vapors, Failure, Friction, Machinery

Proceedings Papers

In-Situ Vapor Phase Lubrication of MEMS Devices

Seong H. Kim

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 883-884, October 22–24, 2007

Paper No: IJTC2007-44418

DOI: https://doi.org/10.1115/IJTC2007-44418

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Topics: Lubrication, Microelectromechanical systems, Vapors

Proceedings Papers

Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices

David B. Asay, Michael T. Dugger, Seong H. Kim

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 885-887, October 22–24, 2007

Paper No: IJTC2007-44419

DOI: https://doi.org/10.1115/IJTC2007-44419

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Topics: Lubrication, Microelectromechanical systems, Nanotribology, Vapors, Silicon, Adhesion, Lubricants, Ethanol, Failure, Friction

Proceedings Papers

Relations of Microstructure, Piezoelectricity, and Surface Forces at Nanoscale

Hyungoo Lee, Rodrigo Cooper, Bartosz Mika, Hong Liang

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 893-895, October 22–24, 2007

Paper No: IJTC2007-44456

DOI: https://doi.org/10.1115/IJTC2007-44456

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Topics: Nanoscale phenomena, Piezoelectricity, Adhesion, Friction, Atomic force microscopy, Dipoles (Electromagnetism), Electric potential, Microelectromechanical systems, Nanoelectromechanical systems, Polymers

Proceedings Papers

The Effect of Channelling a Polymeric Surface on Its Adhesion and Friction Characteristics

Duc-Cuong Pham, R. Arvind Singh, Hoon Eui Jeong, Kahp Y. Suh, Eui-Sung Yoon

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 791-793, October 22–24, 2007

Paper No: IJTC2007-44137

DOI: https://doi.org/10.1115/IJTC2007-44137

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Topics: Adhesion, Friction, Tribology, Lithography, Manufacturing, Microelectromechanical systems, Microscale devices, Nanoelectromechanical systems, Nanoscale phenomena, Polymer films

Proceedings Papers

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Yonggang Meng, Zhanshe Guo, Hao Wu

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 897-899, October 22–24, 2007

Paper No: IJTC2007-44471

DOI: https://doi.org/10.1115/IJTC2007-44471

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Topics: Friction, Wear, Microelectromechanical systems, Sliding friction, Testing, Cycles, Manufacturing, Microgears, Micromotors, Oxidation

Proceedings Papers

Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication

M. McCarthy, B. Hanrahan, C. Zorman, R. Ghodssi

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 827-829, October 22–24, 2007

Paper No: IJTC2007-44190

DOI: https://doi.org/10.1115/IJTC2007-44190

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Topics: Ball bearings, Lubrication, Microelectromechanical systems, Rolling friction, Thin films, Silicon, Sliding friction, Steel, Lubricants, Plates (structures)

Proceedings Papers

Device and Reliability Physics of Capacitive MEMS

Evgeni Gusev

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 831, October 22–24, 2007

Paper No: IJTC2007-44209

DOI: https://doi.org/10.1115/IJTC2007-44209

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Topics: Microelectromechanical systems, Physics, Reliability, Nanoelectromechanical systems, Cycles, Manufacturing, Packaging

Proceedings Papers

Tribological Characteristics of Materials for MEMS/NEMS by Using Chemically Modified AFM Tip

J. C. Heo, K. S. Kim, K. W. Kim

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 837-839, October 22–24, 2007

Paper No: IJTC2007-44226

DOI: https://doi.org/10.1115/IJTC2007-44226

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Topics: Atomic force microscopy, Microelectromechanical systems, Nanoelectromechanical systems, Tribology, Adhesion, Friction, Plasma desorption mass spectrometry, Coating processes, Coatings, Self-assembly

Proceedings Papers

A MEMS Device for Studying the Friction Behavior of Sidewall Surfaces

Jie Wu, Shao Wang, Jianmin Miao

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 849-851, October 22–24, 2007

Paper No: IJTC2007-44237

DOI: https://doi.org/10.1115/IJTC2007-44237

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Topics: Friction, Microelectromechanical systems, Actuators, Sensors, Displacement, Silicon, Crystals, Image processing, Plates (structures), Sliding friction

Proceedings Papers

Contact Failure Mechanisms in Ohmic-Type MEMS Switches

George G. Adams, Nicol E. McGruer, Lei Chen, Yan Du, Z. J. Guo

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 853-855, October 22–24, 2007

Paper No: IJTC2007-44265

DOI: https://doi.org/10.1115/IJTC2007-44265

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Topics: Failure mechanisms, Microelectromechanical systems, Switches, Failure, Adhesives, Brittleness, Contact mechanics, Contamination, Modeling, Separation (Technology)

Proceedings Papers

Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model

T. Hirayama, K. Sasaki, R. Mizuno, T. Kitagawa, M. Kadotani, T. Matsuoka, H. Yabe

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 223-224, October 22–24, 2007

Paper No: IJTC2007-44101

DOI: https://doi.org/10.1115/IJTC2007-44101

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Topics: Actuators, Bearings, Engineering prototypes, Servomechanisms, Biomechanics, Errors, Integrated circuit fabrication, Microelectromechanical systems, Nanoelectromechanical systems, Nanoscale phenomena

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NARROW

Simultaneous Measurements of Friction Forces and Contact Areas During Shearing of Nanometer-Thick Liquid Lubricant Films

A Finite Element Method Approach to Modeling a Thermal-Electrical-Mechanical Coupled Field Contact

Analysis of Topographical Changes and Adhesion Failures in Gold-to-Gold Metal RF MEMS Switches With Cycling

Friction Characteristics of the Curved Sidewall Surfaces of a Rotary MEMS Device in Oscillating Motion

Limits to Lubrication Theory in Microsystems

Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch

Optimum Roughness for Minimum Adhesion

Cyclic Loading of an Elastic-Plastic Adhesive Contact

MEMS Lubrication by Tribochemical Reaction

In-Situ Vapor Phase Lubrication of MEMS Devices

Effects of Gas Adsorption in Nanotribology and Demonstration of In-Situ Vapor Phase Lubrication of MEMS Devices

Relations of Microstructure, Piezoelectricity, and Surface Forces at Nanoscale

The Effect of Channelling a Polymeric Surface on Its Adhesion and Friction Characteristics

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication

Device and Reliability Physics of Capacitive MEMS

Tribological Characteristics of Materials for MEMS/NEMS by Using Chemically Modified AFM Tip

A MEMS Device for Studying the Friction Behavior of Sidewall Surfaces

Contact Failure Mechanisms in Ohmic-Type MEMS Switches

Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model

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