We have measured pre-sliding tangential deflections (PSTD) between micromachined surfaces of up to 200 nanometers in length before the static friction event using a polysilicon nanotractor actuator [1,2]. The detailed PSTD structure is resolved by a one-nanometer-resolution in-plane optical metrology we have developed, and may be a manifestation of discrete asperity-asperity interactions leading to an effective spatial distribution of friction coefficients. Results indicate a dependence on surface treatment, with a perfluorinated eight-carbon chain monolayer coating showing substantially different PSTD than an eighteen-carbon chain hydrocrabon monolayer. This behavior may qualitatively be related to variations in dynamic versus static friction. We present a simple phenomenological model that captures some of the behavior of PSTD, and suggest some possible microscopic interpretations.
- Tribology Division
Pre-Sliding Tangential Deflections Can Govern the Friction of MEMS Devices
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Corwin, AD, Street, MD, Carpick, RW, Ashurst, WR, & de Boer, MP. "Pre-Sliding Tangential Deflections Can Govern the Friction of MEMS Devices." Proceedings of the ASME/STLE 2004 International Joint Tribology Conference. ASME/STLE 2004 International Joint Tribology Conference, Parts A and B. Long Beach, California, USA. October 24–27, 2004. pp. 113-116. ASME. https://doi.org/10.1115/TRIB2004-64360
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