This paper describes MEMS-based active sliders with micro-actuators. The proposal active slider uses PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. The design procedure for the active slider is discussed. In addition, novel multi-layered composite PZT thin film micro-actuators, which are very important functional micro-devices, are studied, and it is shown that the recently developed PZT thin films have better piezoelectric characteristics than not only conventional sol-gel derived PZT thin films but also sputtered PZT thin films. The micro-machining process for the active slider is also developed and the pico-size active slider is fabricated. The technical issues related to the fabrication of MEMS-based active sliders are discussed.
- Tribology Division
MEMS-Based Active Sliders With Multi-Layered Composite PZT Thin Films in Hard Disk Drives
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Tagawa, N, & Mori, A. "MEMS-Based Active Sliders With Multi-Layered Composite PZT Thin Films in Hard Disk Drives." Proceedings of the ASME/STLE 2002 International Joint Tribology Conference. Magnetic Storage Symposium: Frontiers of Magnetic Hard Disk Drive Tribology and Technology. Cancun, Mexico. October 27–30, 2002. pp. 9-15. ASME. https://doi.org/10.1115/2002-TRIB-0249
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