Some thin films were prepared as solid lubricants on the surfaces of silicon nitride ceramic disk and ball. DLC film about 500–800 nm thickness was deposited on the ceramic surfaces using ion implantation and deposition technology. The surface roundness measure results, as well as 80 to 90 nm, showed that DLC film was shaped uniformly on the ceramic ball surfaces. The ball-on-disk tests showed DLC coating on silicon nitride surfaces could lead the friction coefficient to about 0.1 and endure about 7h at 1.5GPa and 30 mm/s. Ball milling technology was employed to prepare MoS2 film on the ceramic ball surfaces. The film thickness and tribological test results showed that the thin MoS2 film on the ball surfaces, which hardly changed the surface roughness, also improved their wear behaviors.

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