This paper designs a composite microtribology experiment system (CMES) to observe the sidewall friction of silicon micro-component pairs. The CMES is composed of a microtribological chip, an out-chip driving system, a video acquiring system, a laser triangulation displacement measure system (LTDMS), and a data processing system. Each microtribological chip has four cantilever friction pairs arranged anti-symmetrically. The size of the cantilever is 200um×50um×5um. The out-chip driving system loads the normal press force on the microtribological chip and produces reciprocating vibration meanwhile to achieve the friction. The video acquisition system is made up of a zoom microscope, a CCD, and a monitor. The LTDMS includes a diode laser, two optical focusing system, and a PSD (Position Sensitive Detectors). Both the video acquiring system and the LTDMS measures the friction characteristics from static to dynamic. The preliminary experiments shows: 1) The CMES has sufficient robustness and reliability. 2) The phenomenon of stick-slip is observed at static state by the LTDMS; 3) and the friction coefficient decreases with the increasing of the reciprocating frequency.
- Tribology Division
Design of a Composite Microtribology Experiment System for Silicon Sidewalls
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Zhang, W, Shen, S, & Meng, Y. "Design of a Composite Microtribology Experiment System for Silicon Sidewalls." Proceedings of the STLE/ASME 2010 International Joint Tribology Conference. STLE/ASME 2010 International Joint Tribology Conference. San Francisco, California, USA. October 17–20, 2010. pp. 25-27. ASME. https://doi.org/10.1115/IJTC2010-41218
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