This paper designs a composite microtribology experiment system (CMES) to observe the sidewall friction of silicon micro-component pairs. The CMES is composed of a microtribological chip, an out-chip driving system, a video acquiring system, a laser triangulation displacement measure system (LTDMS), and a data processing system. Each microtribological chip has four cantilever friction pairs arranged anti-symmetrically. The size of the cantilever is 200um×50um×5um. The out-chip driving system loads the normal press force on the microtribological chip and produces reciprocating vibration meanwhile to achieve the friction. The video acquisition system is made up of a zoom microscope, a CCD, and a monitor. The LTDMS includes a diode laser, two optical focusing system, and a PSD (Position Sensitive Detectors). Both the video acquiring system and the LTDMS measures the friction characteristics from static to dynamic. The preliminary experiments shows: 1) The CMES has sufficient robustness and reliability. 2) The phenomenon of stick-slip is observed at static state by the LTDMS; 3) and the friction coefficient decreases with the increasing of the reciprocating frequency.

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