Nanocrystalline diamond (NCD) offers great potential for many micro-mechanical systems, particularly where low fiction, thermal mismatch and mechanical integrity are of great importance. The reduction of grain size in NCD films to a few nanometers is, however, accompanied by a significant change in morphological, chemical, mechanical and wear properties. The evaluation of these properties is therefore necessary before designing NCD-coated micro-mechanical components for which reliability, wear and long lifetime are critical issues.

This content is only available via PDF.
You do not currently have access to this content.