Thin films exhibiting nonfouling behavior toward protein and cell attachment were grafted onto different substrates by plasma polymerization and deposition. By combining nonfouling film grafting and partial film etching by Ar ion sputtering through the windows of a shadow mask (Si or PDMS), chemical patterns of different shapes and sizes were produced on polymer substrates. Results from cell culture studies illustrate the effectiveness of the present fabrication process to produce surface micropatterns for controlling the cell shape and morphology, with direct implications in vascular pathology.

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