This paper presents numerical and experimental studies of nanoindentation of a silicon substrate covered by patterned Ni nanodot asperities. A multi-asperity contact model was developed in this study to simulate the contact between a spherical indenter and the Ni nanodot asperities. In this model, the silicon substrate is considered to be deformable and the nanodots are allowed to interact with each other through the deformation of the substrate. The load-deformation relationship predicted by the model was found to be in good agreement with the experimental results. This model can also be used to predict indentation load-deformation relationships of a deformable substrate covered by nanodots with known size and location distributions, but not necessarily following a repetitive pattern.

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