In order to alleviate or eliminate the occurrence of stiction during the actuation of microstructures, the real contact area available for contact must be reduced. Au nanoparticles were intentionally deposited using gas-expanded liquids onto polysilicon cantilever beam arrays to increase surface roughness. The nanoparticle-coated beams were subjected to an actuation voltage of 120 V. Following actuation, the adhesion of beams was quantified by estimating the apparent work of adhesion. Au nanoparticles deposited onto these microstructures were shown to drastically reduce the effects of in-use stiction. Capillary adhesion due to condensation of ambient moisture was effectively eliminated.

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