Tribo-oxidation of metals plays important roles in electro-chemical-mechanical planarization (ECMP). Using an electrochemical-tribological technique, we conducted investigation of tantalum tribo-oxidation during ECMP. Adding an electrochemical system to a tribometer, we were able to monitor surface changes through friction. We were able to generate tantalum oxides with assistance of friction. It was found that meta-stable suboxides of tantalum formed. The mechanisms of tribo-oxidation are experimentally studied and discussed here.
- Tribology Division
Tribo-Oxidation of Tantalum During ECMP
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Gao, F, Kar, P, Wang, K, & Liang, H. "Tribo-Oxidation of Tantalum During ECMP." Proceedings of the STLE/ASME 2008 International Joint Tribology Conference. STLE/ASME 2008 International Joint Tribology Conference. Miami, Florida, USA. October 20–22, 2008. pp. 727-729. ASME. https://doi.org/10.1115/IJTC2008-71212
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