Surface roughness has a significant affect on adhesion. We used a single-asperity model to describe a smooth tip in contact with a rough surface and predicted that an optimal size of asperity will yield a minimum of adhesion. Experimentally, adhesive forces on silicon wafers with varying roughness were measured using AFM cantilevers with varying tip radii. It was found that minima do exist, and for all tip radii, the adhesion falls significantly for roughness greater than 1–2 nm and drops at higher roughness for larger tips. In addition to RMS roughness, the roughness exponent is another important parameter for the characterization of rough surfaces and its affect on adhesion was also investigated. We developed computer programs to simulate a set of fractal rough surfaces with differing roughness exponents. The adhesive forces between an AFM tip and the fractal surfaces were calculated and the adhesion was seen to decrease as the roughness exponent increases. This work should help minimize MEMS stiction and progress the understanding of nanoscale contact mechanics.
Skip Nav Destination
STLE/ASME 2008 International Joint Tribology Conference
October 20–22, 2008
Miami, Florida, USA
Conference Sponsors:
- Tribology Division
ISBN:
978-0-7918-4336-9
PROCEEDINGS PAPER
Optimum Roughness for Minimum Adhesion Available to Purchase
D.-L. Liu,
D.-L. Liu
Worcester Polytechnic Institute, Worcester, MA
Search for other works by this author on:
J. Martin,
J. Martin
Analog Devices Incorporated, Cambridge, MA
Search for other works by this author on:
N. A. Burnham
N. A. Burnham
Worcester Polytechnic Institute, Worcester, MA
Search for other works by this author on:
D.-L. Liu
Worcester Polytechnic Institute, Worcester, MA
J. Martin
Analog Devices Incorporated, Cambridge, MA
N. A. Burnham
Worcester Polytechnic Institute, Worcester, MA
Paper No:
IJTC2008-71192, pp. 593-595; 3 pages
Published Online:
June 5, 2009
Citation
Liu, D, Martin, J, & Burnham, NA. "Optimum Roughness for Minimum Adhesion." Proceedings of the STLE/ASME 2008 International Joint Tribology Conference. STLE/ASME 2008 International Joint Tribology Conference. Miami, Florida, USA. October 20–22, 2008. pp. 593-595. ASME. https://doi.org/10.1115/IJTC2008-71192
Download citation file:
8
Views
Related Proceedings Papers
Related Articles
A Solution for Lightly Loaded Adhesive Rough Surfaces With Application to MEMS
J. Tribol (January,2005)
Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical Systems
J. Tribol (October,1998)
Robust Strategies for Automated AFM Force Curve Analysis—II: Adhesion-Influenced Indentation of Soft, Elastic Materials
J Biomech Eng (December,2007)
Related Chapters
Contact Laws
Contact in Structural Mechanics: A Weighted Residual Approach
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies
Getting Started
Technical Writing A–Z: A Commonsense Guide to Engineering Reports and Theses (U.S. Edition)