Frictional characteristics of PTFE films deposited by HFCVD method on glass substrates were determined using ball-on-flat and ball-on-disk configurations. Optical microscopy was used to examine the surface profile of the PTFE films left by the UMT after the tests. In general, the COF of the HFCVD-PTFE thin films on glass decreases at low sliding speeds and high loads. Limited number of durability tests show that the COF stabilizes to a fixed value different than the initial one. Based on the results of the tests conducted in this work, it is concluded that the PTFE films deposited by HFCVD display the similar properties to bulk PTFE.

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