A probabilistic model of third-body particle embedment was derived for surfaces separated by a hydrodynamic slurry film. The analysis yields estimates of the density of embedded particles in terms of surface topography parameters, particle size distribution, and mean surface gap determined by the applied load, macroscopic geometry of the moving surfaces, and fluid properties. The model has direct application to chemical-mechanical polishing and fabrication of lapping plates for polishing magnetic recording heads.

This content is only available via PDF.
You do not currently have access to this content.