LIGA-Fabricated Meso Scale Foil Gas Bearings for Palm-Sized Microturbomachinery Available to Purchase

Palm-sized mesoscale microturbomachinery (100∼200W) have broad potential applications in micro power generation areas, such as air/hydrogen management system for low temperature fuel cells, palm-sized micro gas turbines for unmanned air vehicles, robots, very small solid oxide fuel cells, micro power generations for space micro/nano satellites, etc. This paper reports recent progress on design, manufacturing of mesoscale (bearing diameter of 5mm) foil gas bearings applicable to the mesoscale microturbomachinery. With self-generated preload of 0.4N to the bearing, the mesoscale foil gas bearings were predicted to be stable up to the maximum simulated speed of 600,000 rpm. Manufacturing processes involved UV and X-ray lithography, electroplating, and precision forming. Test rigs were designed and constructed for performance tests of the manufactured mesoscale gas bearings.