Topographical modification of silicon (100) wafers was performed by the creation of nano-structures that consists of pillars with different pitch. The modified surfaces were investigated for their tribological characteristics at nano-scale in comparison with those of the bare silicon surface. Results showed that the modified surfaces have superior nano-tribological properties, as they reduce adhesion and friction forces significantly when compared to the bare silicon surface. Among the nano-structures, adhesion and friction forces reduce with the pitch. The topographical modification of silicon surfaces provides a promising solution to improve the tribological properties of miniaturized devices such as microelectromechanical systems (MEMS) in which silicon is a typically used material.
- Tribology Division
Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch
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Pham, D, Singh, RA, Kim, J, Yang, S, & Yoon, E. "Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch." Proceedings of the STLE/ASME 2008 International Joint Tribology Conference. STLE/ASME 2008 International Joint Tribology Conference. Miami, Florida, USA. October 20–22, 2008. pp. 115-117. ASME. https://doi.org/10.1115/IJTC2008-71289
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