Topographical modification of silicon (100) wafers was performed by the creation of nano-structures that consists of pillars with different pitch. The modified surfaces were investigated for their tribological characteristics at nano-scale in comparison with those of the bare silicon surface. Results showed that the modified surfaces have superior nano-tribological properties, as they reduce adhesion and friction forces significantly when compared to the bare silicon surface. Among the nano-structures, adhesion and friction forces reduce with the pitch. The topographical modification of silicon surfaces provides a promising solution to improve the tribological properties of miniaturized devices such as microelectromechanical systems (MEMS) in which silicon is a typically used material.
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STLE/ASME 2008 International Joint Tribology Conference
October 20–22, 2008
Miami, Florida, USA
Conference Sponsors:
- Tribology Division
ISBN:
978-0-7918-4336-9
PROCEEDINGS PAPER
Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch
Duc-Cuong Pham,
Duc-Cuong Pham
Korea Institute of Science and Technology, Seoul, South Korea
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R. Arvind Singh,
R. Arvind Singh
Korea Institute of Science and Technology, Seoul, South Korea
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Jinseok Kim,
Jinseok Kim
Korea Institute of Science and Technology, Seoul, South Korea
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Sungwook Yang,
Sungwook Yang
Korea Institute of Science and Technology, Seoul, South Korea
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Eui-Sung Yoon
Eui-Sung Yoon
Korea Institute of Science and Technology, Seoul, South Korea
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Duc-Cuong Pham
Korea Institute of Science and Technology, Seoul, South Korea
R. Arvind Singh
Korea Institute of Science and Technology, Seoul, South Korea
Jinseok Kim
Korea Institute of Science and Technology, Seoul, South Korea
Sungwook Yang
Korea Institute of Science and Technology, Seoul, South Korea
Eui-Sung Yoon
Korea Institute of Science and Technology, Seoul, South Korea
Paper No:
IJTC2008-71289, pp. 115-117; 3 pages
Published Online:
June 5, 2009
Citation
Pham, D, Singh, RA, Kim, J, Yang, S, & Yoon, E. "Nano-Scale Tribological Properties of Silicon Pillars With the Variation in Pitch." Proceedings of the STLE/ASME 2008 International Joint Tribology Conference. STLE/ASME 2008 International Joint Tribology Conference. Miami, Florida, USA. October 20–22, 2008. pp. 115-117. ASME. https://doi.org/10.1115/IJTC2008-71289
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