In-Situ Vapor Phase Lubrication of MEMS Devices

ASME/STLE 2007 International Joint Tribology Conference

October 22–24, 2007

San Diego, California, USA

Conference Sponsors:

ISBN:

0-7918-4810-8

PROCEEDINGS PAPER

Seong H. Kim

Pennsylvania State University, University Park, PA

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Seong H. Kim

Pennsylvania State University, University Park, PA

Paper No: IJTC2007-44418, pp. 883-884; 2 pages

https://doi.org/10.1115/IJTC2007-44418

Published Online: March 23, 2009

The basic principles, potentials, and challenges of the in-situ vapor phase lubrication will be addressed in the MEMS panel discussion.

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