Advances in various areas of precision mechanics, such as semi-conductor manufacturing equipment, MEMS/NEMS, biomechanics, nano-imprint and nano-technology, have required ultraprecise positioning techniques with nanometer scale accuracy to be developed. To meet such specific needs, many different kinds of actuator capable of ultraprecise motions have recently been produced. However, each actuator has some inherent problems; for example, actuators containing piezoelectric elements have been reported to cause hysteresis errors, thermal drifts, deterioration, and destruction. Based on this background, highly reliable and accurate actuators are strongly required.
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Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model
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Hirayama, T, Sasaki, K, Mizuno, R, Kitagawa, T, Kadotani, M, Matsuoka, T, & Yabe, H. "Pneumatic Servo Bearing Actuator for Ultraprecise Positioning: Basic Performances of Prototype Model." Proceedings of the ASME/STLE 2007 International Joint Tribology Conference. ASME/STLE 2007 International Joint Tribology Conference, Parts A and B. San Diego, California, USA. October 22–24, 2007. pp. 223-224. ASME. https://doi.org/10.1115/IJTC2007-44101
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