For many applications, radio frequency microelectromechanical systems (RF MEMS) switches require very fast switching times so that they are capable of switching thousands of times each second. Contact adhesion tends to slow switches by increasing the time required to break the contact and open the switch. Previous work showed that typical switches have a contact opening time exceeding 1 ms, which is far too slow for many applications. This paper presents a dynamic, transient model to predict the time required to break the contact. The model considers both the motion of the switch body and the adhesion at the contact. The model has been validated by comparing it to experimental data. The model shows that vibrations in the switch body can be instrumental in dramatically reducing contact opening time by a factor of nearly 1000, leading to acceptable switch speeds.
Skip Nav Destination
STLE/ASME 2006 International Joint Tribology Conference
October 23–25, 2006
San Antonio, Texas, USA
Conference Sponsors:
- Tribology Division
ISBN:
0-7918-4259-2
PROCEEDINGS PAPER
A Dynamic Model of Microscale Contact Breaking in RF MEMS Switches Available to Purchase
Brian D. Jensen
Brian D. Jensen
Brigham Young University, Provo, UT
Search for other works by this author on:
Gavin Gee
Brigham Young University, Provo, UT
Brian D. Jensen
Brigham Young University, Provo, UT
Paper No:
IJTC2006-12297, pp. 1475-1479; 5 pages
Published Online:
October 2, 2008
Citation
Gee, G, & Jensen, BD. "A Dynamic Model of Microscale Contact Breaking in RF MEMS Switches." Proceedings of the STLE/ASME 2006 International Joint Tribology Conference. Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology. San Antonio, Texas, USA. October 23–25, 2006. pp. 1475-1479. ASME. https://doi.org/10.1115/IJTC2006-12297
Download citation file:
7
Views
Related Proceedings Papers
Related Articles
Measurement of Adhesion Force and Elongation of Molecularly Thin Lubricant by Using Transient Response of SPM Cantilever
J. Tribol (October,2004)
Variable Structure Control of a Mass Spring Damper Subjected to a Unilateral Constraint: Application to Radio-Frequency MEMS Switches
J. Dyn. Sys., Meas., Control (August,2018)
Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device
J. Comput. Nonlinear Dynam (April,2012)
Related Chapters
Semiotics Connections in Design
International Conference on Future Computer and Communication, 3rd (ICFCC 2011)
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies
Design of Experiments for Model Development and Validation
Nonlinear Regression Modeling for Engineering Applications: Modeling, Model Validation, and Enabling Design of Experiments