A finite element model was built to study the contact of a micro hemisphere in elastic-plastic contact with a rigid flat. The effect of adhesion on the deformation and stress fields is included, using the Lennard-Jones potential, which makes this model applicable to a wide range of the Tabor parameter. Both loading and unloading are considered. In the case of Ruthenium (Ru), the results demonstrate reasonable agreement with a previous model applicable to the DMT region. However for a Gold (Au) contact, which is in the JKR region, the results differ significantly.

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