A special microdevice was designed and tested to characterize electrical effects on interfacial adhesion in microelectromechanical systems (MEMS). The adhesion force was measured as a function of the voltage applied across the contact interface. An increase in the adhesion force was attributed to electrostatic attraction resulting from trapped charges. A thermal effect at contacting asperities enhanced the adhesion force significantly. At a critical voltage, microwelding at asperity contacts caused the surfaces to adhere strongly to each other. The adhered device could not be released within its operation limits, indicating the development of a very high adhesion force.
- Tribology Division
Electrical Effect on the Adhesion Force at MEMS Contact Interfaces
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Timpe, SJ, & Komvopoulos, K. "Electrical Effect on the Adhesion Force at MEMS Contact Interfaces." Proceedings of the STLE/ASME 2006 International Joint Tribology Conference. Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology. San Antonio, Texas, USA. October 23–25, 2006. pp. 1447-1448. ASME. https://doi.org/10.1115/IJTC2006-12291
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