Simulation of Sub-Micron Thermal Transport in a MOSFET Using a Hybrid Fourier-BTE Model

Self-heating has emerged as a critical bottleneck to scaling in modern transistors. In simulating heat conduction in these devices, it is important to account for the granularity of phonon transport since electron-phonon scattering occurs preferentially to select phonon groups. However, a complete accounting for phonon dispersion, polarization and scattering is very expensive if the Boltzmann transport equation (BTE) is used. Moreover, difficulties with convergence are encountered when the phonon Knudsen number becomes small. In this paper we simulate a two-dimensional bulk MOSFET hotspot problem using a partially-implicit hybrid BTE-Fourier solver which is significantly less expensive than a full BTE solution, and which shows excellent convergence characteristics. Volumetric heat generation from electron-phonon collisions is taken from a Monte Carlo simulation of electron transport and serves as a heat source term in the governing transport equations. The hybrid solver is shown to perform well in this highly non-equilibrium situation, matching the solutions obtained from a pure all-BTE solution, but at significantly lower computational cost. The paper establishes that this new model and solution methodology are viable for the simulation of thermal transport in other emerging transistor designs and in other nanotechnology applications as well.