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Proceedings Papers
Fabrication of Rotary Comb Drives With Floating Center
Available to Purchase
Proc. ASME. IDETC-CIE2024, Volume 8: 18th International Conference on Micro- and Nanosystems (MNS), V008T08A007, August 25–28, 2024
Publisher: American Society of Mechanical Engineers
Paper No: DETC2024-143428
Proceedings Papers
Effects of Gas Flow Rates and Sample Position on Carbon-Infiltrated Carbon Nanotube Growth
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Proc. ASME. IDETC-CIE2023, Volume 9: 17th International Conference on Micro- and Nanosystems (MNS), V009T09A005, August 20–23, 2023
Publisher: American Society of Mechanical Engineers
Paper No: DETC2023-116763
Proceedings Papers
An Radio Frequency Impedance Matching Control Benchmark System for Advanced Control Strategies Evaluation
Available to Purchase
Proc. ASME. IDETC-CIE2021, Volume 7: 17th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA), V007T07A004, August 17–19, 2021
Publisher: American Society of Mechanical Engineers
Paper No: DETC2021-70211
Proceedings Papers
Simulation of Submicron Particle Deposition in Laminar and Turbulent Stagnation Point Flows
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Proc. ASME. CIE91, ASME 1991 Computers in Engineering Conference: Volume 1 — Artificial Intelligence; Expert Systems; CAD/CAM/CAE; Computational Fluid/Thermal Engineering, 565-574, August 18–22, 1991
Publisher: American Society of Mechanical Engineers
Paper No: CIE1991-0070
Proceedings Papers
Particle Transport in CVD and Diffusion Processes
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Proc. ASME. CIE92, ASME 1992 International Computers in Engineering Conference: Volume 1 — Artificial Intelligence; Expert Systems; CAD/CAM/CAE; Computers in Fluid Mechanics/Thermal Systems, 483-490, August 2–6, 1992
Publisher: American Society of Mechanical Engineers
Paper No: CIE1992-0057
Proceedings Papers
Design and Fabrication of Microelectromechanical Systems
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Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 251-258, September 13–16, 1992
Publisher: American Society of Mechanical Engineers
Paper No: DETC1992-0222
Proceedings Papers
Mass Transport and Particle Transport in an LPCVD Process
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Proc. ASME. CIE93, 13th Computers in Engineering Conference, 213-219, August 8–12, 1993
Publisher: American Society of Mechanical Engineers
Paper No: CIE1993-0027
Proceedings Papers
Active Vibration Control of Flexible Space Structures by Using Piezoelectric Sensors and Actuators
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Proc. ASME. DETC93, 14th Biennial Conference on Mechanical Vibration and Noise: Vibration and Control of Mechanical Systems, 169-179, September 19–22, 1993
Publisher: American Society of Mechanical Engineers
Paper No: DETC1993-0232
Proceedings Papers
Multiple-Mode Input Shaping Sequences for Reducing Residual Vibrations
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Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Machine Elements and Machine Dynamics, 11-16, September 11–14, 1994
Publisher: American Society of Mechanical Engineers
Paper No: DETC1994-0237
Proceedings Papers
Design Considerations for Manufacturability of MEMS Comb Actuators
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Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A047, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/DFM-1311
Proceedings Papers
Removal of Submicron Particles Using High Frequency Ultrasonics
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Proc. ASME. DETC-CIE96, Volume 6: 16th Computers in Engineering Conference, V006T06A018, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/CIE-1352
Proceedings Papers
Multivariable Feedback Relevant System Identification of a Wafer Stepper System
Available to Purchase
Proc. ASME. DETC97, Volume 1A: 16th Biennial Conference on Mechanical Vibration and Noise, V01AT03A014, September 14–17, 1997
Publisher: American Society of Mechanical Engineers
Paper No: DETC97/VIB-4243
Proceedings Papers
Analytical Modeling for Semiconductor Wafer Fab Environments in Support of Drum-Buffer-Rope Implementation
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Proc. ASME. DETC98, Volume 4: 3rd Design for Manufacturing Conference, V004T04A045, September 13–16, 1998
Publisher: American Society of Mechanical Engineers
Paper No: DETC98/DFM-5751
Proceedings Papers
Slurry Residue Removal in Post Chemical Mechanical Polishing
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Proc. ASME. DETC99, Volume 2: 19th Computers and Information in Engineering Conference, 87-92, September 12–16, 1999
Publisher: American Society of Mechanical Engineers
Paper No: DETC99/CIE-9049
Proceedings Papers
Microfabrication and Characterization of Electro-Thermal-Compliant Micro Devices
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Proc. ASME. IDETC-CIE2000, Volume 7A: 26th Biennial Mechanisms and Robotics Conference, 621-633, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/MECH-14118
Proceedings Papers
Designing a Requirement Driven Product Development Process
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Proc. ASME. IDETC-CIE2001, Volume 4: 13th International Conference on Design Theory and Methodology, 11-20, September 9–12, 2001
Publisher: American Society of Mechanical Engineers
Paper No: DETC2001/DTM-21682
Proceedings Papers
Effect of Piezoceramic Hysteresis in Passive and Hybrid Structural Acoustic Control
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Proc. ASME. IDETC-CIE2001, Volume 6B: 18th Biennial Conference on Mechanical Vibration and Noise, 1379-1388, September 9–12, 2001
Publisher: American Society of Mechanical Engineers
Paper No: DETC2001/VIB-21465
Proceedings Papers
Design, Development and Characterization of a Wrap Spring Clutch/Brake Mechanism As a Knee Joint for an Assistive Exoskeleton
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Proc. ASME. IDETC-CIE2020, Volume 9: 40th Computers and Information in Engineering Conference (CIE), V009T09A035, August 17–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: DETC2020-22444
Proceedings Papers
Direct Label Free Detection of Orchid Virus Using a Micro/Nano Hybrid Structured Biosensor
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Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A002, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-97198
Proceedings Papers
Genetically Modified Soybean Detection Using a Biosensor Electrode With Self-Assembled Gold Nanoparticles on a Micro Hemisphere Array
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Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A001, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-97112
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