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Proceedings Papers

Introduction of Two-Link, In-Plane, Bistable Compliant MEMS

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Brian D. Jensen, Larry L. Howell, Linton G. Salmon
Proc. ASME. DETC98, Volume 1A: 25th Biennial Mechanisms Conference, V01AT01A003, September 13–16, 1998
Publisher: American Society of Mechanical Engineers
Paper No: DETC98/MECH-5837
https://doi.org/10.1115/DETC98/MECH-5837
View Paper titled, Introduction of Two-Link, In-Plane, Bistable Compliant MEMS
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Topics: Microelectromechanical systems, Design, Deflection, Energy efficiency, Energy storage, Manufacturing, Micromechanical devices, Polysilicon, Testing
Proceedings Papers

Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors

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Nadia Ebrahimpour Tolouei, Shima Ghamari, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A003, August 17–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: DETC2020-22207
https://doi.org/10.1115/DETC2020-22207
View Paper titled, Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors
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Topics: Sensors, Silicon, Electrodes, Capacitance, Diffusion (Physics), Electrochemical impedance spectroscopy, Coating processes, Coatings, Contamination, Electrochemistry
Proceedings Papers

Development of a MEMS Chemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy

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Nadia Ebrahimpour Tolouei, Md Ebrahim Khalil Bhuiyan, Michael Hankins, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A002, August 17–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: DETC2020-22185
https://doi.org/10.1115/DETC2020-22185
View Paper titled, Development of a MEMS Chemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy
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Topics: Electrochemical impedance spectroscopy, Microelectromechanical systems, Phthalate plasticizers, Sensors, Food products, Water, Capacitance, Diffusion (Physics), Dimensions, Electrodes
Proceedings Papers

Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask

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Md Ebrahim Khalil Bhuiyan, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A011, August 17–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: DETC2020-22497
https://doi.org/10.1115/DETC2020-22497
View Paper titled, Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask
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Topics: Pressure sensors, Sensors, Design, Pressure, Capacitance, Membranes, Dimensions, Engineering simulation, Etching, Finite element analysis
Proceedings Papers

Development of Three-Dimensional MEMS Biochemical Sensors for Low Concentration Aqueous Solutions

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Roya Mazrouei, Bryan Kier, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A004, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-98071
https://doi.org/10.1115/DETC2019-98071
View Paper titled, Development of Three-Dimensional MEMS Biochemical Sensors for Low Concentration Aqueous Solutions
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Topics: Microelectromechanical systems, Sensors, Electrodes, Design, Electrochemical impedance spectroscopy, Electrochemistry, Enzymes, Phthalate plasticizers, Polysilicon, Proteins
Proceedings Papers

Detection of Pathogens and Formation of Biofilms Using a Three-Dimensional Biomimetic Biosensing Platform

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Roya Mazrouei, Minako Sumita, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A006, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-86222
https://doi.org/10.1115/DETC2018-86222
View Paper titled, Detection of Pathogens and Formation of Biofilms Using a Three-Dimensional Biomimetic Biosensing Platform
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Topics: Biomimetics, Capacitance, Electrodes, Biosensors, Microorganisms, Finite element methods, Finite element model, Food safety, Polymers, Polysilicon
Proceedings Papers

Dynamics of an Imperfect Microbeam Considering its Exact Shape

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Ahmad M. Bataineh, Mohammad I. Younis
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A010, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34917
https://doi.org/10.1115/DETC2014-34917
View Paper titled, Dynamics of an Imperfect Microbeam Considering its Exact Shape
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Topics: Dynamics (Mechanics), Microbeams, Shapes, Differential equations, Micromachining, Arches, Dynamic response, Eigenvalues, Frequency response, Mode shapes
Proceedings Papers

A Metamorphic Erectable Cell Restraint (MECR)

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Gregory H. Teichert, Quentin T. Aten, Melanie Easter, Sandra Burnett, Larry L. Howell, Brian D. Jensen
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 197-203, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70475
https://doi.org/10.1115/DETC2012-70475
View Paper titled, A Metamorphic Erectable Cell Restraint (MECR)
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Topics: Compliant mechanisms, Engineering prototypes, Grippers, Microelectromechanical systems, Microscale devices, Polysilicon
Proceedings Papers

An Imperfect Microbeam Electrically Actuated: Experimental Investigation and Parameter Identification

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Laura Ruzziconi, Ahmad M. Bataineh, Mohammad I. Younis, Stefano Lenci
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 87-94, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70505
https://doi.org/10.1115/DETC2012-70505
View Paper titled, An Imperfect Microbeam Electrically Actuated: Experimental Investigation and Parameter Identification
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Topics: Frequency response, Microbeams, Microelectromechanical systems, Approximation, Dynamics (Mechanics), Engineering simulation, Excitation, Geometry, Laser Doppler vibrometers, Microfabrication
Proceedings Papers

Integrated Piezoresistive Flexure Model in Polysilicon

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Gerrit T. Larsen, Larry L. Howell, Brian D. Jensen
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 279-286, August 28–31, 2011
Publisher: American Society of Mechanical Engineers
Paper No: DETC2011-47902
https://doi.org/10.1115/DETC2011-47902
View Paper titled, Integrated Piezoresistive Flexure Model in Polysilicon
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Topics: Bending (Stress), Polysilicon, Stress, Resistors, Design, Optimization, Sensors
Proceedings Papers

An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Devices Actuated Electrostatically

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Fadi M. Alsaleem, Mohammad I. Younis
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 583-595, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-86909
https://doi.org/10.1115/DETC2009-86909
View Paper titled, An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Devices Actuated Electrostatically
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Topics: Microelectromechanical systems, Accelerometers, Resonance, Cantilevers, Damping, Dynamics (Mechanics), Excitation, Microbeams, Nonlinear dynamics, Polysilicon
Proceedings Papers

The Static and Dynamic Behavior of MEMS Arches Under Electrostatic Actuation

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Hassen M. Ouakad, Mohammad I. Younis, Fadi M. Alsaleem, Ronald Miles, Weili Cui
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 607-616, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87024
https://doi.org/10.1115/DETC2009-87024
View Paper titled, The Static and Dynamic Behavior of MEMS Arches Under Electrostatic Actuation
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Topics: Arches, Microelectromechanical systems, Stress, Dynamic response, Microbeams, Micromachining, Polysilicon, Resonance, Vibration
Proceedings Papers

MEMS Nanoinjector for Injecting Foreign DNA Into Living Cells

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Quentin Aten
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 751, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87581
https://doi.org/10.1115/DETC2009-87581
View Paper titled, MEMS Nanoinjector for Injecting Foreign DNA Into Living Cells
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Topics: Biological cells, DNA, Microelectromechanical systems, Polysilicon, Electron microscopes, Electron microscopy, Grasping, Latex
Proceedings Papers

Testing of a Pumpless MEMS Microinjection Needle Employing Electrostatic Attraction and Repulsion of DNA

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Quentin T. Aten, Brian D. Jensen, Sandra H. Burnett
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 723-730, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49548
https://doi.org/10.1115/DETC2008-49548
View Paper titled, Testing of a Pumpless MEMS Microinjection Needle Employing Electrostatic Attraction and Repulsion of DNA
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Topics: DNA, Microelectromechanical systems, Microneedles, Testing, Engineering prototypes, Micromachining, Polysilicon
Proceedings Papers

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

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Ozlem Sardan, Karin N. Andersen, A. Nicole MacDonald, Ole Sigmund, Peter Bo̸ggild, Andy Horsewell
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 629-631, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49543
https://doi.org/10.1115/DETC2008-49543
View Paper titled, Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers
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Topics: Focused ion beams, Polysilicon, Topology, End effectors, Manufacturing, Milling, Photolithography
Proceedings Papers

Topology Optimized Microgrippers for Nanomanipulation of Carbon Nanotubes

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Ozlem Sardan, Volkmar Eichhorn, Dirch H. Petersen, Sergej Fatikow, Ole Sigmund, Peter Bo̸ggild
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 799-801, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49540
https://doi.org/10.1115/DETC2008-49540
View Paper titled, Topology Optimized Microgrippers for Nanomanipulation of Carbon Nanotubes
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Topics: Carbon nanotubes, Topology, Actuators, Design, Engineering simulation, Finite element analysis, Manufacturing, Optimization, Polysilicon, Probes
Proceedings Papers

On Design of Electro-Thermally Compliant MEMS for Strength

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Rajat Saxena, Anupam Saxena
Proc. ASME. IDETC-CIE2003, Volume 2: 29th Design Automation Conference, Parts A and B, 987-998, September 2–6, 2003
Publisher: American Society of Mechanical Engineers
Paper No: DETC2003/DAC-48807
https://doi.org/10.1115/DETC2003/DAC-48807
View Paper titled, On Design of Electro-Thermally Compliant MEMS for Strength
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Topics: Design, Microelectromechanical systems, Stress, Temperature, Topology, Honeycomb structures, Optimization, Polysilicon, Relaxation (Physics), Stiffness
Proceedings Papers

Strain at Fracture Data for Use in Polysilicon Microsystem Design

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Deanne Clements Kemeny, Larry L. Howell, Sarah Fort, Susan Bromley, Nathan D. Masters
Proc. ASME. IDETC-CIE2002, Volume 5: 27th Biennial Mechanisms and Robotics Conference, 805-811, September 29–October 2, 2002
Publisher: American Society of Mechanical Engineers
Paper No: DETC2002/MECH-34292
https://doi.org/10.1115/DETC2002/MECH-34292
View Paper titled, Strain at Fracture Data for Use in Polysilicon Microsystem Design
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Topics: Compliant mechanisms, Design, Fracture (Materials), Fracture (Process), Microelectromechanical systems, Polysilicon