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Proceedings Papers

Fabrication of Rotary Comb Drives With Floating Center

Matteo Verotti, Alvise Bagolini, Leandro Lorenzelli, Rocco Crescenzi, Nicola Pio Belfiore
Proc. ASME. IDETC-CIE2024, Volume 8: 18th International Conference on Micro- and Nanosystems (MNS), V008T08A007, August 25–28, 2024
Publisher: American Society of Mechanical Engineers
Paper No: DETC2024-143428
https://doi.org/10.1115/DETC2024-143428
View Paper titled, Fabrication of Rotary Comb Drives With Floating Center
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Topics: Manufacturing, Linkages, Design, Kinematics, Microelectromechanical systems, Semiconductor wafers, Silicon-on-insulator, Engineering prototypes, Etching, Grasping
Proceedings Papers

Relationships Among Band Tension, Sensor Pressure, Patient Comfort, and Puslatile Signal Quality for Wrist Worn Health Monitoring Devices

Thomas Naylor, Roger Black, Cameron Hernandez, Brian D. Jensen
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A002, August 14–17, 2022
Publisher: American Society of Mechanical Engineers
Paper No: DETC2022-90637
https://doi.org/10.1115/DETC2022-90637
View Paper titled, Relationships Among Band Tension, Sensor Pressure, Patient Comfort, and Puslatile Signal Quality for Wrist Worn Health Monitoring Devices
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Topics: Pressure, Sensors, Signals, Tension, Electrodes, Micromachining, Carbon, Carbon nanotubes, Corrosion, Design
Proceedings Papers

Design and Fabrication of Microelectromechanical Systems

G. K. Ananthasuresh, Sridhar Kota, Selden B. Crary, Kensall D. Wise
Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 251-258, September 13–16, 1992
Publisher: American Society of Mechanical Engineers
Paper No: DETC1992-0222
https://doi.org/10.1115/DETC1992-0222
View Paper titled, Design and Fabrication of Microelectromechanical Systems
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Topics: Design, Manufacturing, Microelectromechanical systems, Blocks (Building materials), Micromachining, Micromechanical devices, Sensors, Boron, Circuits, Dimensions
Proceedings Papers

An Introduction to Smart Fractal Structures and Mechanisms

Mohsen Shahinpoor
Proc. ASME. DETC93, 14th Biennial Conference on Mechanical Vibration and Noise: Intelligent Structures, Materials, and Vibrations, 67-74, September 19–22, 1993
Publisher: American Society of Mechanical Engineers
Paper No: DETC1993-0160
https://doi.org/10.1115/DETC1993-0160
View Paper titled, An Introduction to Smart Fractal Structures and Mechanisms
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Topics: Fractals, Kinematics, Manipulators, Computers, Dynamics (Mechanics), Geometry, Micromachining, Robots, Solids
Proceedings Papers

The Role of Compliance in the Design of MEMS

G. K. Ananthasuresh, Sridhar Kota
Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A045, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/DFM-1309
https://doi.org/10.1115/96-DETC/DFM-1309
View Paper titled, The Role of Compliance in the Design of MEMS
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Topics: Design, Design for Manufacturing, Microelectromechanical systems, Design engineering, Micromachining
Proceedings Papers

Design and Control of a Linear Electrostrictive Motor

Min Hu, Hejun Du, Shihfu Ling, Yong Li, Zhaoying Zhou
Proc. ASME. DETC99, Volume 6: International Symposium on Motion and Vibration Control, 303-307, September 12–16, 1999
Publisher: American Society of Mechanical Engineers
Paper No: DETC99/MOVIC-8423
https://doi.org/10.1115/DETC99/MOVIC-8423
View Paper titled, Design and Control of a Linear Electrostrictive Motor
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Topics: Design, Engines, Motors, Electrical discharge machining, Engineering prototypes, Resolution (Optics), Thrust, Algorithms, Engine design, Errors
Proceedings Papers

Microfabrication and Characterization of Electro-Thermal-Compliant Micro Devices

Jun Li, G. K. Ananthasuresh
Proc. ASME. IDETC-CIE2000, Volume 7A: 26th Biennial Mechanisms and Robotics Conference, 621-633, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/MECH-14118
https://doi.org/10.1115/DETC2000/MECH-14118
View Paper titled, Microfabrication and Characterization of Electro-Thermal-Compliant Micro Devices
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Topics: Actuators, Compliant mechanisms, Excimer lasers, Heating, Joules, Materials properties, Metals, Microelectromechanical systems, Microfabrication, Micromachining
Proceedings Papers

Part to Art: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS

Venkat A. Venkataraman, Radha Sarma, Suresh G. K. Ananthasuresh
Proc. ASME. IDETC-CIE2000, Volume 2: 26th Design Automation Conference, 357-370, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/DAC-14251
https://doi.org/10.1115/DETC2000/DAC-14251
View Paper titled, Part to Art: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS
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Topics: Design, Geometric modeling, Microelectromechanical systems, Micromachining
Proceedings Papers

Ortho-Planar Mechanisms

John J. Parise, Larry L. Howell, Spencer P. Magleby
Proc. ASME. IDETC-CIE2000, Volume 7B: 26th Biennial Mechanisms and Robotics Conference, 1279-1286, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/MECH-14193
https://doi.org/10.1115/DETC2000/MECH-14193
View Paper titled, Ortho-Planar Mechanisms
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Topics: Compliant mechanisms, Microelectromechanical systems, Micromachining, Micromechanical devices
Proceedings Papers

A Declarative Feature-Based Cross Sectional Design Tool for Surface Micromachined MEMS

Feng Gao, Radha Sarma
Proc. ASME. IDETC-CIE2001, Volume 1: 21st Computers and Information in Engineering Conference, 993-1002, September 9–12, 2001
Publisher: American Society of Mechanical Engineers
Paper No: DETC2001/CIE-21775
https://doi.org/10.1115/DETC2001/CIE-21775
View Paper titled, A Declarative Feature-Based Cross Sectional Design Tool for Surface Micromachined MEMS
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Topics: Design, Microelectromechanical systems, Micromachining
Proceedings Papers

Wide Range Highly Sensitive Pressure Sensor Based on Heated Micromachined Arch Beam

Nouha Alcheikh, Amal Z. Hajjaj, Mohammad I. Younis
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A010, August 18–21, 2019
Publisher: American Society of Mechanical Engineers
Paper No: DETC2019-97995
https://doi.org/10.1115/DETC2019-97995
View Paper titled, Wide Range Highly Sensitive Pressure Sensor Based on Heated Micromachined Arch Beam
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Topics: Arches, Micromachining, Pressure sensors, Pressure, Resonance, Biomedicine, Bridges (Structures), Buckling, Carbon nanotubes, Cooling
Proceedings Papers

Nonlinear Static and Dynamic Behavior of an Imperfect Circular Microplate Under Electrostatic Actuation

Aymen Jallouli, Najib Kacem, Joseph Lardies
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A013, August 6–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: DETC2017-67996
https://doi.org/10.1115/DETC2017-67996
View Paper titled, Nonlinear Static and Dynamic Behavior of an Imperfect Circular Microplate Under Electrostatic Actuation
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Topics: Microplates, Hardening, Computer simulation, Deflection, Delays, Micromachining, Resonance, Ultrasonic transducers
Proceedings Papers

MEMS Coupled Resonator for Filter Application in Air

Saad Ilyas, Nizar Jaber, Mohammad I. Younis
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A021, August 6–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: DETC2017-67875
https://doi.org/10.1115/DETC2017-67875
View Paper titled, MEMS Coupled Resonator for Filter Application in Air
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Topics: Filters, Microelectromechanical systems, Design, Excitation, Filtration, Manufacturing, Microbeams, Micromachining
Proceedings Papers

Dynamics of Strongly Coupled Fluid-Filled Micro-Cavities and PMUTs in Integrated Microfluidic Devices

Ajay Dangi, Dhananjay Deshmukh, Robin Singh, Rudra Pratap
Proc. ASME. IDETC-CIE2016, Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems, V004T08A008, August 21–24, 2016
Publisher: American Society of Mechanical Engineers
Paper No: DETC2016-59910
https://doi.org/10.1115/DETC2016-59910
View Paper titled, Dynamics of Strongly Coupled Fluid-Filled Micro-Cavities and PMUTs in Integrated Microfluidic Devices
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Topics: Cavities, Dynamics (Mechanics), Fluids, Microfluidics, Acoustics, Membranes, Microbubbles, Resonance, Vibration, Acoustical properties
Proceedings Papers

Nonlinear-Based Switch Triggered by Gas Using Electrostatically Actuated Microbeams

Adam Bouchaala, Nizar Jaber, Omar Yassine, Osama Shekhah, Mohamed Eddaoudi, Mohammad I. Younis
Proc. ASME. IDETC-CIE2016, Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems, V004T08A006, August 21–24, 2016
Publisher: American Society of Mechanical Engineers
Paper No: DETC2016-59815
https://doi.org/10.1115/DETC2016-59815
View Paper titled, Nonlinear-Based Switch Triggered by Gas Using Electrostatically Actuated Microbeams
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Topics: Microbeams, Switches, Algorithms, Noise (Sound), Hardening, Metals, Microelectromechanical systems, Micromachining, Stability, Thin films
Proceedings Papers

Laser Micromachining of Thin Beams for Silicon MEMS: Optimization of Cutting Parameters Using the Taguchi Method

Tim P. Pusch, Mario D’Auria, Nima Tolou, Andrew S. Holmes
Proc. ASME. IDETC-CIE2015, Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems, V004T09A031, August 2–5, 2015
Publisher: American Society of Mechanical Engineers
Paper No: DETC2015-48100
https://doi.org/10.1115/DETC2015-48100
View Paper titled, Laser Micromachining of Thin Beams for Silicon MEMS: Optimization of Cutting Parameters Using the Taguchi Method
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Topics: Cutting, Lasers, Microelectromechanical systems, Micromachining, Optimization, Silicon, Taguchi methods, Machining, Surface roughness, Manufacturing
Proceedings Papers

Dynamics of an Imperfect Microbeam Considering its Exact Shape

Ahmad M. Bataineh, Mohammad I. Younis
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A010, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34917
https://doi.org/10.1115/DETC2014-34917
View Paper titled, Dynamics of an Imperfect Microbeam Considering its Exact Shape
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Topics: Dynamics (Mechanics), Microbeams, Shapes, Differential equations, Micromachining, Arches, Dynamic response, Eigenvalues, Frequency response, Mode shapes
Proceedings Papers

Incremental Geometric Modeling and Mask Synthesis for Surface Micromachined MEMS

Jianhua Li, Hao Ling, Zhengchun Du
Proc. ASME. IDETC-CIE2014, Volume 1A: 34th Computers and Information in Engineering Conference, V01AT02A069, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-35558
https://doi.org/10.1115/DETC2014-35558
View Paper titled, Incremental Geometric Modeling and Mask Synthesis for Surface Micromachined MEMS
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Topics: Geometric modeling, Microelectromechanical systems, Micromachining, Modeling, Design, Geometry, Maintenance
Proceedings Papers

A New Gas Bio-Sensor in the Structure of a Micro-Machined Clamped-Clamped Inertial Beam and its Readout Circuit

Bing-Ze Xue, Paul C.-P. Chao, Bor-Shyh Lin, Chun-Yin Tsai, Tsung-Lin Chen, Hsin-Hao Liao, Hann-Huei Tsai, Ying-Zong Juang
Proc. ASME. IDETC-CIE2012, Volume 1: 24th Conference on Mechanical Vibration and Noise, Parts A and B, 259-264, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70719
https://doi.org/10.1115/DETC2012-70719
View Paper titled, A New Gas Bio-Sensor in the Structure of a Micro-Machined Clamped-Clamped Inertial Beam and its Readout Circuit
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Topics: Biosensors, Circuits, Micromachining, Signals, Electric bridges, Electrical resistivity, Sensors, Waves, Computers, Design
Proceedings Papers

Wave Propagation in Membrane-Based Nonlinear Periodic Structures

Raj K. Narisetti, Massimo Ruzzene, Michael J. Leamy
Proc. ASME. IDETC-CIE2011, Volume 1: 23rd Biennial Conference on Mechanical Vibration and Noise, Parts A and B, 213-220, August 28–31, 2011
Publisher: American Society of Mechanical Engineers
Paper No: DETC2011-48700
https://doi.org/10.1115/DETC2011-48700
View Paper titled, Wave Propagation in Membrane-Based Nonlinear Periodic Structures
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Topics: Membranes, Periodic structures, Wave propagation, Energy gap, Excitation, Finite element analysis, Micromachining, Stiffness, Ultrasonic transducers