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Proceedings Papers

Three-Dimensional Flow and Transport in a Jet-Driven Rectangular Chemical Vapor Deposition (CVD) Reactor

Proc. ASME. CIE92, ASME 1992 International Computers in Engineering Conference: Volume 1 — Artificial Intelligence; Expert Systems; CAD/CAM/CAE; Computers in Fluid Mechanics/Thermal Systems, 491-498, August 2–6, 1992

Paper No: CIE1992-0058

DOI: https://doi.org/10.1115/CIE1992-0058

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Topics: Chemical vapor deposition, Flow (Dynamics), Vapors, Coating processes, Coatings, Computation, Computer simulation, Corners (Structural elements), Design, Gas flow

Proceedings Papers

Particle Transport in CVD and Diffusion Processes

Ahmed Busnaina, Xiaoying Zhu, Xiaowei Zheng

Paper No: CIE1992-0057

DOI: https://doi.org/10.1115/CIE1992-0057

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Topics: Chemical vapor deposition, Diffusion processes, Particulate matter, Furnaces, Semiconductor wafers, Aerosols, Diffusion (Physics), Turbulence, Brownian motion, Computation

Proceedings Papers

Mass Transport and Particle Transport in an LPCVD Process

Bruce S. MacGibbon, Ahmed A. Busnaina

Proc. ASME. CIE93, 13th Computers in Engineering Conference, 213-219, August 8–12, 1993

Paper No: CIE1993-0027

DOI: https://doi.org/10.1115/CIE1993-0027

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Topics: Particulate matter, Contamination, Pressure, Brownian motion, Chemical vapor deposition, Circuits, Dimensions, Drag (Fluid dynamics), Flow (Dynamics), Gravity (Force)

Proceedings Papers

Impinging Flame Prediction for CVD Diamond Synthesis

Mingchun Dong, David G. Lilley

Proc. ASME. CIE93, 13th Computers in Engineering Conference, 471-476, August 8–12, 1993

Paper No: CIE1993-0056

DOI: https://doi.org/10.1115/CIE1993-0056

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Topics: Flames, Synthetic diamonds, Diamonds, Chemical vapor deposition, Nozzles, Temperature, Chemistry, Combustion, Flow (Dynamics), High temperature

Proceedings Papers

Experimental Developments Toward Multi-Material Micron Scale Rapid Prototyping

James L. Maxwell, Joseph Pegna

Proc. ASME. DETC95, Volume 1: 21st Design Automation Conference, 227-231, September 17–20, 1995

Paper No: DETC1995-0030

DOI: https://doi.org/10.1115/DETC1995-0030

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Topics: Rapid prototyping, Calibration, Carbon, Ceramics, Chemical vapor deposition, Computers, Degrees of freedom, Intermetallic compounds, Lasers, Metals

Proceedings Papers

Design Considerations for Manufacturability of MEMS Comb Actuators

Hrishikesh Dixit, Dean L. Taylor, Srikanth Kannapan

Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A047, August 18–22, 1996

Paper No: 96-DETC/DFM-1311

DOI: https://doi.org/10.1115/96-DETC/DFM-1311

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Topics: Actuators, Design, Design for Manufacturing, Microelectromechanical systems, Manufacturing, Parametric design, Chemical vapor deposition, Etching, Integrated circuits, Lithography

Proceedings Papers

Removal of Submicron Particles Using High Frequency Ultrasonics

Ahmed A. Busnaina, Fen Dai

Proc. ASME. DETC-CIE96, Volume 6: 16th Computers in Engineering Conference, V006T06A018, August 18–22, 1996

Paper No: 96-DETC/CIE-1352

DOI: https://doi.org/10.1115/96-DETC/CIE-1352

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Topics: Particulate matter, Ultrasonics, Ultrasonic cleaning, Contamination, Chemical vapor deposition, Integrated circuit fabrication, Reactive-ion etching, Semiconductor wafers, Semiconductors (Materials)

Proceedings Papers

Modeling of Particulate Contamination in Tungsten Low Pressure Chemical Vapor Deposition

Ahmed A. Busnaina, Bruce S. MacGibbon

Proc. ASME. DETC-CIE96, Volume 6: 16th Computers in Engineering Conference, V006T06A015, August 18–22, 1996

Paper No: 96-DETC/CIE-1351

DOI: https://doi.org/10.1115/96-DETC/CIE-1351

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Topics: Chemical vapor deposition, Contamination, Modeling, Particulate matter, Pressure, Tungsten, Temperature gradient, Boundary-value problems, Drag (Fluid dynamics), Gravity (Force)

Proceedings Papers

Slurry Residue Removal in Post Chemical Mechanical Polishing

Ahmed A. Busnaina, Naim Moumen

Proc. ASME. DETC99, Volume 2: 19th Computers and Information in Engineering Conference, 87-92, September 12–16, 1999

Paper No: DETC99/CIE-9049

DOI: https://doi.org/10.1115/DETC99/CIE-9049

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Topics: Chemical vapor deposition, Contamination, Oxidation, Particulate matter, Polishing, Semiconductor wafers, Slurries

Proceedings Papers

316L Stainless Steel Sensitization in Carbon Nanotube CVD Growth for Bacterial Resistance

Sterling Voss, Bret Mecham, Lucy Bowden, Jacquelyn Monroe, Anton E. Bowden, Brian D. Jensen

Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A005, August 17–19, 2020

Paper No: DETC2020-22391

DOI: https://doi.org/10.1115/DETC2020-22391

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Topics: Carbon nanotubes, Chemical vapor deposition, Stainless steel, Carbon, Steel corrosion, Atoms, Bacteria, Biomaterials, Corrosion, Experimental methods

Proceedings Papers

Design of a Graphene Nanoribbon Electrostatic Discharge Compliant Mechanism

Talmage H. Jones, Jimmy Ng, Ya-Hong Xie, Jonathan B. Hopkins

Proc. ASME. IDETC-CIE2018, Volume 5A: 42nd Mechanisms and Robotics Conference, V05AT07A016, August 26–29, 2018

Paper No: DETC2018-86069

DOI: https://doi.org/10.1115/DETC2018-86069

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Topics: Compliant mechanisms, Design, Graphene, Stress, Boundary-value problems, Capacitance, Chemical vapor deposition, Elastic constants, Engineering simulation, Failure

Proceedings Papers

Fabrication and Testing of Planar Stent Mesh Designs Using Carbon Infiltrated Carbon Nanotubes

Kristopher Jones, Brian D. Jensen, Anton Bowden

Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A005, August 4–7, 2013

Paper No: DETC2013-13297

DOI: https://doi.org/10.1115/DETC2013-13297

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Topics: Carbon, Carbon nanotubes, Manufacturing, Stents, Testing, Ceramics, Elongation, Failure, Fracture (Materials), Fracture (Process)

Proceedings Papers

Simulation of Surface Chemistry in CVD Technologies: A Detailed Deposition Model With Surface Diffusion

Sergei Klimovich, Yuriy Gorbachev, Valeria Krzhizhanovskaya

Proc. ASME. IDETC-CIE2010, Volume 3: 30th Computers and Information in Engineering Conference, Parts A and B, 211-212, August 15–18, 2010

Paper No: DETC2010-28455

DOI: https://doi.org/10.1115/DETC2010-28455

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Topics: Chemical vapor deposition, Diffusion (Physics), Simulation, Surface science, Plasmas (Ionized gases), Dynamics (Mechanics), Electronics, Flow (Dynamics), Gases, Modeling

Proceedings Papers

Surface Finishing Using Carbon Nanotube Forest

Tsung-Cho Wu, Neng-Kai Chang, Chi-Chung Su, Ping-Kung Huang, Yao-Yang Tsai, Hung-Yi Lin, Shuo-Hung Chang

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 523-527, August 3–6, 2008

Paper No: DETC2008-49461

DOI: https://doi.org/10.1115/DETC2008-49461

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Topics: Carbon nanotubes, Surface finishing, Brass (Metal), Surface roughness, Semiconductor wafers, Wheels, Bushings, Chemical vapor deposition, Milling machines, Nanoscale phenomena

Proceedings Papers

Polymer Coated Tin Oxide Nanowires for Improved Sensitivity of MEMS Chemical Sensors Based on Microbeams

Mark A. Zielke, Andrew Morrill, Barry Demartini, Martin Moskovits, Kimberly Turner

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 599-604, August 3–6, 2008

Paper No: DETC2008-49843

DOI: https://doi.org/10.1115/DETC2008-49843

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Topics: Microbeams, Microelectromechanical systems, Nanowires, Polymers, Sensors, Coatings, Cantilevers, Catalysts, Chemical vapor deposition, Q-factor

Proceedings Papers

Parametric Modeling and Optimization of Chemical Vapor Deposition Process

Po Ting Lin, Yogesh Jaluria, Hae Chang Gea

Proc. ASME. IDETC-CIE2008, Volume 1: 34th Design Automation Conference, Parts A and B, 757-766, August 3–6, 2008

Paper No: DETC2008-50054

DOI: https://doi.org/10.1115/DETC2008-50054

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Topics: Chemical vapor deposition, Modeling, Optimization, Thin films, Silicon

Proceedings Papers

Highly Organized Carbon Nanotube-PDMS Hybrid System for Multifunctional Flexible Devices

Yung J. Jung, Laila Jaber-Ansari, Xugang Xiong, Sinan Mu¨ftu¨, Ahmed Busnaina, Swastik Kar, Caterina Soldano, Pulickel M. Ajayan

Proc. ASME. IDETC-CIE2007, Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B, 653-658, September 4–7, 2007

Paper No: DETC2007-35442

DOI: https://doi.org/10.1115/DETC2007-35442

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Topics: Carbon, Carbon nanotubes, Composite materials, Electron field emission, Nanotubes, Plasma desorption mass spectrometry, Architecture, Chemical vapor deposition, Multi-walled nanotubes, Single-walled nanotubes

Proceedings Papers

Generation of Process Plans for Laser Chemical Vapor Deposition

Jae-hyoung Park, David W. Rosen

Proc. ASME. IDETC-CIE2003, Volume 1: 23rd Computers and Information in Engineering Conference, Parts A and B, 159-167, September 2–6, 2003

Paper No: DETC2003/CIE-48187

DOI: https://doi.org/10.1115/DETC2003/CIE-48187

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Topics: Chemical vapor deposition, Lasers, Production planning, Rapid prototyping

Proceedings Papers

Optimization of Chemical Vapor Deposition Process

Pradeep George, Hae Chang Gea, Yogesh Jaluria

Proc. ASME. IDETC-CIE2006, Volume 1: 32nd Design Automation Conference, Parts A and B, 309-316, September 10–13, 2006

Paper No: DETC2006-99748

DOI: https://doi.org/10.1115/DETC2006-99748

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Topics: Chemical vapor deposition, Optimization, Response surface methodology, Thin films, Computer simulation, Design, Film thickness, Gases, Silicon, Temperature

NARROW

Three-Dimensional Flow and Transport in a Jet-Driven Rectangular Chemical Vapor Deposition (CVD) Reactor

Particle Transport in CVD and Diffusion Processes

Mass Transport and Particle Transport in an LPCVD Process

Impinging Flame Prediction for CVD Diamond Synthesis

Experimental Developments Toward Multi-Material Micron Scale Rapid Prototyping

Design Considerations for Manufacturability of MEMS Comb Actuators

Removal of Submicron Particles Using High Frequency Ultrasonics

Modeling of Particulate Contamination in Tungsten Low Pressure Chemical Vapor Deposition

Slurry Residue Removal in Post Chemical Mechanical Polishing

316L Stainless Steel Sensitization in Carbon Nanotube CVD Growth for Bacterial Resistance

Design of a Graphene Nanoribbon Electrostatic Discharge Compliant Mechanism

Fabrication and Testing of Planar Stent Mesh Designs Using Carbon Infiltrated Carbon Nanotubes

Simulation of Surface Chemistry in CVD Technologies: A Detailed Deposition Model With Surface Diffusion

Surface Finishing Using Carbon Nanotube Forest

Polymer Coated Tin Oxide Nanowires for Improved Sensitivity of MEMS Chemical Sensors Based on Microbeams

Parametric Modeling and Optimization of Chemical Vapor Deposition Process

Highly Organized Carbon Nanotube-PDMS Hybrid System for Multifunctional Flexible Devices

Generation of Process Plans for Laser Chemical Vapor Deposition

Optimization of Chemical Vapor Deposition Process

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