Abstract

The nonlinear dynamics in micro/nano electromechanical sensor have attracted a myriad of attention of researchers due to its great potential to improve sensors’ performance In this paper, a novel mass sensor exploiting the bifurcation phenomenon in parametrically excited mode-localized resonators is proposed. The mathematical model is established by Euler-Bernoulli theory and solved by the method of multiple scales. Meanwhile, the harmonic balance method combined with asymptotic numerical method is utilized for validation. The dynamics and bifurcation topology of the sensor are investigated and the potential of mass sensing on bifurcation point is explored. Compared to relative shift of frequency, the sensitivity in terms of relative shift of amplitude ratio can be enhanced by 4 orders of magnitude. Finally, the effects of coupling voltage are studied which shows that the sensitivity can be further improve with the decrease of coupling voltage above the mode aliasing.

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