Abstract

Due to the increasing demand for smarter solutions and embedded systems, MEMS resonator-based computing devices have been under considerable attention for their simplicity and prospect of low computational power. However, most complex logic functions require multi-input/output lines that are cascadable such that the outputs of one device can be used as inputs into subsequent devices for practical applications, and this is a current limitation for MEMS logic devices. In this study, we demonstrate multi-inputs/outputs half-adder function, AND, and XOR logic gates on the basis of activating and deactivating the localization and delocalization of the multi vibrational modes of a single MEMS resonator with improved energy efficiency.

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