The paper introduces the design optimization for micro-positioning stage using corrugated flexure (CF) units under stress constraints. The stress state is solved and the maximum displacement under stress constraints is deduced. The natural frequency formula of the micro-positioning stage is further derived from the results of the stiffness matrix. Finally, the stage configurations corresponding to the maximum displacement are optimized by restricting the off-axis/axial stiffness ratio and natural frequency of the stage.

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