Structural compliance of hexapods limits their positioning accuracy. Taking a step towards solving this problem, this paper proposes a new efficient method to evaluate the stiffness of hexapods in order to predict and correct their positioning error due to compliance. The proposed method can be used to predict the six degree of freedom deflection of the platform under load. This method uses a simple lumped stiffness parameter model whose parameters can be estimated using the identification technique presented in this paper. An experimental study with micrometer level measurements performed on a hexapod based micro-positioning system is used to assess the efficiency of the presented method.

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