Casimir effect on superharmonic resonance of electrostatically actuated bio-nano-electro-mechanical system (Bio-NEMS) circular plate resonator sensor is investigated. The plate sensor resonator is clamped at the outer end and suspended over a parallel ground plate. The sensor can be used for detecting human viruses. Superharmonic resonance of the second order, frequency near one-fourth the natural frequency of the resonator, is induced using Alternating Current (AC) voltage. The magnitude of the AC voltage is also large enough to be consider hard excitation acting on the resonator. Beside Casimir effect, other external forces (i.e. electrostatic force and viscous air damping) acting on the MEMS resonator create a nonlinear behaviors such as bifurcation and pull-in instability. Hence, numerical models, such as Method of Multiple Scales (MMS) and Reduced Order Model (ROM), are used to predict the frequency-amplitude response for MEMS resonator. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. While, ROM, based on the Galerkin procedure which uses the mode shapes of vibration of the resonator as a basis of functions, transforms the nonlinear partial differential equation of motion into a system of ordinary differential equation with respect to dimensionless time. The frequency-amplitude response allows one to observe the behavior of the system for a range of frequencies near the superharmonic resonance. The effects of parameters such as Casimir effect, voltage, and damping on the frequency-amplitude response are reported.
Skip Nav Destination
ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 26–29, 2018
Quebec City, Quebec, Canada
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-5179-1
PROCEEDINGS PAPER
Casimir Effect on Superharmonic Resonance of Bio-NEMS Circular Plate Resonator Sensors
Martin Botello,
Martin Botello
University of Texas Rio Grande Valley, Edinburg, TX
Search for other works by this author on:
Dumitru I. Caruntu
Dumitru I. Caruntu
University of Texas Rio Grande Valley, Edinburg, TX
Search for other works by this author on:
Martin Botello
University of Texas Rio Grande Valley, Edinburg, TX
Dumitru I. Caruntu
University of Texas Rio Grande Valley, Edinburg, TX
Paper No:
DETC2018-85383, V004T08A002; 6 pages
Published Online:
November 2, 2018
Citation
Botello, M, & Caruntu, DI. "Casimir Effect on Superharmonic Resonance of Bio-NEMS Circular Plate Resonator Sensors." Proceedings of the ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. Quebec City, Quebec, Canada. August 26–29, 2018. V004T08A002. ASME. https://doi.org/10.1115/DETC2018-85383
Download citation file:
14
Views
Related Proceedings Papers
Related Articles
Nonlinear Transverse Vibrations and 3:1 Internal Resonances of a Beam With Multiple Supports
J. Vib. Acoust (April,2008)
An Efficient Reduced-Order Model to Investigate the Behavior of an Imperfect Microbeam Under Axial Load and Electric Excitation
J. Comput. Nonlinear Dynam (January,2013)
The Nonlinear Response of a Simply Supported Rectangular Metallic Plate to Transverse Harmonic Excitation
J. Appl. Mech (September,2000)
Related Chapters
Fluidelastic Instability of Tube Bundles in Single-Phase Flow
Flow-Induced Vibration Handbook for Nuclear and Process Equipment
Cellular Automata: In-Depth Overview
Intelligent Engineering Systems through Artificial Neural Networks, Volume 20
Introduction
Introduction to Finite Element, Boundary Element, and Meshless Methods: With Applications to Heat Transfer and Fluid Flow