Cyber-physical systems (CPS) extensively share information with each other, work collaboratively over Internet of Things, and seamlessly integrated with human society. Designing CPS requires the new consideration of design for connectivity where security, privacy, and trust are of the main concerns. Particularly trust can affect system behavior in a networked environment. In this paper, trustworthiness is quantitatively measured by the perceptions of ability, benevolence, and integrity. Ability indicates the capabilities of sensing, reasoning, and influence in a society. Benevolence measures the genuineness of intention and reciprocity in information exchange. Integrity captures the system predictability and dependability. With these criteria, trust-based CPS network design and optimization are demonstrated.

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