The ability to split femtosecond free electron laser pulses and recombine them with an adjustable delay has numerous scientific applications. In this work, we present a symmetrical multi-DOF motion system placed on a granite table for a wavefront-splitting based hard X-ray split-delay system at the Linac Coherent Light Source [1,2]. In order to achieve ultra-precision multi-DOF motion, a planar air bearing based linear stage is embedded into the system. It features setting the granite table as the reference plane and using flexure mechanisms to decouple the parasitic motion errors. In this application, it is located in the delay line for improving stability and accuracy during the delay adjustments in order to maintain spatial overlap between the two branches. Stiffness matrix derivation and analysis are also presented.

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