In the present paper, we take the input and output decoupling into account and propose a 2-DOF parallel nanopositioner, which is composed of lever amplification mechanisms, compound parallelogram mechanisms and novel crosshair flexures. In order to demonstrate the decoupling performance improvement of the crosshair flexures, the stiffness model of the crosshair flexures and the kinetostatics model of the nanopositioner are established based on Castigliano’s theorem and the compliance matrix method. Accordingly, the input and output decoupling compliance matrix models are derived to demonstrate the excellent decoupling property of the crosshair flexures based nanopositioner, which is further verified by finite-element analysis and experimental results. The open-loop experiments on the prototype stage demonstrate the maximum stroke of the nanopositioner is up to 65μm and the cross axis coupling errors are less than 1.6%.

This content is only available via PDF.
You do not currently have access to this content.