Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
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ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 21–24, 2016
Charlotte, North Carolina, USA
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-5020-6
PROCEEDINGS PAPER
Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment
Shahid Saghir,
Shahid Saghir
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
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Mohammed L. Bellaredj,
Mohammed L. Bellaredj
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
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Mohammad I. Younis
Mohammad I. Younis
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Search for other works by this author on:
Shahid Saghir
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Mohammed L. Bellaredj
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Mohammad I. Younis
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
Paper No:
DETC2016-59838, V008T10A020; 12 pages
Published Online:
December 5, 2016
Citation
Saghir, S, Bellaredj, ML, & Younis, MI. "Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment." Proceedings of the ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 8: 28th Conference on Mechanical Vibration and Noise. Charlotte, North Carolina, USA. August 21–24, 2016. V008T10A020. ASME. https://doi.org/10.1115/DETC2016-59838
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