Investigation of Wave Propagation Behavior in Magnetically Coupled MEMS Oscillators

This paper investigates the dynamic behavior of a 1D array of magnetically coupled MEMS oscillators. To facilitate future research and innovation, this paper details the model used to predict wave propagation behavior in the microfabricated array. The investigations model the oscillator array as a series of clamped-clamped beams that are coupled via magnetic proof masses. The contributions to system dynamics of the beam and magnetic interactions of each oscillator are theorized. Finally, the dynamic behavior for the entire array is investigated with a series of theoretical trend studies.