This paper deals with Casimir and van der Waals effects on the frequency response of parametric resonance of electrostatically actuated NEMS circular plates for bio-sensing applications. The bio-NEMS resonator consists of a clamped circular elastic plate over a fixed electrode plate. A soft AC voltage of frequency near natural frequency between the plates gives an electrostatic force that leads the elastic plate into vibration which leads to parametric resonance that can be used afterwards for biosensing purposes. Frequency response and the effects of Casimir, and van der Waals forces on the response are reported.

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